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    • 29. 发明申请
    • SEMICONDUCTOR DEVICE WITH VOLTAGE COMPENSATION STRUCTURE
    • 具有电压补偿结构的半导体器件
    • US20130001674A1
    • 2013-01-03
    • US13174319
    • 2011-06-30
    • Hans-Joachim SchulzeHans Weber
    • Hans-Joachim SchulzeHans Weber
    • H01L29/78H01L29/06H01L21/22
    • H01L29/7827H01L29/0634H01L29/0653H01L29/1054H01L29/165H01L29/167H01L29/36H01L29/66712H01L29/73H01L29/7395H01L29/7802H01L29/808H01L29/872
    • A semiconductor device with a high voltage compensation component is manufactured by etching a trench into an epitaxial semiconductor material doped with n-type dopant atoms and p-type dopant atoms and disposing a first semiconductor or insulating material along one or more sidewalls of the trench. The first semiconductor or insulating material has a dopant diffusion constant which is at least 2× different for the n-type dopant atoms than the p-type dopant atoms. A second semiconductor material is disposed in the trench along the first semiconductor or insulating material. The second semiconductor material has a different dopant diffusion constant than the first semiconductor or insulating material. More n-type dopant atoms or p-type dopant atoms are diffused from the epitaxial semiconductor material through the first semiconductor or insulating material into the second semiconductor material than the other type of dopant atoms so that a lateral charge separation occurs between the second semiconductor material and the epitaxial semiconductor material.
    • 通过将沟槽蚀刻成掺杂有n型掺杂剂原子和p型掺杂剂原子的外延半导体材料并且沿沟槽的一个或多个侧壁设置第一半导体或绝缘材料来制造具有高电压补偿分量的半导体器件。 第一半导体或绝缘材料具有与p型掺杂剂原子相比对于n型掺杂剂原子至少为2×不同的掺杂剂扩散常数。 第二半导体材料沿着第一半导体或绝缘材料设置在沟槽中。 第二半导体材料具有与第一半导体或绝缘材料不同的掺杂剂扩散常数。 比其他类型的掺杂剂原子,更多的n型掺杂剂原子或p型掺杂剂原子从外延半导体材料通过第一半导体或绝缘材料扩散到第二半导体材料中,使得在第二半导体材料 和外延半导体材料。