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22. 发明申请

US20060236513A1 SYSTEM AND METHOD FOR DETECTING FLOW IN A MASS FLOW CONTROLLER 失效
标题翻译：用于检测流量控制器中的流量的系统和方法
公开(公告)号：US20060236513A1
公开(公告)日：2006-10-26
申请号：US11456055
申请日：2006-07-06
申请人： Gurtej Sandhu , Sujit Sharan , Neal Rueger , Allen Mardian
发明人： Gurtej Sandhu , Sujit Sharan , Neal Rueger , Allen Mardian
IPC分类号： H01L21/66 , F17D3/00 , F16K37/00 , G01B7/00
CPC分类号： G01F1/40 , G01F1/42 , G01P13/0006 , G01P13/0013 , G01P13/0033 , G05D7/0635 , Y10T29/41 , Y10T137/0396 , Y10T137/7722 , Y10T137/775 , Y10T137/8242
摘要： Systems and methods are provided for detecting flow in a mass flow controller (MFC). The position of a gate in the MFC is sensed or otherwise determined to monitor flow through the MFC and to immediately or nearly immediately detect a flow failure. In one embodiment of the present invention, a novel MFC is provided. The MFC includes an orifice, a mass flow control gate, an actuator and a gate position sensor. The actuator moves the control gate to control flow through the orifice. The gate position sensor determines the gate position and/or gate movement to monitor flow and immediately or nearly immediately detect a flow failure. According to one embodiment of the present invention, the gate position sensor includes a transmitter for transmitting a signal and a receiver for receiving the signal such that the receiver provides an indication of the position of the gate based on the signal received. Other embodiments of the gate position sensor are described herein, as well as systems and methods that incorporate the novel MFC within a semiconductor manufacturing process.
摘要翻译：提供了用于检测质量流量控制器（MFC）中的流量的系统和方法。 MFC中的门的位置被感测或以其他方式确定以监视通过MFC的流动并立即或几乎立即检测到流动故障。在本发明的一个实施例中，提供了一种新颖的MFC。 MFC包括孔口，质量流量控制门，致动器和门位置传感器。致动器移动控制门以控制通过孔口的流动。门位置传感器确定门位置和/或门移动以监视流量并立即或几乎立即检测到流动故障。根据本发明的一个实施例，门位置传感器包括用于发送信号的发射机和用于接收信号的接收机，使得接收机基于所接收的信号提供门的位置的指示。这里描述了门位置传感器的其他实施例，以及在半导体制造过程中并入新颖的MFC的系统和方法。

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