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21. 发明授权

US09170270B2 Inertial sensor and method for measuring acceleration using the same 有权
标题翻译：惯性传感器及使用其测量加速度的方法
公开(公告)号：US09170270B2
公开(公告)日：2015-10-27
申请号：US13440809
申请日：2012-04-05
申请人： Seung Heon Han , Jung Eun Noh , Jong Woon Kim , Sang Jin Kim , Yun Sung Kang , Won Kyu Jeung
发明人： Seung Heon Han , Jung Eun Noh , Jong Woon Kim , Sang Jin Kim , Yun Sung Kang , Won Kyu Jeung
IPC分类号： G01P15/09 , G01P15/14 , G01P15/18 , G01P15/08
CPC分类号： G01P15/0922 , G01P15/14 , G01P15/18 , G01P2015/084
摘要： Disclosed herein is an inertial sensor, including: a membrane; a mass body disposed under the membrane; a sensing unit formed on the membrane and including a piezoelectric body; and a spring constant control unit formed to be spaced apart from the sensing unit and including a piezoelectric body. According to the preferred embodiment of the present invention, the DC acceleration (in particular, gravity acceleration) can be measured by using the change in the spring constant without changing the structure of the inertial sensor including the piezoelectric material of the prior art.
摘要翻译：本文公开了一种惯性传感器，包括：膜; 设置在膜下方的质量体; 感测单元，形成在膜上并包括压电体; 以及弹簧恒定控制单元，其形成为与感测单元间隔开并且包括压电体。根据本发明的优选实施例，可以通过使用弹簧常数的变化来测量直流加速度（特别是重力加速度），而不改变包括现有技术的压电材料的惯性传感器的结构。

22. 发明授权

US08763460B2 Angular velocity sensor 有权
标题翻译：角速度传感器
公开(公告)号：US08763460B2
公开(公告)日：2014-07-01
申请号：US13303932
申请日：2011-11-23
申请人： Jong Woon Kim , Mao Minyao , Lin Liwei , Won Kyu Jeung
发明人： Jong Woon Kim , Mao Minyao , Lin Liwei , Won Kyu Jeung
IPC分类号： G01C19/56
CPC分类号： G01C19/5755
摘要： There is provided an angular velocity sensor, including: a flexible part connecting a fixing part to an oscillation unit; a driving unit formed on the flexible part or the oscillation unit to oscillate the oscillation unit; a sensing unit formed on the flexible part or the oscillation unit to sense a displacement of the oscillation unit according to an angular velocity input; a control piezoelectric element formed on the flexible part to control rigidity of a motion of the oscillation unit; and an impedance element electrically connected to the control piezoelectric element to apply impedance to the control piezoelectric element.
摘要翻译：提供了一种角速度传感器，包括：将固定部分连接到振荡单元的柔性部分; 驱动单元，形成在所述柔性部分或所述振荡单元上，以振荡所述振荡单元; 感测单元，形成在柔性部分或振荡单元上，以根据角速度输入感测振荡单元的位移; 控制压电元件，其形成在所述柔性部上，以控制所述振荡单元的运动的刚性; 以及与控制压电元件电连接以将阻抗施加到控制压电元件的阻抗元件。

23. 发明申请

US20120291547A1 ANGULAR VELOCITY SENSOR 有权
标题翻译：角速度传感器
公开(公告)号：US20120291547A1
公开(公告)日：2012-11-22
申请号：US13303932
申请日：2011-11-23
申请人： Jong Woon KIM , Mao Minyao , Lin LIWEI , Won Kyu JEUNG
发明人： Jong Woon KIM , Mao Minyao , Lin LIWEI , Won Kyu JEUNG
IPC分类号： G01P3/44
CPC分类号： G01C19/5755
摘要： There is provided an angular velocity sensor, including: a flexible part connecting a fixing part to an oscillation unit; a driving unit formed on the flexible part or the oscillation unit to oscillate the oscillation unit; a sensing unit formed on the flexible part or the oscillation unit to sense a displacement of the oscillation unit according to an angular velocity input; a control piezoelectric element formed on the flexible part to control rigidity of a motion of the oscillation unit; and an impedance element electrically connected to the control piezoelectric element to apply impedance to the control piezoelectric element.
摘要翻译：提供了一种角速度传感器，包括：将固定部分连接到振荡单元的柔性部分; 驱动单元，形成在所述柔性部分或所述振荡单元上，以振荡所述振荡单元; 感测单元，形成在柔性部分或振荡单元上，以根据角速度输入感测振荡单元的位移; 控制压电元件，其形成在所述柔性部上，以控制所述振荡单元的运动的刚性; 以及与控制压电元件电连接以将阻抗施加到控制压电元件的阻抗元件。

