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21. 再颁专利

USRE30863E Method for crucible-free zone meeting of semiconductor crystal rods 失效
标题翻译：半导体晶体棒无坩埚区会议的方法
公开(公告)号：USRE30863E
公开(公告)日：1982-02-09
申请号：US778587
申请日：1977-03-17
申请人： Wolfgang Keller
发明人： Wolfgang Keller
IPC分类号： C30B13/00 , C30B13/28 , C30B29/06 , H01L21/208
CPC分类号： C30B13/285 , Y10T117/1084
摘要： Polycrystalline semiconductor rods are converted to dislocation-free monocrystal rods by positioning a polycrystalline rod within a crucible-free zone melt environment with a seed crystal attached to one end thereof, generating a melt zone at the juncture of the seed crystal and the polycrystalline rod, controllably moving the melt zone away from the juncture and through the polycrystalline rod to a select point thereon, uniformly supporting the cone-shaped lower portion of the rod being processed so as to prevent oscillations and the like at the juncture of the rod in the seed crystal and controllably moving the melt zone from the select point to the remainder of the rod. A uniform support is preferably provided by an axially movable funnel-shaped casing which is attached to the seed crystal holding member and which, when moved into its operating position, is filled with a self-adjusting oscillation or vibration dampening means, such as molten metal, metal spheroids, quartz particles, sand, etc.

22. 发明授权

US3996096A Method for crucible-free zone melting of semiconductor crystal rods 失效
标题翻译：半导体晶体棒无坩埚区熔化的方法
公开(公告)号：US3996096A
公开(公告)日：1976-12-07
申请号：US638261
申请日：1975-12-08
申请人： Wolfgang Keller
发明人： Wolfgang Keller
IPC分类号： C30B13/28 , B01J17/10
CPC分类号： C30B13/285 , Y10S117/90 , Y10S117/911 , Y10T117/1084
摘要： Polycrystalline semiconductor rods are converted to dislocation-free monocrystal rods by positioning a polycrystalline rod within a crucible-free zone melt environment with a seed crystal attached to one end thereof, generating a melt zone at the juncture of the seed crystal and the polycrystalline rod, controllably moving the melt zone away from the juncture and through the polycrystalline rod to a select point thereon, uniformly supporting the cone-shaped lower portion of the rod being processed so as to prevent oscillations and the like at the juncture of the rod in the seed crystal and controllably moving the melt zone from the select point to the remainder of the rod. A uniform support is preferably provided by an axially movable funnel-shaped casing which is attached to the seed crystal holding member and which, when moved into its operating position, is filled with a self-adjusting oscillation or vibration dampening means, such as molten metal, metal spheroids, quartz particles, sand, etc.
摘要翻译：将多晶半导体棒通过将多晶棒定位在无坩埚区熔融环境中而将其转化为无位错的单晶棒，其中晶种与其一端相连，在晶种和多晶棒的接合处产生熔融区，将熔体区域可控地移动离开接合点并通过多晶棒到其上的选择点，均匀地支撑被处理的杆的锥形下部，以防止在种子的杆的接合处的振荡等晶体并且可控地将熔体区域从选择点移动到杆的剩余部分。优选地，均匀的支撑件由可轴向移动的漏斗形壳体提供，所述壳体附接到晶种保持构件，并且当移动到其操作位置时，填充有自调节振动或减振装置，例如熔融金属，金属球体，石英颗粒，沙子等

