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    • 26. 发明授权
    • Wide area VUV lamp with grids and purging jets
    • 广域VUV灯,带网格和吹扫喷嘴
    • US4910436A
    • 1990-03-20
    • US155235
    • 1988-02-12
    • George J. CollinsZeng-qi YuTien-yu Sheng
    • George J. CollinsZeng-qi YuTien-yu Sheng
    • C23C16/48C23C16/50H01J37/32
    • H01J37/32018C23C16/482C23C16/50
    • A disc-shaped plasma, generated by a ring-shaped cold cathode is used both as an in-situ large area (10-20 cm in diameter) VUV lamp and as a source of ground state and excited atoms. The atoms created in the disc-shaped plasma may be used for initiating sensitized atom-molecule reactions in the volume that dissociate the molecules as well as for providing external energy to heterogenous surface reactions. Multiple grid electrodes are used to extract ions or electrons from the plasma during the deposition process. The disc-shaped plasma is of narrow width which is optically thin for resonance photons emitted in a direction perpendicular to the disc to minimize undesired resonance trapping and associated line reversal. This VUV lamp operates without the need for optical windows; hence, ground state and excited atoms, created in the disc-shaped plasma, can diffuse from the disc-shaped plasma toward the substrate.
    • 由环形冷阴极产生的盘形等离子体既用作原位大面积(直径为10-20cm)的VUV灯,也用作基态和激发原子的源。 在圆盘形等离子体中产生的原子可以用于在解离分子的体积中引发致敏原子 - 分子反应以及为异源表面反应提供外部能量。 在沉积过程中,使用多个栅格电极从等离子体中提取离子或电子。 盘形等离子体的宽度窄,对于在与盘垂直的方向上发射的共振光子而言是光学薄的,以最小化不期望的共振捕获和相关的线反转。 该VUV灯不需要光学窗口即可运行; 因此,在盘形等离子体中产生的基态和激发原子可以从盘形等离子体向衬底扩散。