24. 发明申请

US20120125096A1 INERTIAL SENSOR 审中-公开
标题翻译：惯性传感器
公开(公告)号：US20120125096A1
公开(公告)日：2012-05-24
申请号：US13283517
申请日：2011-10-27
申请人： Heung Woo Park , Won Kyu Jeung , Hyun Kee Lee , Si Joong Yang
发明人： Heung Woo Park , Won Kyu Jeung , Hyun Kee Lee , Si Joong Yang
IPC分类号： G01C19/56
CPC分类号： G01C19/5783
摘要： Disclosed herein is an inertial sensor which includes a sensing unit including a mass mounted to be displaced on a flexible substrate part, a driving unit moving the mass, and a displacement detecting unit detecting a displacement of the mass, the inertial sensor comprising: a top cap covering a top of the flexible substrate part; and a bottom cap covering a bottom of the mass. Thereby, the inertial sensor can be implemented in an economic EMC molding package shape, while protecting the mass and the piezo-electric element. Further, the inertial sensor optimizes a thickness of the cap covering the mass and the piezo-electric element and an interval between the mass and the piezo-electric element to have improved freedom in design of space utilization as well as improved driving characteristics and Q values.
摘要翻译：本文公开了一种惯性传感器，其包括感测单元，该感测单元包括安装成在柔性基板部件上移位的质量，移动该质量块的驱动单元和检测该质量块的位移的位移检测单元，该惯性传感器包括：顶部帽盖覆盖柔性基板部分的顶部; 以及覆盖该质量块底部的底盖。因此，惯性传感器可以以经济的EMC成型包装形式实现，同时保护质量和压电元件。此外，惯性传感器优化覆盖质量块和压电元件的盖的厚度以及质量块和压电元件之间的间隔，以提高空间利用设计的自由度以及改善的驱动特性和Q值。

25. 发明申请

US20090014827A1 Image sensor module at wafer level, method of manufacturing the same, and camera module 审中-公开
标题翻译：晶圆级图像传感器模块及其制造方法及相机模块
公开(公告)号：US20090014827A1
公开(公告)日：2009-01-15
申请号：US12155836
申请日：2008-06-10
申请人： Chang Hyun Lim , Seog Moon Choi , Dae Jun Kim , Won Kyu Jeung , Jingli Yuan
发明人： Chang Hyun Lim , Seog Moon Choi , Dae Jun Kim , Won Kyu Jeung , Jingli Yuan
IPC分类号： H01L31/0203 , H01L31/18
CPC分类号： H01L27/14618 , H01L2224/13 , H04N5/2257
摘要： Provided is an image sensor module at the wafer level including a wafer; an image sensor mounted on one surface of the wafer; a wireless communication chip formed outside the image sensor on the one surface of the wafer; and a protective cover installed on the one surface of the wafer.
摘要翻译：提供了包括晶片的晶片级的图像传感器模块; 安装在晶片的一个表面上的图像传感器; 在晶片的一个表面上形成在图像传感器外部的无线通信芯片; 以及安装在晶片的一个表面上的保护盖。