23. 发明授权

US3985947A Device and method for crucible-free zone melting of crystallizable rods in particular semiconductor rods 失效
标题翻译：可结晶棒特别是半导体棒无坩埚区熔化的装置和方法
公开(公告)号：US3985947A
公开(公告)日：1976-10-12
申请号：US572966
申请日：1975-04-30
申请人： Wolfgang Keller
发明人： Wolfgang Keller
IPC分类号： H05B6/32 , C01B33/02 , C30B13/20 , C30B15/14 , H01B7/29 , H01B11/18 , H01L21/208 , H05B6/30 , H05B6/42 , H05B5/00
CPC分类号： H01B7/29 , C30B13/20 , C30B15/14 , H01B11/1882 , H05B6/30 , H05B6/42 , Y10T117/1084 , Y10T117/1088
摘要： A device for crucible free zone melting on crystallizable rods, in particular on semiconductor rods, in which the molten zone is produced in the rod which is to be treated, by the electromagnetic field of an induction heating coil which surrounds the rod in annular fashion and at a distance, in which the induction heating coil is supplemented by a parallel-connected capacitor to form an electric heating oscillatory circuit, and in which the oscillatory heating circuit is fed via a high frequency line and at least one adjustable coupling element by a high frequency generator which supplies an a.c. voltage of adjustable frequency. Circuit components are provided between the output of the high frequency generator and the electric heating oscillatory circuit which contains the induction heating coil; at least the high frequency line of such components is equipped with a channel which conducts a flowing coolant.
摘要翻译：一种用于在可结晶棒上，特别是在半导体棒上的无坩埚区熔化的装置，其中在待处理的棒中通过感应加热线圈的电磁场以环形方式围绕该杆而产生熔融区，在距离处，其中感应加热线圈由并联电容器补充以形成电加热振荡电路，并且其中振荡加热电路经由高频线路和至少一个可调节的耦合元件馈送高电平频率发生器电压可调频率。电路部件设置在高频发生器的输出端和包含感应加热线圈的电加热振荡电路之间; 这些部件的至少高频线路配备有传导流动的冷却剂的通道。

24. 发明授权

US3939035A Method of producing monocrystalline semiconductor material, particularly silicon, with adjustable dislocation density 失效
标题翻译：制造具有可调位错密度的单晶半导体材料，特别是硅的方法
公开(公告)号：US3939035A
公开(公告)日：1976-02-17
申请号：US462936
申请日：1974-04-22
申请人： Wolfgang Keller
发明人： Wolfgang Keller
IPC分类号： C30B13/20 , C30B13/28 , B01J17/18
CPC分类号： C30B13/20 , C30B13/28
摘要： A method for obtaining a homogeneous dislocation density in a semiconductor rod, by first subjecting the semiconductor rod in a known manner, to a crucible-free zone melting process whereby it becomes monocrystalline and free of dislocations, and thereafter an annealing zone is moved through the rod, under specified conditions.
摘要翻译：通过首先使半导体棒以已知的方式进行无坩埚区熔融处理，从而获得半导体棒中的均匀位错密度的方法，由此其变为单晶并且没有位错，然后退火区移动通过杆，在规定的条件下。

25. 发明授权

US08696861B2 Grindable silicone elastomer composition and the use thereof 有权
标题翻译：可研磨硅橡胶组合物及其用途
公开(公告)号：US08696861B2
公开(公告)日：2014-04-15
申请号：US13822532
申请日：2011-09-27
申请人： Wolfgang Keller , Werner Brennenstuhl , Andreas Köllnberger
发明人： Wolfgang Keller , Werner Brennenstuhl , Andreas Köllnberger
IPC分类号： C09J183/06
CPC分类号： C09J183/06 , C08G77/12 , C08G77/16 , C08G77/18 , C08G77/20 , C08K5/56 , C08L83/00 , C08L83/04
摘要： Temporary adhesive compositions used to adhesively bond a substrate to be abraded or polished onto a substrate are themselves abradable or polishable, and contain a non-reinforcing filler or particulate silicone resin in a curable organopolysiloxane composition, and have defined physical characteristics in addition to being thermally stable.
摘要翻译：用于将要研磨或抛光的基材粘合粘合到基材上的临时粘合剂组合物本身是可磨损的或可抛光的，并且在可固化的有机基聚硅氧烷组合物中含有非增强填料或颗粒状硅氧烷树脂，并且除了具有热定义的物理特性稳定。

