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    • 21. 发明专利
    • SERVO DEVICE
    • JPH08232904A
    • 1996-09-10
    • JP6863995
    • 1995-03-02
    • EBARA CORP
    • MOCHIZUKI NOBUHIROYAMASHINA TOMOSHIROUUSAMI YUICHI
    • G21D1/00F04B49/06F15B9/09
    • PURPOSE: To provide a servo device for use in the radiation field such as nuclear reactors, which is capable of improving the danger of contaminating water, reduction in output density due to mechanical limitation, and the limitation of control accuracy and operating speed, in which the danger of polluting water is extremely reduced while high output density is held, and which is capable of realizing smooth action of an actuator, high-speed, high precision positioning, control of optional, speeds. CONSTITUTION: In a servo device provided with a servo mechanism for operating apparatuses in the radiation field, and a servo control unit for controlling the servo mechanism, the servo mechanism i.s provided with an actuator 1 which is connected to a machine system 7 as an object to be controlled and in which water serves as a working fluid, a water-pressure servo valve 2 for controlling the supply and discharge of water to and from the actuator 1, a water-pressure pipelines 9 connecting the actuator 1 to the water-pressure servo valve 2, and a high pressure water generating device 5 for supplying high-pressure water to the water-pressure servo valve 2. Further, the servo control unit is provided with a servo controller 4 for controlling the water-pressure servo valve 2, and a servo driver 3.
    • 26. 发明专利
    • CONTROL DEVICE
    • JP2002149204A
    • 2002-05-24
    • JP2000346671
    • 2000-11-14
    • EBARA CORP
    • TAKAHASHI YOSHIMIZUMOCHIZUKI NOBUHIRO
    • F15B9/09G05B11/32G05B11/36G05D3/12
    • PROBLEM TO BE SOLVED: To provide such a control device that the correspondence relation among parameters to be adjusted for multiple control specifications can be easily recognized and the response waveform of a controlled system can be easily and visually adjusted. SOLUTION: This control device is equipped with a target signal generator 11 which generates a target signal, a feedback compensator 15 which computes a first manipulated variable according to the deviation of the output signal S of the controlled system from the target value signal, and a feedforward compensator 14 which computes a second manipulated variable according to the target value signal branched off from the target value signal generator 11 and performs two-degree-of-freedom control so that the first and second manipulated variables are added to obtain a manipulated variable of the controlled system and the output of the controlled system is made to coincide with the target value signal; and the target value signal is inputted to the feedback compensator 15 and feedforward compensator 14 via different filters 12 and 13, respectively.