26. 发明授权

US08973438B2 Inertial sensor and method of manufacturing the same 有权
标题翻译：惯性传感器及其制造方法
公开(公告)号：US08973438B2
公开(公告)日：2015-03-10
申请号：US13275397
申请日：2011-10-18
申请人： Jong Woon Kim , Sung Jun Lee , Won Kyu Jeung , Min Kyu Choi , Heung Woo Park
发明人： Jong Woon Kim , Sung Jun Lee , Won Kyu Jeung , Min Kyu Choi , Heung Woo Park
IPC分类号： G01P1/02 , G01P15/12 , G01P15/09 , G01C19/5769 , G01C19/5755 , G01P15/08
CPC分类号： G01C25/00 , B32B37/0076 , B32B37/02 , B32B37/12 , B32B37/18 , B32B38/10 , B32B2457/00 , C23F1/02 , G01C19/5755 , G01C19/5769 , G01P15/08 , G01P15/0802 , G01P15/135 , G01P2015/084 , Y10T156/1064
摘要： Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 so as to support the membrane 110, and a bottom cap 150 of which the edge 153 is provided with the first cavity 155 into which an adhesive 140 is introduced, wherein the adhesive 140 bonds an edge 153 to a bottom surface of the post, whereby the edge 153 of the bottom cap 150 is provided with the first cavity 155 to introduce the adhesive 140 into the first cavity 155, thereby preventing the adhesive 140 from being permeated into the post 130.
摘要翻译：这里公开了惯性传感器及其制造方法。根据本发明的优选实施例的惯性传感器100被构造成包括板状膜110，设置在膜110的中心部分113下方的质量体120，设置在膜110的边缘115下方的柱130 110，以支撑膜110，底盖150的边缘153设置有第一腔155，粘合剂140被引入到其中，其中粘合剂140将边缘153粘合到柱的底表面，由此底盖150的边缘153设置有第一腔155以将粘合剂140引入第一腔155中，从而防止粘合剂140渗透到柱130中。

27. 发明授权

US08789418B2 Inertial sensor and angular velocity detection method using the same 有权
标题翻译：惯性传感器和角速度检测方法使用相同
公开(公告)号：US08789418B2
公开(公告)日：2014-07-29
申请号：US13591335
申请日：2012-08-22
申请人： Jong Woon Kim , Liwei Lin , Minyao Mao , Won Kyu Jeung
发明人： Jong Woon Kim , Liwei Lin , Minyao Mao , Won Kyu Jeung
IPC分类号： G01C19/56
CPC分类号： G01C19/574
摘要： Disclosed herein is an inertial sensor. The inertial sensor includes: a plurality of driving masses; support bodies connecting a connection bridge so as to support the driving masses; a connection bridge connecting the plurality of driving masses and connecting the plurality of driving masses with the support bodies; and an electrode pattern part including driving electrodes simultaneously driving the driving masses and sensing electrode detecting axial Coriolis force of each of the driving masses.
摘要翻译：这里公开了惯性传感器。惯性传感器包括：多个驱动质量块; 支撑体连接连接桥，以支撑驱动块; 连接所述多个驱动块并将所述多个驱动块与所述支撑体连接的连接桥; 以及电极图案部，其包括驱动电极，同时驱动驱动质量，感测电极检测每个驱动质量块的轴向科里奥利力。

28. 发明授权

US08789417B2 Inertial sensor and angular velocity detection method using the same 有权
标题翻译：惯性传感器和角速度检测方法使用相同
公开(公告)号：US08789417B2
公开(公告)日：2014-07-29
申请号：US13303334
申请日：2011-11-23
申请人： Jong Woon Kim , Heung Woo Park , Won Kyu Jeung
发明人： Jong Woon Kim , Heung Woo Park , Won Kyu Jeung
IPC分类号： G01C19/56
CPC分类号： G01P15/08 , G01C19/5747 , G01P15/18
摘要： Disclosed herein is an inertial sensor including: a driving part displaceably supported by a support; a driving electrode vibrating the driving part; and a detecting electrode detecting a force acting on the driving part in a predetermined direction, wherein the driving part includes: a center driving mass positioned at the center of the inertial sensor; side driving masses connected to and interlocking with the center driving mass and positioned at four sides based on the center driving mass; and connection bridges connecting the center driving mass, the side driving masses, and the support to each other.
摘要翻译：本文公开了一种惯性传感器，包括：可移动地由支撑件支撑的驱动部分; 驱动电极使所述驱动部振动; 以及检测电极，其在预定方向上检测作用在所述驱动部件上的力，其中所述驱动部件包括：位于所述惯性传感器的中心的中心驱动质量块; 连接到中心驱动质量块并且与中心驱动质量块互锁的侧驱动质量块，并且基于中心驱动质量被定位在四侧; 以及将中心驱动质量块，侧驱动块和支撑件彼此连接的连接桥。

