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11. 发明专利

JP2007093643A Optical level controller and its control method, and laser application device using the same 有权
标题翻译：光电平控制器及其控制方法，以及激光应用装置
公开(公告)号：JP2007093643A
公开(公告)日：2007-04-12
申请号：JP2005278935
申请日：2005-09-26
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： NAGANO TSUYOSHI , OTA YOSHINORI
IPC分类号： G02B27/28 , H04B10/00 , G02B26/02 , H04B10/80
CPC分类号： G02B27/283
摘要： PROBLEM TO BE SOLVED: To provide an optical level controller capable of optionally varying respective beam intensity levels of a plurality of light beams which have the same or substantially the same optical axis and differ in wavelength, and to provide its control method, and a laser application device using the same. SOLUTION: The optical level controller 1 controls independently controls intensities of two beams which are emitted by a laser oscillator 2 and differ in wavelength. The optical level controller 1 is equipped with a wavelength plate 3 having wavelength dependence and a polarization beam splitter 4. The wavelength plate 3 having the wavelength dependence functions as a 1/2-wavelength plate for one light wave and a total wavelength plate for the other light wave. Only the angle of rotation of the polarization beam splitter 4 on the optical axis is adjusted to determine the intensity of the other light wave rectilinearly transmitted through the polarization beam splitter 4. Then the polarization beam splitter 4 is fixed at the adjusted angle and the angle of rotation of the wavelength plate 3 on the optical axis is adjusted to determine the intensity of the one light wave. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够可选地改变具有相同或基本上相同的光轴并且具有不同波长的多个光束的各个光束强度水平的光学水平控制器，并且为了提供其控制方法，以及使用其的激光施加装置。解决方案：光学电平控制器1独立地控制由激光振荡器2发射并且波长不同的两个光束的强度。光学平面控制器1配备有具有波长依赖性的波长板3和偏振光束分离器4.具有波长依赖性的波长板3用作一个光波的1/2波长板和用于一个光波的总波长板其他光波。仅调整偏振分束器4在光轴上的旋转角度以确定通过偏振分束器4直线传播的另一光波的强度。然后，偏振分束器4固定在调节角度和角度调整波长板3在光轴上的旋转以确定一个光波的强度。版权所有（C）2007，JPO＆INPIT

12. 发明专利

JP2006189718A Member switching apparatus, lens switching apparatus, laser repair apparatus and laser inspecting apparatus 审中-公开
标题翻译：会员切换装置，镜头切换装置，激光修复装置和激光检查装置
公开(公告)号：JP2006189718A
公开(公告)日：2006-07-20
申请号：JP2005002839
申请日：2005-01-07
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： NOZAKI MASAKAZU
IPC分类号： G02B7/02 , G02F1/13
CPC分类号： G02B7/14 , B23K26/064 , B23K26/0648 , B23K26/0665
摘要： PROBLEM TO BE SOLVED: To provide a member switching apparatus, a lens switching apparatus, a laser repair apparatus furnished with the lens switching apparatus and a laser inspecting apparatus, where such a member as a lens is positioned accurately and positional deviation is quickly resolved, using a simple mechanism, even when a positional deviation occurs. SOLUTION: A linear motor table 5 is provided in the lens switching apparatus 3 of the laser repair apparatus 1. The linear motor table 5 is fixed on a table 2 and a laser oscillation apparatus 4, and moves a lens holder 6 in the horizontal direction. Further, six objective lenses 7a through 7f, each having powers different from one another are provided and held in line on the lens holder 6 so that the optical axes are in parallel to each another. The objective lens which is to be inserted into the optical path of laser light 12 is switched, by moving the lens holder 6 by means of the linear motor table 5. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：为了提供一种构件切换装置，透镜切换装置，配备有透镜切换装置的激光修复装置和激光检查装置，其中诸如透镜的部件准确地定位，并且位置偏差为快速解决，使用简单的机制，即使发生位置偏差。解决方案：在激光修复装置1的透镜切换装置3中设置线性马达台5.线性马达台5固定在台2和激光振荡装置4上，将透镜保持架6 水平方向。另外，各自具有彼此不同的功率的六个物镜7a至7f被设置并保持在透镜保持器6上，使得光轴彼此平行。通过使线性电动机台5移动透镜支架6来切换要插入到激光12的光路中的物镜。（C）2006，JPO＆NCIPI

