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21. 发明授权

US07230245B2 Field induced THz wave emission microscope 有权
标题翻译：场诱发太赫兹波发射显微镜
公开(公告)号：US07230245B2
公开(公告)日：2007-06-12
申请号：US11121385
申请日：2005-05-04
申请人： Xi-Cheng Zhang , Tao Yuan , Jingzhou Xu , Haewook Han
发明人： Xi-Cheng Zhang , Tao Yuan , Jingzhou Xu , Haewook Han
IPC分类号： G01J5/02
CPC分类号： G01Q60/12 , G01N21/3563 , G01N21/3581
摘要： A device for use with a source of radiation to provide a THz emission image representing a sample. The device comprises a substrate, a metallic probe having a tip adjacent to the substrate surface and a source of AC bias coupled between the probe tip and substrate. Radiation generated by the source of radiation is incident on the substrate surface in the vicinity of the probe tip and generates THz emission based at least on the AC bias coupled between the probe tip and substrate. A method for providing a THz emission image representing a sample is also provided.
摘要翻译：一种与辐射源一起使用以提供表示样品的THz发射图像的装置。该器件包括衬底，具有与衬底表面相邻的尖端的金属探针和耦合在探针尖端和衬底之间的AC偏压源。由辐射源产生的辐射入射到探针尖端附近的衬底表面上，并且至少基于耦合在探针尖端和衬底之间的AC偏压产生THz发射。还提供了一种用于提供表示样本的THz发射图像的方法。

22. 发明申请

US20060022141A1 Field induced THz wave emission microscope 有权
标题翻译：场诱发太赫兹波发射显微镜
公开(公告)号：US20060022141A1
公开(公告)日：2006-02-02
申请号：US11121385
申请日：2005-05-04
申请人： Xi-Cheng Zhang , Tao Yuan , Jingzhou Xu , Haewook Han
发明人： Xi-Cheng Zhang , Tao Yuan , Jingzhou Xu , Haewook Han
IPC分类号： G01J5/02
CPC分类号： G01Q60/12 , G01N21/3563 , G01N21/3581
摘要： A device for use with a source of radiation to provide a THz emission image representing a sample. The device comprises a substrate, a metallic probe having a tip adjacent to the substrate surface and a source of AC bias coupled between the probe tip and substrate. Radiation generated by the source of radiation is incident on the substrate surface in the vicinity of the probe tip and generates THz emission based at least on the AC bias coupled between the probe tip and substrate. A method for providing a THz emission image representing a sample is also provided.
摘要翻译：一种与辐射源一起使用以提供表示样品的THz发射图像的装置。该器件包括衬底，具有与衬底表面相邻的尖端的金属探针和耦合在探针尖端和衬底之间的AC偏压源。由辐射源产生的辐射入射到探针尖端附近的衬底表面上，并且至少基于耦合在探针尖端和衬底之间的AC偏压产生THz发射。还提供了一种用于提供表示样本的THz发射图像的方法。

23. 发明授权

US09321126B2 Laser-based material processing apparatus and methods 有权
标题翻译：激光材料加工设备及方法
公开(公告)号：US09321126B2
公开(公告)日：2016-04-26
申请号：US13037614
申请日：2011-03-01
申请人： Jingzhou Xu , Jin Young Sohn , Gyu Cheon Cho , Lawrence Shah
发明人： Jingzhou Xu , Jin Young Sohn , Gyu Cheon Cho , Lawrence Shah
IPC分类号： B23K26/00
CPC分类号： B23K26/00 , Y02P40/57
摘要： Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse width sufficiently short so that material is efficiently removed by nonlinear optical absorption from the region and a quantity of heat affected zone and thermal stress on the material within the region, proximate to the region, or both is reduced relative to a quantity obtainable using a laser with longer pulses. In at least one embodiment, an ultrashort pulse laser system may include at least one of a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a composite material.
摘要翻译：各种实施例可以用于对工件的目标材料进行基于激光的修改，同时有利地实现处理生产量和/或质量的改善。一种处理方法的实施例可以包括将激光脉冲聚焦并且以足够短的脉冲宽度将激光脉冲引导到工件的区域，使得通过来自该区域的非线性光学吸收和一定数量的热影响区域和区域内的材料，邻近区域或两者都相对于使用具有较长脉冲的激光可获得的量减少。在至少一个实施例中，超短脉冲激光系统可以包括光纤放大器或光纤激光器中的至少一个。各种实施例适合于在复合材料上或复合材料内的切割，切割，划线和成形特征中的至少一个。

