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    • 25. 发明授权
    • Method for etching nitride
    • 蚀刻氮化物的方法
    • US5895223A
    • 1999-04-20
    • US988301
    • 1997-12-10
    • Lung-Han PengChih-Wei ChuangJin-Kuo HoChin-Yuan Chen
    • Lung-Han PengChih-Wei ChuangJin-Kuo HoChin-Yuan Chen
    • H01L21/311H01L21/318H01L21/302
    • H01L21/31111H01L21/3185
    • A method for etching nitride is provided, by which the etching rate and the roughness of the etching surface can be powerfully controlled, and by which the etching depth can be in-situ monitored. The etching method comprises the steps of: (i) coating a first electrode on a nitride chip; (ii) mounting the nitride chip on a holding device; (iii)dipping the holding device, the nitride chip and the first electrode in electrolysis liquid; (iv) irradiating the nitride chip with a UV light having a wavelength shorter than 254 nm; and (v) connecting the first electrode to a second electrode dipped in the electrolysis liquid by a galvanometer to in-situ monitor the etching current, so as to in-situ control the etching depth.
    • 提供了一种蚀刻氮化物的方法,通过该方法可以有效地控制蚀刻表面的蚀刻速率和粗糙度,并且可以原位监测蚀刻深度。 蚀刻方法包括以下步骤:(i)在氮化物芯片上涂覆第一电极; (ii)将氮化物芯片安装在保持装置上; (iii)将保持装置,氮化物片和第一电极浸入电解液中; (iv)用波长短于254nm的UV光照射氮化物芯片; 和(v)通过电流计将第一电极连接到浸入电解液中的第二电极,以便原位监测蚀刻电流,从而原位控制蚀刻深度。