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    • 26. 发明公开
    • 마이크로캔틸레버 및 그 제조 방법과 실리콘 박막 및 그 제조방법
    • 微型遮光器及其制造方法和硅薄膜及其制造方法
    • KR1020100026021A
    • 2010-03-10
    • KR1020080084827
    • 2008-08-29
    • 서울대학교산학협력단
    • 김용협강태준
    • H01L21/205
    • H01L21/28518H01L21/02068H01L21/28556H01L21/324
    • PURPOSE: A micro cantilever, a silicon thin film, and a manufacturing method thereof are provided to control the low thermal budget of a stress gradient by using a built-up stress generated from a Cu-silicide process. CONSTITUTION: A substrate(10) is prepared. A sacrificial layer is evaporated on the top of the substrate. The sacrificial layer is etched in order to eliminate a part of the sacrificial layer. A cantilever structure layer(20) is evaporated on the exposed substrate part and the sacrificial layer by removing a part of the sacrificial layer. A Cu- thin film(30) is evaporated on the cantilever structure layer. A Cu-silicide(40) is formed on the cantilever structure layer by a furnace annealing in the Cu-thin film. The furnace anneal temperature is 200 °C or less.
    • 目的:提供微悬臂,硅薄膜及其制造方法,以通过使用由Cu-硅化物工艺产生的累积应力来控制应力梯度的低热预算。 构成:制备基材(10)。 牺牲层在衬底的顶部蒸发。 蚀刻牺牲层以消除牺牲层的一部分。 通过去除牺牲层的一部分,在暴露的基底部分和牺牲层上蒸发悬臂结构层(20)。 在悬臂结构层上蒸发Cu薄膜(30)。 通过在Cu薄膜中的炉退火,在悬臂结构层上形成硅化硅(40)。 炉退火温度为200℃以下。
    • 27. 发明公开
    • 나노 와이어 강화 복합체 및 이의 제조 방법
    • 增强的纳米复合物及其制造方法
    • KR1020100025819A
    • 2010-03-10
    • KR1020080084526
    • 2008-08-28
    • 서울대학교산학협력단
    • 김용협강태준
    • B82B3/00B82Y30/00
    • H01L21/02603B82Y40/00C01B32/158C01P2004/16H01L21/0274H01L29/0665
    • PURPOSE: A nano wire reinforcing complex and a method of manufacturing thereof are provided to facilitate an adjustment of properties including a mechanical property, electrical characteristic. CONSTITUTION: A nano wire reinforcing complex comprises the following: a substrate with a pattern region on the surface; and nano wire reinforcing unit membranes(110,120,130) including nano wire patterns(112,122,132) formed with nano wires arranged on the pattern region of the substrate. The nano wire is a carbon nano tube. One of the unit membranes of the nano wire reinforcing unit membranes includes a different kind nano wire from the other nano wires included in the nano wire reinforcing unit membranes. The pattern region has an affinity with the nano wire.
    • 目的:提供纳米线增强复合体及其制造方法,以便于包括机械特性,电特性的性质的调整。 构成:纳米线增强复合体包括:表面上具有图案区域的基底; 以及纳米线增强单元膜(110,120,130),其包括由布置在所述基板的图案区域上的纳米线形成的纳米线图案(112,122,132)。 纳米线是碳纳米管。 纳米线增强单元膜的单元膜之一包括与纳米线增强单元膜中包括的其它纳米线不同种类的纳米线。 图案区域与纳米线具有亲和力。