24. 发明授权

US08663754B2 Pulsed laser micro-deposition pattern formation 有权
标题翻译：脉冲激光微沉积图案形成
公开(公告)号：US08663754B2
公开(公告)日：2014-03-04
申请号：US12400438
申请日：2009-03-09
申请人： Bing Liu , Zhendong Hu , Makoto Murakami , Jingzhou Xu , Yong Che
发明人： Bing Liu , Zhendong Hu , Makoto Murakami , Jingzhou Xu , Yong Che
IPC分类号： C23C14/28 , C08J7/04 , B05D5/06 , B05D5/12 , B23K26/00
CPC分类号： C23C20/04 , B41M5/262 , B41M5/267 , B44F1/10 , C23C14/28 , C23C14/3435 , G02B26/101 , Y10T428/24802 , Y10T428/24917
摘要： A method of forming patterns on transparent substrates using a pulsed laser is disclosed. Various embodiments include an ultrashort pulsed laser, a substrate that is transparent to the laser wavelength, and a target plate. The laser beam is guided through the transparent substrate and focused on the target surface. The target material is ablated by the laser and is deposited on the opposite substrate surface. A pattern, for example a gray scale image, is formed by scanning the laser beam relative to the target. Variations of the laser beam scan speed and scan line density control the material deposition and change the optical properties of the deposited patterns, creating a visual effect of gray scale. In some embodiments patterns may be formed on a portion of a microelectronic device during a fabrication process. In some embodiments high repetition rate picoseconds and nanosecond sources are configured to produce the patterns.
摘要翻译：公开了使用脉冲激光在透明基板上形成图案的方法。各种实施例包括超短脉冲激光器，对激光波长透明的衬底和靶板。激光束被引导通过透明基板并聚焦在目标表面上。目标材料被激光烧蚀并沉积在相对的基板表面上。通过相对于目标扫描激光束来形成例如灰度图像的图案。激光束扫描速度和扫描线密度的变化控制材料沉积并改变沉积图案的光学性质，产生灰度的视觉效果。在一些实施例中，可以在制造过程期间在微电子器件的一部分上形成图案。在一些实施例中，高重复率皮秒和纳秒源被配置为产生图案。

25. 发明申请

US20120230353A1 OPTICAL PULSE SOURCE WITH INCREASED PEAK POWER 有权
标题翻译：具有增加峰值功率的光学脉冲源
公开(公告)号：US20120230353A1
公开(公告)日：2012-09-13
申请号：US13413304
申请日：2012-03-06
申请人： Jingzhou XU , Gyu Cheon CHO
发明人： Jingzhou XU , Gyu Cheon CHO
IPC分类号： H01S3/067 , H01S3/091
CPC分类号： H01S3/11 , H01S3/0057 , H01S3/0092 , H01S3/06712 , H01S3/10061 , H01S3/2308 , H01S3/2383 , H01S3/302
摘要： In at least one embodiment time separated pulse pairs are generated, followed by amplification to increase the available peak and/or average power. The pulses are characterized by a time separation that exceeds the input pulse width and with distinct polarization states. The time and polarization discrimination allows easy extraction of the pulses after amplification. In some embodiments polarization maintaining (PM) fibers and/or amplifiers are utilized which provides a compact arrangement. At least one implementation provides for seeding of a solid state amplifier or large core fiber amplifier with time delayed, polarization split pulses, with capability for recombining the time separated pulses at an amplifier output. In various implementations suitable combinations of bulk optics and fibers may be utilized. In some implementations wavelength converted pulse trains are generated. A method and system of the present invention can be used in time domain applications utilizing multiple beam paths, for example spectroscopy.
摘要翻译：在至少一个实施例中，产生时间分离的脉冲对，随后进行放大以增加可用的峰值和/或平均功率。脉冲的特征在于超过输入脉冲宽度并具有不同极化状态的时间间隔。时间和极化辨别允许在放大后容易地提取脉冲。在一些实施例中，利用了提供紧凑布置的偏振维持（PM）光纤和/或放大器。至少一个实施例提供具有时间延迟的极化分离脉冲的固态放大器或大型核心光纤放大器的种子，具有用于在放大器输出端重组时间分离的脉冲的能力。在各种实施方式中，可以利用本体光学和光纤的合适的组合。在一些实现中，生成波长转换的脉冲串。本发明的方法和系统可以用于利用多个光束路径的时域应用，例如光谱学。

