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    • 26. 发明申请
    • METHOD FOR FABRICATING NANOCOILS
    • 制备纳米微粒的方法
    • WO2007038177A2
    • 2007-04-05
    • PCT/US2006036757
    • 2006-09-21
    • NORTHROP GRUMMAN CORPSTORASKA GARRETT AHOWELL ROBERT S
    • STORASKA GARRETT AHOWELL ROBERT S
    • G02B6/26
    • H01L27/1203B81C1/0019B82Y10/00B82Y30/00H01F41/041H01L21/84H01L27/10
    • A method for fabricating nanocoils and improved nanocoils fabricated therefrom. Embodiments of the method utilizing deep reactive ion etching (DRIE). A method for fabricating nanocoils includes providing a silicon-on-insulator (SOI) wafer, in which SOI wafer includes buried oxide layer, patterning one or more devices into a layer of silicon on top of the buried oxide layer, depositing tensile stressed nitride layer on the top silicon layer, patterning coiling arm structure on top silicon layer, patterning an overlapping etch window mask on bottom side of SOI wafer using, in which patterning overlapping etch window mask removes SOI wafer and exposes buried oxide layer in width greater than coiling arm structure, and releasing coiling arm structure so that coiling arm coils to form nanocoil. In embodiments, DRIE is utilized to pattern the overlapping etch window mask.
    • 一种用于制造纳米线和由其制造的改进的纳米薄膜的方法。 利用深反应离子蚀刻(DRIE)的方法的实施例。 制造纳米线的方法包括提供绝缘体上硅(SOI)晶片,其中SOI晶片包括掩埋氧化物层,将一个或多个器件图案化成掩埋氧化物层顶部的硅层,沉积拉应力氮化物层 在顶层硅层上,在顶部硅层上图案化卷取臂结构,在SOI晶片的底侧上构图重叠的蚀刻窗口掩模,其中图案化重叠的蚀刻窗口掩模移除SOI晶片并暴露出大于卷取臂的宽度的掩埋氧化物层 结构和释放卷取臂结构,使卷绕臂线圈形成纳米油。 在实施例中,DRIE用于对重叠的蚀刻窗口掩模进行图案化。
    • 30. 发明申请
    • STRUCTURAL I-BEAM AUTOMOTIVE SUSPENSION ARM
    • 结构型I-BEAM汽车悬架ARM
    • WO2004065146A1
    • 2004-08-05
    • PCT/CA2004/000055
    • 2004-01-15
    • MULTIMATIC INC.HOWELL, Robert, AlexanderGRUBER, Rudolf
    • HOWELL, Robert, AlexanderGRUBER, Rudolf
    • B60G7/00
    • B60G7/001B60G2200/10B60G2206/014B60G2206/122B60G2206/16B60G2206/722B60G2206/8102B60G2206/8201Y10T29/49622
    • A vehicular suspension arm (10) comprises an upper sheet metal stamped component (11) with a first outer face and a first inner face (19), and a first central web portion (17) with two opposites sides and first upstanding flange portions (13) at opposites sides of the first web portion, a lower sheet metal stamped component (12) with a second outer face and a second inner face (19), and a second central web portion (17) with two opposite sides and a second upstanding flange portions (13) at the opposite sides of the second web portion, the first and second inner faces (19) adapted to contact each other along a substantial portion of the first and second web portions (17), the upper and lower stamped components (11, 12) adapted to be rigidly attached to each other to create a structural I-beam section, wherein the thickness of each upstanding flange portion (13) is at least equal to the combined thickness of the first and second web portions (17).
    • 车辆悬挂臂(10)包括具有第一外表面和第一内表面(19)的上金属板冲压部件(11),以及具有两个相对侧和第一直立凸缘部分的第一中心腹板部分(17) 13),在第一腹板部分的相对侧,具有第二外表面和第二内表面(19)的下金属冲压部件(12)和具有两个相对侧的第二中心腹板部分(17) 在第二腹板部分的相对侧的直立的凸缘部分(13),第一和第二内表面(19)适于沿第一和第二腹板部分(17)的大部分彼此接触,上和下冲压 组件(11,12)适于彼此刚性地连接以产生结构的工字梁部分,其中每个直立凸缘部分(13)的厚度至少等于第一和第二腹板部分的组合厚度( 17)。