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    • 21. 发明授权
    • Diamond supported photocathodes for electron sources
    • 用于电子源的金刚石负载光电阴极
    • US06759800B1
    • 2004-07-06
    • US09363926
    • 1999-07-29
    • Andres FernandezTimothy ThomasXiaolan ChenSteven T. CoyleMing YuMarian Mankos
    • Andres FernandezTimothy ThomasXiaolan ChenSteven T. CoyleMing YuMarian Mankos
    • H01J4006
    • B82Y10/00H01J1/34
    • A photocathode as a source of electron beams, having a substrate of optically transmissive diamond and a photoemitter. A photocathode with a single emitting region provides a single electron beam; a photocathode with multiple emitting regions provides multiple electron beams. The photoemitter is positioned on the side of the diamond substrate opposite the surface on which the illumination is incident, and has an irradiation region at the contact with the optically transmissive diamond, and an emission region opposite the irradiation region, these regions being defined by the path of the illumination. The diamond substrate at the irradiation region/emission region interface conducts heat away from this focused region of illumination on the photocathode. Alternately, a diamond film is used for heat conduction, while another material is used as a substrate to provide structural support. The thermal conductivity of diamond is at least three orders of magnitude greater than that of fused silica, which is an alternative substrate material for photocathodes. This allows for efficient conduction of heat away from the irradiation region/emission region interface, and therefore allows higher currents to be achieved from the photocathode. This, in turn, permits higher throughput rates in applications including electron beam lithography.
    • 作为电子束源的光电阴极,具有透光金刚石和光电发射体的基底。 具有单个发射区域的光电阴极提供单个电子束; 具有多个发射区域的光电阴极提供多个电子束。 光发射器位于与照射入射的表面相对的金刚石基底的一侧,并且具有与光学透射金刚石接触的照射区域和与照射区域相对的发射区域,这些区域由 照明路径。 在照射区域/发射区域界面处的金刚石基底将热量远离该聚焦照明区域在光电阴极上。 或者,金刚石膜用于热传导,而另一种材料用作基底以提供结构支撑。 金刚石的热导率比熔融石英的热导率高至少三个数量级,熔融石英是光电阴极的替代基材。 这允许热量从照射区域/发射区域界面有效地传导,因此允许从光电阴极获得更高的电流。 这反过来又允许在包括电子束光刻的应用中更高的生产率。