26. 发明申请

US20120195330A1 METHODS AND SYSTEMS FOR FIBER DELIVERY OF HIGH PEAK POWER OPTICAL PULSES 有权
标题翻译：用于光纤传输高功率光学脉冲的方法和系统
公开(公告)号：US20120195330A1
公开(公告)日：2012-08-02
申请号：US13358250
申请日：2012-01-25
申请人： Gyu Cheon CHO , Jingzhou XU
发明人： Gyu Cheon CHO , Jingzhou XU
IPC分类号： H01S3/30
CPC分类号： H01S3/302 , H01S3/0057 , H01S3/06712 , H01S3/06741 , H01S3/06754 , H01S3/1301 , H01S3/2308 , H01S2301/085
摘要： Methods and systems for delivery of high peak power optical pulses through optical fiber are disclosed. Raman soliton generation is utilized to maintain the properties of the pulses in the delivery fiber. The apparatus can comprise any high peak power pulse source and delivery fiber supporting Raman soliton generation.
摘要翻译：公开了通过光纤传送高峰值功率光脉冲的方法和系统。利用拉曼孤子产生来保持输送纤维中脉冲的性质。该装置可以包括支持拉曼孤子生成的任何高峰值功率脉冲源和输送光纤。

27. 发明申请

US20110006226A1 TERAHERTZ RADIATION SOURCE MOUNTING ARRANGEMENTS AND METHODS OF MOUNTING A TERAHERTZ SOURCE 有权
标题翻译： TERAHERTZ辐射源安装布置和安装TERAHERTZ源的方法
公开(公告)号：US20110006226A1
公开(公告)日：2011-01-13
申请号：US12886131
申请日：2010-09-20
申请人： Brian SCHULKIN , Xi-Cheng ZHANG , Thomas TONGUE , Jingzhou XU , Jian CHEN
发明人： Brian SCHULKIN , Xi-Cheng ZHANG , Thomas TONGUE , Jingzhou XU , Jian CHEN
IPC分类号： G21G4/00 , H01J29/02
CPC分类号： G21K5/00 , B33Y80/00 , G01J4/00 , G01N21/211 , G01N21/3581 , H01S5/02236 , H01S2302/02
摘要： Methods and apparatus for detecting variations in electromagnetic fields, in particular, terahertz (THz) electromagnetic fields, are provided. The methods and apparatus employ polarization detection devices and controllers to maintain or vary the polarization of modulated signals as desired. The methods and apparatus are provided to characterize electromagnetic fields by directing the electromagnetic field and a probe beam upon an electro-crystal and detecting the modulation of the resulting probe beam. Detection of the modulation of the probe beam is practiced by detecting and comparing the polarization components of the modulated probe beam. Aspects of the invention may be used to analyze or detect explosives, explosive related compounds, and pharmaceuticals, among other substances. A compact apparatus, modular optical devices for use with the apparatus, sample holders, and radiation source mounts are also disclosed.
摘要翻译：提供了用于检测电磁场，特别是太赫兹（THz）电磁场的变化的方法和装置。所述方法和装置使用偏振检测装置和控制器来根据需要维持或改变调制信号的极化。提供的方法和装置用于通过将电磁场和探针光束引导到电晶体上并检测所得到的探针光束的调制来表征电磁场。通过检测和比较调制探测光束的偏振分量来实现探测光束的调制的检测。本发明的方面可用于分析或检测爆炸物，爆炸性相关化合物和药物等物质。还公开了一种紧凑的装置，用于装置，样品架和辐射源底座的模块化光学装置。