13. 发明专利

JP2004361268A Galvanometer with magnetic sensor 审中-公开
标题翻译：带磁传感器的电流计
公开(公告)号：JP2004361268A
公开(公告)日：2004-12-24
申请号：JP2003160625
申请日：2003-06-05
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： TAJIMA HISANORI
IPC分类号： G01B7/30 , G01B7/00 , G02B26/10
摘要： PROBLEM TO BE SOLVED: To provide a galvanometer with a magnetic the sensor, which is not affected by adverse influence due to change in temperature or change with the lapse of time, and which can precisely and simply detect the rotational position of an axis of the galvanometer at all times.
SOLUTION: The galvanometer 1 with the magnetic the sensor is composed of a cylindrical galvanometer main body 2, a disk 3 which is provided on an end face of the opposite axial side of the galvanometer main body 2 and in which magnetization sections 31 of N poles and magnetization sections 32 of S poles are alternately provided at a prescribed interval, a shaft 4 projecting from an end face of the axial side of the galvanometer main body 2, an arm 5 which is connected to an end part of the shaft 4 on the opposite axial side and which projects in a radial detection, and a head 6 mounted on the tip of the arm 5.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供一种具有磁传感器的电流计，其不受温度变化或随时间的变化的不利影响的影响，并且可以精确和简单地检测传感器的旋转位置任何时候检流计的轴线。解决方案：具有磁传感器的电流计1由圆柱形电流计主体2，设置在电流计主体2的相对轴向侧的端面上的磁盘3组成，磁化部31 的N极和S极的磁化部32以规定的间隔交替设置，从检流计主体2的轴向侧的端面突出的轴4，连接到轴的端部的臂5 4，在相对的轴向侧，并且在径向检测中突出，以及安装在臂5的尖端上的头6.版权所有（C）2005，JPO＆NCIPI

14. 发明专利

JP2004356166A Method of stabilizing pulse output of laser and solid-state laser system using the same 审中-公开
公开(公告)号：JP2004356166A
公开(公告)日：2004-12-16
申请号：JP2003148879
申请日：2003-05-27
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： ARIGA SATORU
IPC分类号： H01S3/131 , H01S3/092 , H01S3/16
摘要： PROBLEM TO BE SOLVED: To solve the problem that, when a solid-state laser system is used in a state where a laser rod section causes an excessive thermal change due to a change in the laser light outputting pulse interval, or the like, the leaking amount or power distribution of laser light changes and the relation between the output of the laser and the monitored value of the output are deviated, resulting in the fluctuation of the output, because the polarized state or spread angle of the laser light changes due to a thermal lens effect caused by the thermal change of the laser rod section.
SOLUTION: In a method of stabilizing the output of an optically pumped solid-state laser system which outputs pulsed laser light, the temperature of a laser rod 1 is detected and the crest value of an optically pumped pulse is controlled so that the crest value of the pulsed laser light outputted from the laser system may become a required constant value.
COPYRIGHT: (C)2005,JPO&NCIPI

15. 发明专利

JP2007206641A Repair device and method 审中-公开
标题翻译：维修装置和方法
公开(公告)号：JP2007206641A
公开(公告)日：2007-08-16
申请号：JP2006028764
申请日：2006-02-06
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： OKANO AKIHIKO
IPC分类号： G09F9/00 , G01R31/00 , G02F1/13 , G02F1/1345 , G02F1/1368
摘要： PROBLEM TO BE SOLVED: To provide a repair device capable of detecting and repairing a defect while performing efficient access to the whole region of electric lines on an LCD substrate without detaching and re-attaching the substrate. SOLUTION: A main gantry 3 and a sub gantry 9 which are movable in the Y-axis direction according to guides 2 are disposed on a surface plate 1 and an optical system 4 which performs repair working and is movable in the X-axis direction is attached to the main gantry 3. The LCD substrate 6 as a body to be inspected is disposed on a moving holder 50. Probe sensor heads 10a, 10b which are movable in the X-axis direction and are rotatable in the XY-flat plane are attached to the main gantry 3 and the sub gantry 9. Each probe sensor head is constituted such that a probe part of supplying an electric current to an electrode and a sensor part of determining open/short defect by detecting the electric current supplied to the line are integrally formed. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供能够检测和修复缺陷的修复装置，同时在不剥离和重新附接基板的同时有效地访问LCD基板上的电线的整个区域。解决方案：根据引导件2可沿Y轴方向移动的主机架3和子台架9设置在表面板1和执行维修工作并可在X轴方向上移动的光学系统4，轴检测头10a，10b可以在X轴方向上移动并且能够在XY-轴方向上旋转。作为检查体的LCD基板6设置在移动保持器50上。平面被安装在主机架3和子台架9上。每个探针传感器头构成为通过检测供给的电流使向电极供给电流的探针部分和确定开/短缺陷的传感器部分到线路是一体形成的。版权所有（C）2007，JPO＆INPIT

