会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 23. 发明申请
    • SEMICONDUCTOR GAS SENSOR, GAS SENSOR SYSTEM AND METHOD OF GAS ANALYSIS
    • 半导体气体传感器,气体分析气体传感器的系统和方法
    • WO0073776A3
    • 2001-07-26
    • PCT/DE0001510
    • 2000-05-12
    • EADS DEUTSCHLAND GMBHBECKER THOMASMUEHLBERGER STEPHANMUELLER GERHARD
    • BECKER THOMASMUEHLBERGER STEPHANMUELLER GERHARD
    • G01N27/12G01N27/26G01N33/00
    • G01N27/12G01N33/0011
    • The invention relates to a semiconductor gas sensor (10) comprising a gas-sensitive layer (5), a heater (3) for heating the layer to a defined measurement temperature and contact electrodes (6a, 6b) for measuring the electric resistance of the gas-sensitive layer (5), and a micro-chamber (7) in which the gas-sensitive layer (5) is positioned. The micro-chamber (7) can be closed off towards the exterior and is configured such that its volume is so small that at least one component of the gas or gas mixture to be analyzed is at least to a large extent depleted within a defined measurement period by reaction on the gas-sensitive layer. Owing to the limited gas supply and the reaction of one component of the gas during the measurement gases or gas mixtures containing several components can be analyzed, the measurement signal being obtained after at least one component has reacted. Several sensor elements with gas-sensitive layers can be arranged in the chamber, which can be operated at different temperatures. A gas-sensor system consists, for example, of at least two semiconductor gas sensors with micro-chambers (7) which are arranged in a system comprising gas lines and valves and can be individually filled.
    • 一种半导体气体传感器(10)用气体 - 敏感层(5),一加热器(3),用于将层加热到规定的测定温度和接触电极(6A,6B),用于测量气体敏感层的电阻(5)是一个微腔( 7),其中,所述气体敏感层(5)布置。 所述腔室(7)朝向可锁定到外部,并且设计为使得所述腔室体积是如此之小,通过使所述气体敏感层至少基本上耗尽的预定测量时间内的分析物的气体或气体混合物的至少一种组分。 由于气体的有限供应和气体的组分的气体或气体混合物的测量期间该反应可以用多个部件进行分析。 在这种情况下,办法是在测量信号的至少一个组分的反应之后进行。 在腔室可以布置多个与气体敏感层的传感器元件,其可在不同的温度下操作。 一种气体传感器系统包括例如 在与设置在气体管线和阀门各个灌装系统微腔室(7)的至少两个半导体气体传感器。