28. 发明申请

US20100197116A1 LASER-BASED MATERIAL PROCESSING METHODS AND SYSTEMS 有权
标题翻译：基于激光的材料加工方法与系统
公开(公告)号：US20100197116A1
公开(公告)日：2010-08-05
申请号：US12641256
申请日：2009-12-17
申请人： Lawrence Shah , Gyu Cheon Cho , Jingzhou Xu
发明人： Lawrence Shah , Gyu Cheon Cho , Jingzhou Xu
IPC分类号： H01L21/461 , B23K26/38
CPC分类号： H01L21/268 , B23K26/0624 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/082 , B23K26/083 , B23K26/364 , B23K26/38 , B23K26/40 , B23K2101/40 , B23K2103/50
摘要： Various embodiments may be used for laser-based modification of target material of a workpiece while advantageously achieving improvements in processing throughput and/or quality. Embodiments of a method of processing may include focusing and directing laser pulses to a region of the workpiece at a pulse repetition rate sufficiently high so that material is efficiently removed from the region and a quantity of unwanted material within the region, proximate to the region, or both is reduced relative to a quantity obtainable at a lower repetition rate. In at least one embodiment, an ultrashort pulse laser system may include at least one of a fiber amplifier or fiber laser. Various embodiments are suitable for at least one of dicing, cutting, scribing, and forming features on or within a semiconductor substrate. Workpiece materials may also include metals, inorganic or organic dielectrics, or any material to be micromachined with femtosecond and/or picosecond pulses, and in some embodiments with pulse widths up to a few nanoseconds.
摘要翻译：各种实施例可以用于对工件的目标材料进行基于激光的修改，同时有利地实现处理生产量和/或质量的改善。处理方法的实施例可以包括将激光脉冲聚焦并以足够高的脉冲重复频率将激光脉冲引导到工件的区域，使得材料有效地从该区域移除并且在该区域内靠近该区域的一些不想要的材料，或者两者相对于以较低的重复率可获得的量减少。在至少一个实施例中，超短脉冲激光系统可以包括光纤放大器或光纤激光器中的至少一个。各种实施例适合于在半导体衬底上或半导体衬底内的切割，切割，划线和形成特征中的至少一个。工件材料还可以包括金属，无机或有机电介质，或用飞秒和/或皮秒脉冲微加工的任何材料，在一些实施例中，脉冲宽度可达几纳秒。

