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    • 24. 发明专利
    • MULTILAYER INTERCONNECTION BOARD
    • JPS6293961A
    • 1987-04-30
    • JP23328585
    • 1985-10-21
    • HITACHI LTD
    • USHIFUSA NOBUYUKINAGAYAMA KOUSEIOGIWARA SATORU
    • H01L23/12H01L21/48H05K3/46
    • PURPOSE:To obtain a multilayer wiring board with high quality and high reliability which facilitates high density wiring by a method wherein insulating layers made of predetermined material and conductor layers made of predetermined conductor material are alternately laminated to form the ceramic multilayer interconnection board and an organic insulating layer and copper conductor layers with predetermined aspect ratio are laminated on the top surface of the multilayer interconnection board. CONSTITUTION:Through holes are drilled in a ceramic green sheet whose main component is mullite. The through holes are filled with conductor paste whose main component is W or Mo and predetermined circuit patterns are printed with conductor paste. 26 such sheets are piled by using guide holes and laminated by applying heat and pressure and subjected to a high temperature treatment to form a multilayer interconnection board 10. After nonelectrolytic nickel plating layer 6 and gold plating layer 7 are formed on the wiring board 10, an insulating layer 4 and copper conductor layers 2 and 9 with aspect ratio of not less than 1.0 and with the width of not more than 30mum and with the conductor resistance of not more than 0.5OMEGA/cm are formed on the surface of the wiring board 10.
    • 30. 发明专利
    • HIGHLY ADVANCED WATER-TREATMENT METHOD
    • JPH10192874A
    • 1998-07-28
    • JP434097
    • 1997-01-14
    • HITACHI LTD
    • MORI TOSHIKATSUHAGA TETSUROKUBOTA MASAYOSHINAGAYAMA KOUSEIWATANABE SHOJIBABA KENJI
    • C02F1/78B01J23/42B01J23/50
    • PROBLEM TO BE SOLVED: To efficiently extract the effectiveness of a catalyst at the time of ozone oxidation by oxidizing an object substance to be treated by ozone in the absence of the catalyst, allowing the resultant object substance to adsorb on the catalyst, and after that, oxidizing again by ozone in highly advanced water treatment comprising ozone oxidation process of the object substance to be treated in raw water. SOLUTION: A reactor 5 is constituted of an ozone oxidation tank 1, an adsorption tank 2, a catalytic oxidation tank 3, and a catalyst recovering apparatus 4 and raw water 6 overflowed the ozone oxidation tank 1 flows in the adsorption tank 2 and the catalyst 8 adsorbing the object substance to be treated is transported to the catalytic oxidation tank 3. Together with the catalyst 8, the treated water 10 which is ozone-oxidized in the catalytic oxidation tank 3 is sent to the catalyst recovering apparatus 4 and the catalyst 8 is there recovered and turned back to the adsorption tank 2 and the treated water 10 is sent to the next line. Raw water 6 is supplied from the bottom part of the ozone oxidation tank 1 and air 7 containing ozone is blow from the bottom part of the tank and at the same time, air 9 containing ozone is blown from the bottom part of the catalytic oxidation tank 3, so that oxidation decomposition of the object substance to be treated is carried out at high removal efficiency.