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21. 发明公开

EP3391152A1 METHODS AND SYSTEMS FOR PRINTING ARRAYS OF FEATURES 审中-公开
公开(公告)号：EP3391152A1
公开(公告)日：2018-10-24
申请号：EP16825567.7
申请日：2016-12-14
申请人： EULITHA A.G.
发明人： CLUBE, Francis , SOLAK, Harun
IPC分类号： G03F7/20
CPC分类号： G03F7/70408 , G03F7/70091 , G03F7/7035
摘要： A method for printing a desired periodic pattern into a photosensitive layer on a substrate includes providing a mask bearing a periodic pattern whose period is a multiple of that of the desired pattern. The substrate is disposed in proximity to the mask, at least one beam is provided for illuminating the mask pattern to generate a transmitted light-field described by a Talbot distance. The layer is exposed to time-integrated intensity distributions in a number of sub-exposures by illuminating the mask pattern with the at least one beam while changing the separation between substrate and mask by at least a certain fraction of, but less than, the Talbot distance. The illumination or the substrate is configured relative to the mask for the different sub-exposures so that the layer is exposed to the same time-integrated intensity distributions that are mutually laterally offset by a certain distance and in a certain direction.

22. 发明授权

EP2663898B1 METHOD AND SYSTEM FOR PRINTING HIGH-RESOLUTION PERIODIC PATTERNS 有权
标题翻译：方法和系统印刷图案周期性高位解决方案
公开(公告)号：EP2663898B1
公开(公告)日：2015-03-25
申请号：EP12708160.2
申请日：2012-01-10
申请人： Eulitha A.G.
发明人： CLUBE, Francis , SOLAK, Harun
IPC分类号： G03F7/20
CPC分类号： G03F7/70091 , G03F7/7035 , G03F7/70408

23. 发明公开

EP3781989A1 METHODS AND SYSTEMS FOR PRINTING LARGE PERIODIC PATTERNS BY OVERLAPPING EXPOSURE FIELDS 有权
公开(公告)号：EP3781989A1
公开(公告)日：2021-02-24
申请号：EP19725868.4
申请日：2019-04-18
申请人： EULITHA A.G.
发明人： CLUBE, Francis , SOLAK, Harun
IPC分类号： G03F7/20

24. 发明公开

EP3237973A1 METHOD FOR PRINTING COLOUR IMAGES 有权
标题翻译：打印彩色图像的方法
公开(公告)号：EP3237973A1
公开(公告)日：2017-11-01
申请号：EP15831071.4
申请日：2015-12-18
申请人： Eulitha A.G.
发明人： SOLAK, Harun H. , DAIS, Christian , CLUBE, Francis
IPC分类号： G03F7/00 , G03F7/20
CPC分类号： G03F7/70466 , G02B5/008 , G02B5/1809 , G02B5/204 , G03F7/0007 , G03F7/40 , G03F7/70408 , G03F7/7045 , G03F7/70558
摘要： A method forms a pattern of metallic nanofeatures that generates by plasmonic resonance a desired image having a distribution of colors. The method includes providing a substrate having a layer of photosensitive material, exposing the layer to a high-resolution periodic pattern of dose distribution, and determining a low-resolution pattern of dose distribution such that the sum of the low-resolution pattern and the high-resolution periodic pattern of dose distribution is suitable for forming the pattern of metallic nanofeatures. The lateral dimensions of the metallic nano-features have a spatial variation across the pattern that corresponds to the distribution of colors in the desired image. The layer of photosensitive material is exposed to the low-resolution pattern of dose distribution. The layer of photosensitive material is developed to produce a pattern of nanostructures in the developed photosensitive material. The pattern of nanostructures is processed so that the pattern of metallic nanofeatures is formed.
摘要翻译：一种用于形成通过等离子体激元共振产生具有颜色分布的期望图像的金属纳米特征图案的方法，该方法包括提供具有光敏材料层的基底，将该层暴露于剂量分布的高分辨率周期性图案，确定剂量分布的至少一个低分辨率图案，使得剂量分布的至少一个低分辨率图案和剂量分布的高分辨率周期图案的总和适合于形成金属纳米特征的图案，其中侧向所述金属纳米特征的尺寸在图案上具有对应于期望图像中的颜色分布的空间变化，将感光材料层暴露于所述至少一个低分辨率剂量分布图案，将感光材料层显影为在显影的感光材料中产生纳米结构图案，处理纳米结构的图案，使得金属纳米特征的图案形成为横跨对应于期望图像中的颜色分布的图案的横向尺寸的所述空间变化。