29. 发明申请

US20100025387A1 TRANSPARENT MATERIAL PROCESSING WITH AN ULTRASHORT PULSE LASER 有权
标题翻译：具有ULTRASH脉冲激光的透明材料加工
公开(公告)号：US20100025387A1
公开(公告)日：2010-02-04
申请号：US12397567
申请日：2009-03-04
申请人： Alan Y. Arai , Gyu C. Cho , Jingzhou Xu , Fumiyo Yoshino , Haibin Zhang , James Bovatsek , Makoto Yoshida
发明人： Alan Y. Arai , Gyu C. Cho , Jingzhou Xu , Fumiyo Yoshino , Haibin Zhang , James Bovatsek , Makoto Yoshida
IPC分类号： B23K26/06 , B23K26/00 , B23K26/38
CPC分类号： B23K26/0624 , B23K26/0676 , B23K26/083 , B23K26/0869 , B23K26/21 , B23K26/324 , B23K26/359 , B23K26/364 , B23K26/40 , B23K26/402 , B23K26/53 , B23K26/55 , B23K2103/50 , B23K2103/54 , B28D5/00 , B28D5/0011 , B29C65/1606 , B29C65/1612 , B29C65/1619 , B29C65/1629 , B29C65/1635 , B29C65/1638 , B29C65/1654 , B29C65/1658 , B29C65/1687 , B29C65/38 , B29C66/1122 , B29C66/43 , B29C66/71 , B29C66/73161 , B29C66/73366 , B29C66/73921 , B29C66/836 , B29C66/952 , B29K2995/0026 , B41M5/26 , B41M5/262 , B41M5/267 , C03B23/006 , C03B33/102 , C03C23/0025 , H01L21/268 , H01L21/78 , B29K2069/00
摘要： Methods, devices, and systems for ultrashort pulse laser processing of optically transparent materials are disclosed, with example applications in scribing, marking, welding, and joining. For example, ultrashort laser pulses create scribe features with one pass of the laser beam across the material, with at least one of the scribe features being formed below the surface of the material. Slightly modifying the ultrashort pulse laser processing conditions produces sub-surface marks. When properly arranged, these marks are clearly visible with correctly aligned illumination. Reflective marks may also be formed with control of laser parameters. A transparent material other than glass may be utilized. A method for welding transparent materials uses ultrashort laser pulses to create a bond through localized heating. In some embodiments of transparent material processing, a multifocus beam generator simultaneously forms multiple beam waists spaced depthwise relative to the transparent material, thereby increasing processing speed.
摘要翻译：公开了用于光学透明材料的超短脉冲激光加工的方法，装置和系统，例如在划线，标记，焊接和接合中的应用。例如，超短激光脉冲通过激光束穿过材料产生一次划线特征，其中至少一个划线特征形成在材料表面下方。稍微修改超短脉冲激光加工条件会产生次表面痕迹。正确布置时，这些标记在正确对齐的照明下清晰可见。还可以通过激光参数的控制来形成反射标记。可以使用玻璃以外的透明材料。用于焊接透明材料的方法使用超短激光脉冲通过局部加热产生粘结。在透明材料处理的一些实施例中，多焦点光束发生器同时形成相对于透明材料沿深度方向间隔开的多个光束束，从而提高处理速度。

30. 发明授权

US07242010B2 GaSe crystals for broadband terahertz wave detection 有权
标题翻译： GaSe晶体用于宽带太赫兹波检测
公开(公告)号：US07242010B2
公开(公告)日：2007-07-10
申请号：US11086623
申请日：2005-03-22
申请人： Kai Liu , Xi-Cheng Zhang , Jingzhou Xu
发明人： Kai Liu , Xi-Cheng Zhang , Jingzhou Xu
IPC分类号： G01J5/58
CPC分类号： G01J3/42 , G01N21/21 , G01N21/3581
摘要： A broad bandwidth detector to measure intensity information of terahertz (THz) frequency pulses. The detector includes: coupling optics coupled to a coherent optical source; a GaSe substrate aligned such that the probe beam path intersects a first surface at a phase-matching angle; a polarization detector aligned in the probe beam path; and calculation means coupled to the polarization detector. The coupling optics direct the probe optical beam along a beam path that is substantially collinear with the pulse beam path of the THz frequency pulses. The polarization of the probe optical beam is varied based on interactions between the probe optical beam and the THz frequency pulses within the GaSe substrate. The polarization detector detects the varied polarization of the probe optical beam. The calculation means determine the intensity information of the THz frequency pulses based on the detected probe polarization of the probe optical beam.
摘要翻译：用于测量太赫兹（THz）频率脉冲的强度信息的宽带宽检测器。检测器包括：耦合到相干光源的耦合光学器件; GaSe衬底对准，使得探针光束路径以相位匹配角度与第一表面相交; 在探测光束路径中对准的偏振检测器; 以及耦合到偏振检测器的计算装置。耦合光学器件沿着与THz频率脉冲的脉冲光束路径基本共线的光束路径来引导探测光束。基于探针光束和GaSe衬底内的THz频率脉冲之间的相互作用，探针光束的极化发生变化。偏振检测器检测探针光束的变化极化。计算装置根据探测光束的检测探头偏振来确定THz频率脉冲的强度信息。

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