29. 发明申请

US20120312096A1 INERTIAL SENSOR 审中-公开
标题翻译：惯性传感器
公开(公告)号：US20120312096A1
公开(公告)日：2012-12-13
申请号：US13479522
申请日：2012-05-24
申请人： Won Kyu Jeung , Jung Won Lee
发明人： Won Kyu Jeung , Jung Won Lee
IPC分类号： G01P15/02
CPC分类号： G01C19/5712 , G01C19/5783 , G01P15/0802 , G01P15/097 , G01P2015/0865
摘要： Disclosed herein is an inertial sensor. The inertial sensor 100 according to a preferred embodiment of the present invention includes a membrane including wiring layers that are partitioned into insulating regions and conducting regions, a mass body provided under a central portion of the membrane, and a post provided under an edge of the membrane so as to support the membrane and surrounding the mass body. By this configuration, the membrane is formed as a chief metal core, thereby making it possible to reduce the total manufacturing cost of the inertial sensor and the parasitic capacitance is reduced, thereby making it possible to improve sensitivity of the inertial sensor. Further, the mass body extending from the membrane is made of metals to increase a mass density of the mass body, thereby making it possible to improve the sensitivity of the inertial sensor.
摘要翻译：这里公开了惯性传感器。根据本发明的优选实施例的惯性传感器100包括膜，其包括分隔成绝缘区域和导电区域的布线层，设置在膜的中心部分下方的质量体，以及设置在膜的边缘下方的柱膜以支撑膜并围绕质量体。通过这种构造，膜形成为主要金属芯，从而可以降低惯性传感器的总制造成本，并且减小寄生电容，从而可以提高惯性传感器的灵敏度。此外，从膜延伸的质量体由金属制成，以增加质量体的质量密度，从而可以提高惯性传感器的灵敏度。

30. 发明申请

US20120297874A1 INERTIAL SENSOR 失效
标题翻译：惯性传感器
公开(公告)号：US20120297874A1
公开(公告)日：2012-11-29
申请号：US13213948
申请日：2011-08-19
申请人： Jong Woon KIM , Jung Won LEE , Seung Hun HAN , Won Kyu JEUNG , Yun Sung KANG , Heung Woo PARK
发明人： Jong Woon KIM , Jung Won LEE , Seung Hun HAN , Won Kyu JEUNG , Yun Sung KANG , Heung Woo PARK
IPC分类号： G01C19/56
CPC分类号： G01C19/56
摘要： Disclosed herein is an inertial sensor. An inertial sensor 100 according to a preferred embodiment of the present invention includes a plate-shaped membrane 110, a mass body 130 that is provided under a central portion 111 of the membrane 110 and includes an integrated circuit, and a post 140 that are provided under an edge 112 of the membrane 110 to surround the mass body 130, whereby the overall thickness and area of the inertial sensor can be reduced by including the integrated circuit in the mass body 130 to implement a thin and small inertial sensor 100.
摘要翻译：这里公开了惯性传感器。根据本发明的优选实施例的惯性传感器100包括板状膜110，设置在膜110的中心部分111下方并包括集成电路的质量体130，以及设置有柱140 在膜110的边缘112下方围绕质量体130，从而可以通过将集成电路包括在质量体130中来实现惯性传感器的整体厚度和面积，以实现薄而小的惯性传感器100。

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