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    • 25. 发明申请
    • HIGH THROUGHPUT HYBRID DEPOSITION SYSTEM AND METHOD USING THE SAME
    • 高通量混合沉积系统及其使用方法
    • WO2003003417A2
    • 2003-01-09
    • PCT/US2002/020170
    • 2002-06-25
    • PLASMION CORPORATIONKIM, StevenKIM, Seungdeok
    • KIM, StevenKIM, Seungdeok
    • H01L21/00
    • H01L21/67173C23C14/505C23C14/566C23C14/568H01L21/67207
    • A deposition system includes at least one first load lock chamber, at least one deposition chamber attached to the first load lock chamber, the at least one deposition chamber having a plurality of deposition sources disposed circumferentially about sidewalls of the deposition chamber, at least one second load lock chamber attached to the deposition chamber, a plurality of gas inlet ports and vacuum line ports disposed on each of the first and second load lock chambers and the deposition chamber, and a plurality of rotatable deposition pallets, at least one deposition pallet is disposed within the deposition chamber and at least one deposition pallet is disposed in one of the first and second load lock chambers, wherein the at least one deposition pallet disposed in one of the first and second load lock chambers laterally shifts into the deposition chamber when the at least one deposition pallet disposed in the deposition chamber laterally shifts from the deposition chamber into another one of the first and second load lock chambers.
    • 沉积系统包括至少一个第一负载锁定室,附接到第一负载锁定室的至少一个沉积室,所述至少一个沉积室具有围绕沉积室的侧壁周向设置的多个沉积源,至少一个第二 附着到沉积室的装载锁定室,设置在第一和第二装载锁定室和沉积室中的每一个上的多个气体入口和真空管路端口,以及多个可旋转的沉积托盘,至少一个沉积托盘被布置 并且至少一个沉积托盘设置在所述第一和第二负载锁定室中的一个中,其中当所述第一和第二负载锁定室中的所述第一和第二负载锁定室中的所述第一和第二负载锁定室中的至少一个沉积托盘处于 设置在沉积室中的至少一个沉积托盘横向从沉积室移动到不透水中 r第一和第二加载锁定室之一。