25. 发明公开

EP2976678A2 METHODS AND SYSTEMS FOR PRINTING PERIODIC PATTERNS 有权
标题翻译： VERFAHREN UND SYSTEME ZUM DRUCKEN PERIODISCHER MUSTER
公开(公告)号：EP2976678A2
公开(公告)日：2016-01-27
申请号：EP14721965.3
申请日：2014-03-18
申请人： Eulitha A.G.
发明人： CLUBE, Francis , SOLAK, Harun , DAIS, Christian
IPC分类号： G03F7/20
CPC分类号： G03F7/70191 , G03F7/7035 , G03F7/70408
摘要： A method for printing a periodic pattern of features into a photosensitive layer, which includes providing a mask bearing a periodic pattern, providing a substrate bearing the photosensitive layer, arranging the substrate substantially parallel to the mask, forming a beam of collimated monochromatic light for illuminating said mask pattern so that the light-field transmitted by the mask forms Talbot image planes separated by a Talbot distance, and performing N sub- exposures of the mask with said beam and changing the separation between sub-exposures so that the relative separation during the ith sub-exposure with respect to that during the first sub-exposure is given by (m
i + n
i /N) times the Talbot distance, and exposing the mask pattern to the same energy density of illumination for each sub-exposure, wherein the period is selected in relation to the wavelength so that only the zeroth and first diffraction orders are transmitted by the mask.
摘要翻译：将特征的周期性图案印刷到感光层中的方法包括提供带有周期性图案的掩模，提供承载感光层的基底，以及基本上平行于掩模布置基底。形成准直的单色光束以照射掩模图案，使得由掩模传输的光场形成由Talbot距离分开的Talbot图像平面。执行具有光束的掩模的N次曝光，并且改变副曝光之间的间隔，使得在第一次曝光期间相对于第一次曝光期间的相对间隔由（mi + ni / N）倍Talbot距离。对于每个次曝光，掩模图案暴露于相同的照明能量密度，其中相对于波长选择周期，使得仅通过掩模传输第零和第一衍射级。

26. 发明公开

EP2663898A2 METHOD AND SYSTEM FOR PRINTING HIGH-RESOLUTION PERIODIC PATTERNS 有权
标题翻译：方法和系统印刷图案周期性高位解决方案
公开(公告)号：EP2663898A2
公开(公告)日：2013-11-20
申请号：EP12708160.2
申请日：2012-01-10
申请人： Eulitha A.G.
发明人： CLUBE, Francis , SOLAK, Harun
IPC分类号： G03F7/20
CPC分类号： G03F7/70091 , G03F7/7035 , G03F7/70408
摘要： A method for printing a desired periodic pattern, which includes providing a mask bearing a pattern of features having a period, providing a substrate bearing a photosensitive layer, arranging the substrate with a separation from the mask, generating collimated light with a wavelength and an intensity, at least the former of which may be temporally varied to deliver a spectral distribution of energy density, illuminating the mask pattern with said light whilst varying at least its wavelength so as to deliver a spectral distribution of energy density, such that the light-field transmitted by the mask is instantaneously composed of a range of transversal intensity distributions between Talbot planes, and whereby the layer is exposed to a time-integrated intensity distribution that prints the desired pattern, wherein the separation, spectral distribution and period are arranged so that the time-integrated intensity distribution corresponds to an average of the range of transversal intensity distributions.

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