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    • 25. 发明申请
    • SYSTEMS AND METHODS OF PREPARING A COMPOSITION USED IN MULTIPLE PROCESSING TOOLS
    • 制备用于多种加工工具的组合物的系统和方法
    • WO2009042698A2
    • 2009-04-02
    • PCT/US2008/077543
    • 2008-09-24
    • TRES-ARK, INC.ANDERSON, Gary, R.FOWLER, MattTIMMONS, Tom
    • ANDERSON, Gary, R.FOWLER, MattTIMMONS, Tom
    • B01F3/22
    • B01F15/0408B01F15/0441G05D11/131
    • There is disclosed a system and method of formulating a batch comprising at least two chemicals. An embodiment is disclosed wherein a feedforward algorithm can be used to control the target blend. Subsequently a feedback closed loop control loop algorithm is provided for a multivariant blend. Use of this approach allows for a continuously autoreplenished and controlled blend. Also disclosed is the ability to control via feedforward and feedback algorithms a fast responding control mode that allows for the elimination of a container. This approach will allow for "one pass" blending with control. The controller implements an automated fault detection and correction system, thereby identifying necessary maintenance prior to failure. If failure does occur the signature recognition allows rapid analysis and correction thus maximizing tool availability.
    • 公开了一种配制包含至少两种化学品的批料的系统和方法。 公开了一种实施例,其中可以使用前馈算法来控制目标混合。 随后,为多变量混合提供反馈闭环控制环路算法。 使用这种方法允许连续自动补偿和控制混合。 还公开了通过前馈和反馈算法控制允许消除容器的快速响应控制模式的能力。 这种方法将允许“一次通过”与控制混合。 控制器实现自动故障检测和校正系统,从而在故障之前识别必要的维护。 如果发生故障,则签名识别允许快速分析和校正,从而最大限度地提高工具可用性。