16. 发明专利

JP2006225705A GAS WINDOW AND CHEMICAL VAPOR DEPOSITION APPARATUS 审中-公开
公开(公告)号：JP2006225705A
公开(公告)日：2006-08-31
申请号：JP2005039841
申请日：2005-02-16
申请人： LASERFRONT TECHNOLOGIES INC
发明人： TSUKAGOSHI MASAYUKI , CHIGA SHINJI
IPC分类号： C23C16/48
摘要： PROBLEM TO BE SOLVED: To provide a gas window which hardly adsorbs a substrate and is superior in productivity, and to provide a chemical vapor deposition apparatus. SOLUTION: This gas window comprises: an irradiation section 3 with a laser formed in the center; a source gas feed section provided with a source gas outlet 4a which is arranged in the vicinity of the irradiation section and supplies a source gas 8 onto a substrate 10; a gas-sucking section which is arranged on a substrate 10 side of the gas window and is provided with annular grooves 5 and 6 that are formed so as to surround the irradiation section 3 and the source gas outlet 4a, and communicate with an outlet of the sucked gas; and a rib 7 which forms a periphery of the annular groove 6 in the gas-sucking section, and has four crossing grooves 7a to 7d penetrating from the inner side to the outer side formed at regular spaces on its surface. COPYRIGHT: (C)2006,JPO&NCIPI

17. 发明专利

JP2006049384A Gantry xy stage 审中-公开
标题翻译： GANTRY XY阶段
公开(公告)号：JP2006049384A
公开(公告)日：2006-02-16
申请号：JP2004224773
申请日：2004-07-30
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： IWANAGA KOJI , MITOBE KAZUHIKO
IPC分类号： H01L21/68 , B23K26/08 , B23Q1/01 , G01N21/84 , G02B7/00 , G03F7/20
CPC分类号： G03F7/70716 , B23K26/0876 , G02B7/005
摘要： PROBLEM TO BE SOLVED: To provide a gantry XY stage, where vibration following the travel of a gantry is small. SOLUTION: Nine anti-vibration mounts 5 are provided on a trestle 4, and a stone surface plate 6 is provided on it. Then, a pair of guide bases 7 is provided on the stone surface plate 6, and a pair of posts 12 comprising CFRP is provided on it so that the pair of posts 12 can travel in the Y direction to the stone surface plate 6. And a beam 14 comprising CFRP is provided between the pair of ports 12 in a stretched manner. Further, a movable base 18 is provided movably in the X direction to the beam 14, and a laser optical unit 20 is mounted on the movable base 18. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种台架XY台架，其中台架的行驶后的振动小。解决方案：在支架4上设置九个防振支架5，并在其上设置石材平板6。然后，在石材表面板6上设置一对导向基座7，在其上设置有包括CFRP的一对支柱12，使得一对支柱12能够沿Y方向行进到石材平板6。包括CFRP的梁14以拉伸的方式设置在一对端口12之间。此外，可移动基座18沿X方向可动地设置到梁14上，激光光学单元20安装在可移动基座18上。（C）2006年，JPO＆NCIPI

18. 发明专利

JP2005195064A Machine table vibration preventing device, and vibration preventing method 审中-公开
标题翻译：机台振动预防装置及振动预防方法
公开(公告)号：JP2005195064A
公开(公告)日：2005-07-21
申请号：JP2004000540
申请日：2004-01-05
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： OKANO AKIHIKO
IPC分类号： F16M7/00 , F16F15/02
摘要： PROBLEM TO BE SOLVED: To prevent vibration of a machine table used as a movable member for a variety of machines generated at the time of acceleration or deceleration.
SOLUTION: This device is provided with a computation circuit 22 to determine an acceleration speed signal to be outputted based on a machine table acceleration/deceleration instruction signal, and an active damper drive circuit 23 to output a control signal corresponding to the acceleration signal inputted from the computation circuit to an active damper. By active damper braking force based on the control signal from the active damper drive circuit 23, vibration of the machine table at the time of acceleration or deceleration is controlled to prevent vibration.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了防止在加速或减速时产生的用于各种机器的可移动部件的机台的振动。解决方案：该装置设置有计算电路22，用于基于机床加速/减速指令信号确定要输出的加速度速度信号，以及主动阻尼器驱动电路23，输出与加速度相对应的控制信号信号从计算电路输入到主动阻尼器。通过基于来自主动阻尼器驱动电路23的控制信号的主动阻尼器制动力，控制加速或减速时的机床的振动，以防止振动。版权所有（C）2005，JPO＆NCIPI

