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    • 22. 发明授权
    • Method of forming a fuse
    • 形成保险丝的方法
    • US06864124B2
    • 2005-03-08
    • US10064052
    • 2002-06-05
    • Chiu-Te LeeTe-Yuan Wu
    • Chiu-Te LeeTe-Yuan Wu
    • H01L21/60H01L23/525H01L21/82
    • H01L23/5258H01L2924/0002H01L2924/00
    • A surface of a semiconductor substrate defined with at least one fuse area and at least one bonding pad area. A conductive layer with a thickness of 12 kÅ and a protective layer are sequentially formed on the surface of the semiconductor substrate. Then portions of the protective layer and portions of the conductive layer in the fuse area are etched to make the thickness for the remaining conductive layer in the fuse area be approximately 5 kÅ. Finally a dielectric layer is formed on the surface of the semiconductor substrate, and portions of the first dielectric layer and portions of the protective layer in the bonding pad area are etched until reaching the top surface of the conductive layer.
    • 半导体衬底的表面,其被限定有至少一个熔丝区域和至少一个焊盘区域。 在半导体衬底的表面上依次形成厚度为12kA的导电层和保护层。 然后,将保护层的部分和熔丝区域中的导电层的部分进行蚀刻,以使保险丝区域中的剩余导电层的厚度为约5k。 最后,在半导体衬底的表面上形成电介质层,并且蚀刻第一电介质层的部分和焊盘区域中的保护层的部分,直到到达导电层的顶表面。
    • 23. 发明申请
    • METHOD FOR OPERATING SEMICONDUCTOR DEVICE
    • 操作半导体器件的方法
    • US20120038414A1
    • 2012-02-16
    • US13282482
    • 2011-10-27
    • Sung-Nien TangWei-Lun HsuChing-Ming LeeTe-Yuan Wu
    • Sung-Nien TangWei-Lun HsuChing-Ming LeeTe-Yuan Wu
    • G05F3/02
    • H01L27/085H01L29/7817H03F3/195
    • A method for operating a semiconductor device including a lateral double diffused metal oxide semiconductor (LDMOS) with a first source, a common drain and a first gate, a junction field effect transistor (JFET) with a second source, the common drain and a second gate wherein the second source is electrically connected to the first gate and an inner circuit electrically connected to the first source is provided. The first source provides the inner circuit with an inner current to generate an inner voltage by means of the lateral double diffused metal oxide semiconductor, and the lateral double diffused metal oxide semiconductor turns off when the inner voltage is elevated substantially as high as the first gate voltage.
    • 一种用于操作包括具有第一源极,公共漏极和第一栅极的横向双扩散金属氧化物半导体(LDMOS)的半导体器件的方法,具有第二源极的结型场效应晶体管(JFET),所述公共漏极和第二源极 栅极,其中第二源极电连接到第一栅极,并且提供与第一源电连接的内部电路。 第一源为内部电路提供内部电流,以通过横向双扩散金属氧化物半导体产生内部电压,并且当内部电压升高到与第一栅极高相同时,横向双扩散金属氧化物半导体截止 电压。
    • 25. 发明授权
    • Method for operating semiconductor device
    • 半导体器件的操作方法
    • US08179188B2
    • 2012-05-15
    • US13282482
    • 2011-10-27
    • Sung-Nien TangWei-Lun HsuChing-Ming LeeTe-Yuan Wu
    • Sung-Nien TangWei-Lun HsuChing-Ming LeeTe-Yuan Wu
    • H03K17/687
    • H01L27/085H01L29/7817H03F3/195
    • A method for operating a semiconductor device including a lateral double diffused metal oxide semiconductor (LDMOS) with a first source, a common drain and a first gate, a junction field effect transistor (JFET) with a second source, the common drain and a second gate wherein the second source is electrically connected to the first gate and an inner circuit electrically connected to the first source is provided. The first source provides the inner circuit with an inner current to generate an inner voltage by means of the lateral double diffused metal oxide semiconductor, and the lateral double diffused metal oxide semiconductor turns off when the inner voltage is elevated substantially as high as the first gate voltage.
    • 一种用于操作包括具有第一源极,公共漏极和第一栅极的横向双扩散金属氧化物半导体(LDMOS)的半导体器件的方法,具有第二源极的结型场效应晶体管(JFET),所述公共漏极和第二源极 栅极,其中第二源极电连接到第一栅极,并且提供与第一源电连接的内部电路。 第一源为内部电路提供内部电流,以通过横向双扩散金属氧化物半导体产生内部电压,并且当内部电压升高到与第一栅极高相同时,横向双扩散金属氧化物半导体截止 电压。
    • 28. 发明授权
    • Method of fabricating a DRAM storage node on a semiconductor wafer
    • 在半导体晶片上制造DRAM存储节点的方法
    • US06251725B1
    • 2001-06-26
    • US09479934
    • 2000-01-10
    • Jung-Chao ChiouTe-Yuan WuChuan-Fu Wang
    • Jung-Chao ChiouTe-Yuan WuChuan-Fu Wang
    • H01L218242
    • H01L21/76831H01L21/76816H01L27/10855H01L28/60H01L28/84
    • A semiconductor wafer comprises a substrate, a first conductive layer and a dielectric layer covering the first conductive layer. A thin-film layer is formed over the dielectric layer. The thin-film layer comprises a hole that penetrates down to the surface of the dielectric layer and the hole is located above the first conductive layer. A first barrier layer is formed on the surface of the semiconductor wafer to cover the thin-film layer. Next, a spacer is formed on the internal walls of the hole. Thereafter, a first dry etching process is performed to form a contact hole. A second barrier layer is then formed on the internal walls of the contact hole. A second conductive layer is formed on the surface of the semiconductor wafer that fills the contact hole. A lithographic process is performed to define a pattern and a location of the storage node in a photo resist layer above the contact hole. A second dry etching process is used to etch the second conductive layer using the photo resist layer as a mask so as to form the storage node. Finally, the photo resist layer is removed.
    • 半导体晶片包括衬底,第一导电层和覆盖第一导电层的电介质层。 在电介质层上形成薄膜层。 薄膜层包括穿透到介电层的表面的孔,并且孔位于第一导电层的上方。 在半导体晶片的表面上形成第一阻挡层以覆盖薄膜层。 接下来,在孔的内壁上形成间隔物。 此后,进行第一干蚀刻工艺以形成接触孔。 然后在接触孔的内壁上形成第二阻挡层。 在填充接触孔的半导体晶片的表面上形成第二导电层。 执行光刻处理以限定存储节点在接触孔上方的光致抗蚀剂层中的图案和位置。 使用第二干法蚀刻工艺来蚀刻使用光致抗蚀剂层作为掩模的第二导电层,以形成存储节点。 最后,除去光刻胶层。