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    • 23. 发明专利
    • JPH05264384A
    • 1993-10-12
    • JP32009792
    • 1992-11-30
    • ENDRESS HAUSER GMBH CO
    • C03C17/02C03C17/25C04B37/00C04B37/02C04B41/80C04B41/85C04B41/87C30B33/00C30B33/02G01L9/00G01L9/04G01L9/12H01L21/316
    • PURPOSE: To avoid deterioration in the surface characteristics of an object and the moisture dependency of a sensor by coating the object made of ceramic, glass or a single crystal insulating material with a thin film of spin-on-glass solution having a specific equivalent of silicon dioxide and then drying the thin film. CONSTITUTION: The capacitive pressure sensor 10 has a diaphragm 11 made of an aluminum-ceramic of 96wt.% purity, glass or a single crystal material. Capacitor electrodes 14, 15 are fixed to the opposite surfaces of the diaphragm 11 and a substrate 12 and facing each other through an interval in a chamber 13. When the diaphragm 11 is deformed, the interval of electrodes and thereby the capacitance of the pressure sensor is varied. The variation is connected with connection conductors 16, 17 and measured by an electronic circuit. The diaphragm 11 and the substrate 12 are coated, on the entire surface thereo,. with a thin film of spin-on-glass solution having at most 10% equivalent of silicon dioxide and then the thin film is dried. According to the method, deterioration in the surface characteristics of an object made of ceramic, glass or a single crystal insulating material and the moisture dependency of a sensor can be avoided.