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    • 21. 发明授权
    • Dry-etching method
    • 干蚀刻法
    • US07476624B2
    • 2009-01-13
    • US10480821
    • 2002-06-07
    • Etsuo IijimaNorikazu Yamada
    • Etsuo IijimaNorikazu Yamada
    • H01L21/302
    • H01J37/32935H01L21/32137
    • A main etching step is effected in a state shown in FIG. 1A under a first pressure using a gas containing at least HBr, e.g., a mixture gas of HBr and Cl2 as an etching gas. The main etching is ended before a silicon oxide film 102, as shown in FIG. 1B, is exposed. An over-etching process is effected under a second pressure higher than the first pressure using a gas containing at least HBr, e.g., an HBr single gas so as to completely expose the silicon oxide film 102 as shown in FIG. 1C. In such a way, the selectivity of a silicon-containing conductive layer with respect to the silicon oxide film is improved compared to conventional methods. Without etching the silicon oxide film layer, which is an underlying layer, and without marring the shape of the silicon-containing conductive film layer formed by etching, only the desired silicon-containing conductive film layer is removed by etching reliably.
    • 在图1所示的状态下进行主蚀刻步骤。 在第一压力下使用至少包含HBr的气体,例如HBr和Cl2的混合气体作为蚀刻气体。 主蚀刻在氧化硅膜102之前结束,如图3所示。 1B,暴露。 在比第一压力高的第二压力下使用至少包含HBr的气体,例如HBr单一气体进行过蚀刻工艺,以便如图1所示完全暴露氧化硅膜102。 1C。 以这种方式,与常规方法相比,含硅导电层相对于氧化硅膜的选择性得到改善。 在不蚀刻作为下层的氧化硅膜层的情况下,不侵蚀通过蚀刻形成的含硅导电膜层的形状,仅通过可靠地蚀刻除去所需的含硅导电膜层。
    • 23. 发明申请
    • Fault diagnosis apparatus
    • 故障诊断装置
    • US20060207355A1
    • 2006-09-21
    • US11407294
    • 2006-04-20
    • Kaoru YasukawaKoji AdachiEigo NakagawaTetsuichi SatonagaNorikazu YamadaKoki Uwatoko
    • Kaoru YasukawaKoji AdachiEigo NakagawaTetsuichi SatonagaNorikazu YamadaKoki Uwatoko
    • G01R31/28G01N19/00
    • B41J29/38
    • A fault diagnosis section activates a driving compornent alone, measures an operation state signal and a paper passage time, and stores feature values (Vm, σv, Tqs, σts) extracted as a determination reference in a storage medium. A paper passage fault determination section determines whether or not a fault has arisen on the basis of the paper passage time when an apparatus is under normal operating conditions. A diagnosis target block determination section determines an order to operate a detail fault diagnosis when it is determined that there is a plurality of diagnosis target blocks. When the driving compornent is activated alone under actual operation conditions, the operation state signal Vf is obtained, and an operation state fault determination section conducts diagnosis on whether or not a fault has arisen on the driving compornent and a state of the fault, and whether or not a fault has arisen on other power transmission compornents and a nature of the fault with reference to the feature values as the determination reference on the basis of a degree of deviation from a normal range.
    • 故障诊断部分单独激活驱动组合,测量操作状态信号和纸张通过时间,并将作为确定参考提取的特征值(Vm,sigmav,Tqs,sigmats)存储在存储介质中。 纸通过故障判定部根据设备处于正常工作条件下的纸张通过时间来判定故障是否发生。 当确定存在多个诊断目标块时,诊断目标块确定部分确定操作细节故障诊断的顺序。 当在实际操作条件下单独激活驾驶组合时,获得操作状态信号Vf,并且操作状态故障确定部进行关于驱动组合中是否出现故障和故障状态的诊断,以及是否 或者根据与正常范围的偏离程度,参照作为确定基准的特征值,在其他动力传递装置上产生故障或故障的性质。
    • 26. 发明申请
    • Fault diagnosis apparatus
    • 故障诊断装置
    • US20050050423A1
    • 2005-03-03
    • US10889055
    • 2004-07-13
    • Kaoru YasukawaKoji AdachiEigo NakagawaTetsuichi SatonagaNorikazu YamadaKoki Uwatoko
    • Kaoru YasukawaKoji AdachiEigo NakagawaTetsuichi SatonagaNorikazu YamadaKoki Uwatoko
    • B41J29/46B41J29/38B65H7/06G01R31/28G03G21/00G06F11/00H04N1/00
    • B41J29/38
    • A fault diagnosis section activates a driving compornent alone, measures an operation state signal and a paper passage time, and stores feature values (Vm, σv, Tqs, σts) extracted as a determination reference in a storage medium. A paper passage fault determination section determines whether or not a fault has arisen on the basis of the paper passage time when an apparatus is under normal operating conditions. A diagnosis target block determination section determines an order to operate a detail fault diagnosis when it is determined that there is a plurality of diagnosis target blocks. When the driving compornent is activated alone under actual operation conditions, the operation state signal Vf is obtained, and an operation state fault determination section conducts diagnosis on whether or not a fault has arisen on the driving compornent and a state of the fault, and whether or not a fault has arisen on other power transmission compornents and a nature of the fault with reference to the feature values as the determination reference on the basis of a degree of deviation from a normal range.
    • 故障诊断部分单独激活驱动组合,测量操作状态信号和纸张通过时间,并将作为确定参考提取的特征值(Vm,sigmav,Tqs,sigmats)存储在存储介质中。 纸通过故障判定部根据设备处于正常工作条件下的纸张通过时间来判定故障是否发生。 当确定存在多个诊断目标块时,诊断目标块确定部分确定操作细节故障诊断的顺序。 当在实际操作条件下单独激活驾驶组合时,获得操作状态信号Vf,并且操作状态故障确定部进行关于驱动组合中是否出现故障和故障状态的诊断,以及是否 或者根据与正常范围的偏离程度,参照作为确定基准的特征值,在其他动力传递装置上产生故障或故障的性质。