19. 发明专利

JP2005158902A Laser diode array, laser oscillator and laser processing apparatus 审中-公开
标题翻译：激光二极管阵列，激光振荡器和激光加工设备
公开(公告)号：JP2005158902A
公开(公告)日：2005-06-16
申请号：JP2003393062
申请日：2003-11-21
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： MORITA HIROYUKI
IPC分类号： H01S3/00 , H01S3/094 , H01S5/022 , H01S5/024 , H01S5/40
摘要： PROBLEM TO BE SOLVED: To provide a laser diode array capable of enhancing the yield in an LD bar sorting work and capable of enhancing the pumping efficiency of a laser without introducing a large scale system, and to provide a laser oscillator and laser processing apparatus. SOLUTION: A plurality of LD bars 2 are soldered to a plurality of heat sinks 1 provided with a refrigerant channel 1a, respectively, and cooling the LD bars 2 individually. The heat sink 1 is fixed to a manifold 3 provided with supply channels 6a-6f having a different conduction cross-sectional area of refrigerant 13 for respective fixing parts 3a-3f. A heat sink 1 mounting an LD bar 2 having an oscillation wavelength shifted to the short wavelength side is fixed to the fixing part 3f provided with the supply channel 6f having a small conduction cross-sectional area, and a heat sink 1 fixed with an LD bar 2 having an oscillation wavelength shifted to the long wavelength side is fixed to the fixing part 3a provided with the supply channel 6a having a large conduction cross-sectional area. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种激光二极管阵列，能够提高LD条分选工作的产量，并且能够提高激光器的泵送效率而不引入大规模系统，并提供激光振荡器和激光器处理装置。解决方案：将多个LD条2分别焊接到设置有制冷剂通道1a的多个散热器1，并分别冷却LD条2。散热器1固定到具有用于相应的固定部分3a-3f的具有不同制冷剂传导截面面积的供应通道6a-6f的歧管3。将具有移动到短波长侧的振荡波长的LD条2的散热器1固定到具有导电截面积小的供给通道6f的固定部3f和固定有LD的散热器1 具有移动到长波长侧的振荡波长的条2固定到设置有具有大的导通截面积的供应通道6a的固定部分3a。版权所有（C）2005，JPO＆NCIPI

20. 发明专利

JP2005144524A Laser beam machining device 审中-公开
标题翻译：激光加工设备
公开(公告)号：JP2005144524A
公开(公告)日：2005-06-09
申请号：JP2003388780
申请日：2003-11-19
申请人： Laserfront Technologies Inc , レーザーフロントテクノロジーズ株式会社
发明人： NAGANO TSUYOSHI
IPC分类号： B23K26/06 , B23K26/073 , H01S3/00
摘要： PROBLEM TO BE SOLVED: To provide a laser beam machining device capable of preventing the unevenness of machining due to use of a laser beam source deteriorated in beam quality and the sagging at a machining edge due to use of an inexpensive laser beam source. SOLUTION: In the laser beam machining device 10 which reduces an image of a slit 15 through a third lens 16 and a fourth lens 17 and forms the image on a work 18, the laser beam from the laser beam source 11 is made incident on the slit 15 through a first lens 12 which perform Fourier transform, a transmission type phase amplitude modulator 13 (or a reflection type phase amplitude modulator 23) and a second lens 14 which performs reverse Fourie transform. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种激光束加工装置，其能够防止由于使用劣化的光束质量的激光束源的加工不均匀性和由于使用廉价的激光束源而在加工边缘处的下垂。解决方案：在通过第三透镜16和第四透镜17减小狭缝15的图像并在工件18上形成图像的激光束加工装置10中，制造来自激光束源11的激光束通过执行傅立叶变换的第一透镜12，透射型相位幅度调制器13（或反射型相位振幅调制器23）和进行反向傅里叶变换的第二透镜14在狭缝15上入射。版权所有（C）2005，JPO＆NCIPI

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