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21. 发明专利

DE112007001549T5 未知
公开(公告)号：DE112007001549T5
公开(公告)日：2009-05-20
申请号：DE112007001549
申请日：2007-07-10
申请人： ELECTRO SCIENT IND INC
发明人： MATSUMOTO HISASHI , SINGER MARK , BALDWIN LEO , HOWERTON JEFFREY E , CHILDERS DAVID V
IPC分类号： G01L21/30 , B44C1/22
摘要： A process for laser forming a blind via in at least one layer of a circuit substrate having a plurality of capture pads of varying geometry can include, for at least one blind via to be formed in at least one layer of a circuit substrate, evaluating a capture pad geometry value (such as area and/or volume) within a predetermined distance from a drilling location with respect to a blind via geometry value (such as area and/or volume) to be formed at the drilling location. The process can include setting at least one laser operating parameter based on the evaluation in order to obtain a desired capture pad appearance after blind via formation. The process can include imaging a capture pad area defined as an area within a predetermined distance from a blind via drilling location in at least one layer of a circuit substrate, quantifying at least one appearance value for the imaged capture pad area, and determining an acceptability of the imaged capture pad areas based on the quantified appearance value.

22. 发明专利

GB2453286A Process and system for quality management and analysis of via drilling 未知
公开(公告)号：GB2453286A
公开(公告)日：2009-04-01
申请号：GB0900113
申请日：2007-07-10
申请人： ELECTRO SCIENT IND INC
发明人： MATSUMOTO HISASHI , SINGER MARK , BALDWIN LEO , HOWERTON JEFFREY E , CHILDERS DAVID V
IPC分类号： G01L21/30 , B23K26/38 , B44C1/22
摘要： A process for laser forming a blind via in at least one layer of a circuit substrate having a plurality of capture pads of varying geometry can include, for at least one blind via to be formed in at least one layer of a circuit substrate, evaluating a capture pad geometry value (such as area and/or volume) within a predetermined distance from a drilling location with respect to a blind via geometry value (such as area and/or volume) to be formed at the drilling location. The process can include setting at least one laser operating parameter based on the evaluation in order to obtain a desired capture pad appearance after blind via formation. The process can include imaging a capture pad area defined as an area within a predetermined distance from a blind via drilling location in at least one layer of a circuit substrate, quantifying at least one appearance value for the imaged capture pad area, and determining an acceptability of the imaged capture pad areas based on the quantified appearance value.

23. 发明专利

GB2437372B Image subtraction of illumination artifacts 未知
公开(公告)号：GB2437372B
公开(公告)日：2008-08-06
申请号：GB0614372
申请日：2004-12-06
申请人： ELECTRO SCIENT IND INC
发明人： BALDWIN LEO
IPC分类号： G06K9/20 , G06T5/00
摘要： A method of removing an artifact resulting from an in-line illumination device of an imaging system from an object image. It includes obtaining a first image of the artifact using a first artifact illumination level and imaging the object using the imaging system wherein the illumination device is using an object illumination level. An artifact image is independent of the object and has pixel values related to the illumination level. Thus, the artifact can be removed by subtracting respective pixel values of an artifact image from respective values of the object image on a pixel address-by-pixel address basis. Various illumination levels can be used to create more than one artifact image. The artifact image for the subtraction can be one of the images taken or can be a scaled image where an artifact image is scaled to the object illumination level.

24. 发明专利

DE112006001819T5 未知
公开(公告)号：DE112006001819T5
公开(公告)日：2008-06-19
申请号：DE112006001819
申请日：2006-07-07
申请人： ELECTRO SCIENT IND INC
发明人： BALDWIN LEO
IPC分类号： G01N21/00
摘要： Systems and methods are provided for achieving convergent light rays emitted by a planar array of light sources. In one embodiment, an imaging device is provided for inspecting semiconductors or other objects. The imaging device includes one or more imaging lens for imaging light reflected from an object. The imaging device also includes a first light source attached to a planar circuit board and a second light source attached to the planar circuit board. The imaging device further includes a first Fresnel prism for directing light from the first light source toward the object from a first direction and a second Fresnel prism for directing light from the second light source toward the object from a second direction. In one embodiment, the imaging device also includes one or more optical elements for increasing or decreasing the divergence of the light.

25. 发明专利

GB2413859A Coaxial narrow angle data field lighting 未知
公开(公告)号：GB2413859A
公开(公告)日：2005-11-09
申请号：GB0516651
申请日：2004-01-27
申请人： ELECTRO SCIENT IND INC
发明人： BALDWIN LEO
IPC分类号： G01N21/88 , G02B21/10 , G06K9/00 , G02B13/22 , G03B15/02
摘要： A coaxial narrow angle dark field imaging system is provided. The system utilizes a telecentric lens to illuminate objects with symmetric coaxial narrow angle dark field illumination. The illumination technique is particularly suited to highlight minor features or defects on planar specular objects. In particular, the coaxial light source directs light rays towards a telecentric lens which redirects the light rays towards the substantially planar specular object. The light rays are reflected back through the telecentric lens towards a camera. To the extent that the light rays are reflected from a planar specular portion of the object the light rays are blocked by a telecentric stop. Light rays reflected from a defect or feature in the planar specular object will pass through an aperture in the stop to a camera.

26. 发明专利

AU2003251878A8 Method and apparatus for uniform lighting source 未知
公开(公告)号：AU2003251878A8
公开(公告)日：2004-02-02
申请号：AU2003251878
申请日：2003-07-11
申请人： ELECTRO SCIENT IND INC
发明人： EVANS FRANK , BALDWIN LEO
IPC分类号： F21V20060101 , F21V1/00 , F21V5/00 , F21V13/14 , F21V17/02 , F21V23/04 , G01N21/88
摘要： The present invention provides a light source which improves the lighting for objects which include a nontrivial bi-directional reflectance distribution function and a nominal illumination angle. A two dimensional light source is positioned at an angle which is complementary to the nominal illumination angle such that the object is illuminated at its nominal illumination angle.

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