26. 发明申请

US20130186564A1 GRINDABLE SILICONE ELASTOMER COMPOSITION AND THE USE THEREOF 有权
标题翻译：可磨光硅胶弹性体组合物及其用途
公开(公告)号：US20130186564A1
公开(公告)日：2013-07-25
申请号：US13822532
申请日：2011-09-27
申请人： Wolfgang Keller , Werner Brennenstuhl , Andreas Köellnberger
发明人： Wolfgang Keller , Werner Brennenstuhl , Andreas Köellnberger
IPC分类号： C09J183/06
CPC分类号： C09J183/06 , C08G77/12 , C08G77/16 , C08G77/18 , C08G77/20 , C08K5/56 , C08L83/00 , C08L83/04
摘要： Temporary adhesive compositions used to adhesively bond a substrate to be abraded or polished onto a substrate are themselves abradable or polishable, and contain a non-reinforcing filler or particulate silicone resin in a curable organopolysiloxane composition, and have defined physical characteristics in addition to being thermally stable.
摘要翻译：用于将要研磨或抛光的基材粘合粘合到基材上的临时粘合剂组合物本身是可磨损的或可抛光的，并且在可固化的有机基聚硅氧烷组合物中含有非增强填料或颗粒状硅氧烷树脂，并且除了具有热定义的物理特性稳定。

27. 发明授权

US07760327B2 Reflecting optical element with eccentric optical passageway 有权
标题翻译：用偏心光学通道反射光学元件
公开(公告)号：US07760327B2
公开(公告)日：2010-07-20
申请号：US11395719
申请日：2006-03-31
申请人： Hans-Jürgen Scherle , Yim-Bun Patrick Kwan , Stefan Xalter , Johannes Lippert , Ulrich Weber , Bernhard Geuppert , Bernhard Gellrich , Jens Kugler , Franz Sorg , Willi Heintel , Harald Kirchner , Wolfgang Keller , Andreas Frommeyer , Fraser G. Morrison
发明人： Hans-Jürgen Scherle , Yim-Bun Patrick Kwan , Stefan Xalter , Johannes Lippert , Ulrich Weber , Bernhard Geuppert , Bernhard Gellrich , Jens Kugler , Franz Sorg , Willi Heintel , Harald Kirchner , Wolfgang Keller , Andreas Frommeyer , Fraser G. Morrison
IPC分类号： G03B27/42 , G03B27/54 , G03B27/32 , G02B5/10
CPC分类号： G03F7/70225 , G02B17/0812
摘要： There is provided an optical element comprising an optical element body, a reflecting area and an optical passageway. The optical element body defines an axis of rotational symmetry. The reflecting area is disposed on the optical element body and adapted to be optically used in an exposure process. The optical passageway is arranged within the optical element body and allows light to pass the optical element body, the optical passageway being arranged eccentrically with respect to the axis of rotational symmetry.
摘要翻译：提供了一种包括光学元件主体，反射区域和光学通道的光学元件。光学元件主体限定旋转对称轴。反射区域设置在光学元件主体上并且适于在曝光过程中被光学地使用。光学通道布置在光学元件主体内并允许光通过光学元件主体，光学通道相对于旋转对称轴线偏心地布置。

28. 发明申请

US20100118643A1 AGITATOR FOR ABRASIVE MEDIA 有权
标题翻译：磨料介质搅拌机
公开(公告)号：US20100118643A1
公开(公告)日：2010-05-13
申请号：US12598698
申请日：2008-04-30
申请人： Wolfgang Keller
发明人： Wolfgang Keller
IPC分类号： B01F13/00
CPC分类号： B01F3/1221 , B01F7/00041 , B01F7/00116 , B01F7/00133 , B01F7/00275 , B01F7/00316 , B01F7/00466
摘要： Disclosed is a agitator (1; 1a-1h), particularly for abrasive media, comprising a support disk (2; 2a-2h) to which agitator blades (3; 3a-3h) are connected substantially perpendicular to the support disk (2; 2a-2h), said blades (3; 3a-3h) being arranged substantially in a radial direction. The support disk (2; 2a-2h) is also provided with a hub that receives an agitator shaft which is preferably motor-driven in a suitable manner. The trailing faces of the blades (3; 3a-3h) of the agitator (1; 1a-1h) and/or the area of the blade connections to the support disk (2; 2a-2h) is/are designed to largely prevent vortex shedding. For this purpose, preferred geometrical measures for the agitator blades (3; 3a-3h), the support disk (2; 2a-2h), and the connection of the blades (3; 3a-3h) to the support disk (2; 2a-2h) are disclosed and described.
摘要翻译：公开了一种搅拌器（1; 1a-1h），特别是用于研磨介质的搅拌器（1; 1a-1h），其包括支撑盘（2; 2a-2h），搅拌器叶片（3; 3a-3h）基本上垂直于支撑盘 2a-2h），所述叶片（3; 3a-3h）基本上沿径向布置。支撑盘（2; 2a-2h）还设置有接收搅拌器轴的轮毂，搅拌轴优选以合适的方式由马达驱动。搅拌器（1; 1a-1h）的叶片（3; 3a-3h）的后表面和/或连接到支撑盘（2; 2a-2h）的叶片的区域被设计成大大地防止涡流脱落。为此目的，用于搅拌器叶片（3; 3a-3h），支撑盘（2; 2a-2h）和叶片（3; 3a-3h）与支撑盘（2; 2a-2h）。

