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    • 22. 发明授权
    • Process for forming detailed images
    • 形成详细图像的过程
    • US4617254A
    • 1986-10-14
    • US723009
    • 1985-04-16
    • Akihiro KinoshitaYohichi NamariyamaHiromi Higashi
    • Akihiro KinoshitaYohichi NamariyamaHiromi Higashi
    • G03F7/20G03F7/039G03F7/32G03C5/00
    • G03F7/039
    • A process for forming a detailed image having a high sensitivity to far-UV light and capable of giving a positive type image with a high precision is provided, which process comprises applying onto a base a resist solution comprising an organic solution, of a homopolymer of methyl vinyl ketone or a copolymer thereof with a comonomer of the formula R.sup.1 R.sup.2 C.dbd.CH.sub.2 wherein R.sup.1 is H or --CH.sub.3 and R.sup.2 is acetoxy, nitrile, unsubstituted or substituted aryl or ##STR1## wherein R.sup.3 is alkyl, to form a coating on the base; irradiating far-UV light; developing the coating with a developer composed mainly of a cellosolve compound; and rinsing or/and washing the resulting material.
    • 提供一种用于形成对远紫外光具有高灵敏度并且能够以高精度给出正型图像的详细图像的方法,该方法包括将包含有机溶液的抗蚀剂溶液施加到基底上,所述抗蚀剂溶液包含有机溶液, 甲基乙烯基酮或其与式R 1 R 2 C = CH 2的共聚单体的共聚物,其中R 1是H或-CH 3,R 2是乙酰氧基,腈,未取代或取代的芳基或其中R 3是烷基,以在基础上形成涂层 ; 照射远紫外光; 用主要由溶纤剂组成的显影剂显影涂层; 并漂洗或/和洗涤所得材料。