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    • 27. 发明专利
    • OPTICAL RECORDING MEDIUM
    • JPH10241217A
    • 1998-09-11
    • JP5686097
    • 1997-02-25
    • VICTOR COMPANY OF JAPANDAINICHISEIKA COLOR CHEM
    • TSUJITA KOJIUENO ICHIROTANAKA NORIO
    • G11B7/244G11B7/24G11B7/26
    • PROBLEM TO BE SOLVED: To avoid preparation of various kinds of vapor sources when plural kinds of org. compds. are to be vapor deposited, and to improve the film forming rate and the working efficiency by spraying a thin film forming material in a liquid state containing an org. compd. through a spray nozzle in a vacuum chamber on a substrate to form a thin film layer. SOLUTION: A substrate holding bed 3 having a rotating mechanism is arranged in a vacuum chamber 8 and a substrate 2 is mounted on the substrate holding bed 3 so that the substrate 2 can be rotated. A spray nozzle 1 is disposed on the wall of the vacuum chamber 8 facing the substrate 2, and a thin film forming material in a liquid state is supplied by a pressurizing liquid supply pump 6 to the spray nozzle 1. The temp. of the spray nozzle 1 is controlled by a spray nozzle heater. A solvent trap 4 is disposed in the back of the substrate holding bed 3 so as to trap the vaporized solvent, and a turbopump 5 and a vacuum pump 7 are arranged as an evacuating system under the vacuum chamber 8. By revolving the substrate 2 while it rotates, the film thickness of the org. compd. thin film deposited on the substrate 2 is made uniform.