29. 发明申请

US20060262704A1 Reflecting optical element with eccentric optical passageway 有权
标题翻译：用偏心光学通道反射光学元件
公开(公告)号：US20060262704A1
公开(公告)日：2006-11-23
申请号：US11395719
申请日：2006-03-31
申请人： Hans-Jurgen Scherle , Yim-Bun Kwan , Stefan Xalter , Johannes Lippert , Ulrich Weber , Bernhard Geuppert , Bernhard Gellrich , Jens Kugler , Franz Sorg , Willi Heintel , Harald Kirchner , Wolfgang Keller , Andreas Frommeyer , Fraser Morrison
发明人： Hans-Jurgen Scherle , Yim-Bun Kwan , Stefan Xalter , Johannes Lippert , Ulrich Weber , Bernhard Geuppert , Bernhard Gellrich , Jens Kugler , Franz Sorg , Willi Heintel , Harald Kirchner , Wolfgang Keller , Andreas Frommeyer , Fraser Morrison
IPC分类号： G11B7/135
CPC分类号： G03F7/70225 , G02B17/0812
摘要： There is provided an optical element comprising an optical element body, a reflecting area and an optical passageway. The optical element body defines an axis of rotational symmetry. The reflecting area is disposed on the optical element body and adapted to be optically used in an exposure process. The optical passageway is arranged within the optical element body and allows light to pass the optical element body, the optical passageway being arranged eccentrically with respect to the axis of rotational symmetry.
摘要翻译：提供了一种包括光学元件主体，反射区域和光学通道的光学元件。光学元件主体限定旋转对称轴。反射区域设置在光学元件主体上并且适于在曝光过程中被光学地使用。光学通道布置在光学元件主体内并允许光通过光学元件主体，光学通道相对于旋转对称轴线偏心地布置。

30. 发明授权

US4900887A Floating zone drawing circuitry for semiconductor rods 失效
标题翻译：半导体棒的浮动区域绘图电路
公开(公告)号：US4900887A
公开(公告)日：1990-02-13
申请号：US322749
申请日：1989-03-13
申请人： Wolfgang Keller
发明人： Wolfgang Keller
IPC分类号： C30B13/20 , H05B6/30
CPC分类号： H05B6/30 , C30B13/20
摘要： For floating zone drawing of semiconductor rods having diameters greater than 100 mm, at the beginning of the zone drawing process, in particular during melting on of the seed crystal to the semiconductor rod to be drawn, a high load change and impedance change occurs. The power from the high-frequency (HF) generator is no longer coupled thereto optimally. Heating up the feed line to the induction heating coil is the result. This heating is avoided by connecting the HF generator via a feed line to a tank circuit device. A variable tank circuit capacitor connected in parallel and to the series oscillator circuit coil feeding one side of a parallel circuit of a heating circuit capacitor and the induction heating coil. The variable oscillator circuit capacitor is adjusted as a function of the voltage drop across the induction heating coil.
摘要翻译：对于具有直径大于100mm的半导体棒的浮动区域拉伸，在区域拉伸处理开始时，特别是在晶种与待拉制的半导体棒的熔融之间，发生高负载变化和阻抗变化。来自高频（HF）发生器的功率不再与其最佳耦合。结果，加热到感应加热线圈的馈线。通过将HF发生器通过馈线连接到储罐回路装置来避免这种加热。并联连接的可变储能电路电容器和馈送加热电路电容器和感应加热线圈的并联电路的一侧的串联振荡器电路线圈。可变振荡器电路电容器被调整为感应加热线圈两端的电压降的函数。

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