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11. 发明申请

WO2014197611A1 ANALOG INTEGRATOR SYSTEM AND METHOD 审中-公开
标题翻译：模拟集成系统和方法
公开(公告)号：WO2014197611A1
公开(公告)日：2014-12-11
申请号：PCT/US2014/040929
申请日：2014-06-04
申请人： EAGLE HARBOR TECHNOLOGIES, INC.
发明人： ZIEMBA, Timothy , MILLER, Kenneth E. , CARSCADDEN, John G. , PRAGER, James , SLOBODOV, Ilia , LOTZ, Daniel Edward
IPC分类号： G06G7/00
CPC分类号： G06G7/18
摘要： Systems and methods are disclosed to integrate signals. Some embodiments include an integrator comprising an active input; a passive input; a first integrator having a first integrator input and a first integrator output; a second integrator having a second integrator input and a second integrator output; a first plurality of switches coupled with the first integrator input, the second integrator input, the active input, and the passive input; a second plurality of switches coupled with the first integrator output and the second integrator output; and a controller. The controller may be configured to control the operation of the first plurality of switches to switch the active input between the first integrator input and the second integrator input, and control the operation of the first plurality of switches to switch the passive input between the first integrator input and the second integrator input.
摘要翻译：公开了系统和方法来集成信号。一些实施例包括包括有源输入的积分器; 被动输入具有第一积分器输入和第一积分器输出的第一积分器; 具有第二积分器输入和第二积分器输出的第二积分器; 与第一积分器输入，第二积分器输入，有源输入和无源输入耦合的第一多个开关; 与第一积分器输出和第二积分器输出耦合的第二多个开关; 和控制器。控制器可以被配置为控制第一多个开关的操作以在第一积分器输入和第二积分器输入之间切换有效输入，并且控制第一多个开关的操作以在第一积分器之间切换无源输入输入和第二个积分器输入。

12. 发明申请

WO2021134000A1 NANOSECOND PULSER RF ISOLATION FOR PLASMA SYSTEMS 审中-公开
公开(公告)号：WO2021134000A1
公开(公告)日：2021-07-01
申请号：PCT/US2020/066990
申请日：2020-12-23
申请人： EAGLE HARBOR TECHNOLOGIES, INC.
发明人： ZIEMBA, Timothy , MILLER, Kenneth
IPC分类号： H01J37/32 , H01J37/34 , H01L21/44 , H05H1/42 , H05H1/46 , H01J37/32146 , H01J37/32495 , H01L21/6831 , H03H7/0115
摘要： Embodiments of the invention include a plasma system. The plasma system includes a plasma chamber; an RE driver configured to drive bursts into the plasma chamber with an RE frequency; a nanosecond pulser configured to drive pulses into the plasma chamber with a pulse repetition frequency, the pulse repetition frequency being less than the RE frequency; a high pass filter disposed between the RE driver and the plasma chamber; and a low pass filter disposed between the nanosecond pulser and the plasma chamber.

13. 发明申请

WO2020146436A1 EFFICIENT ENERGY RECOVERY IN A NANOSECOND PULSER CIRCUIT 审中-公开
公开(公告)号：WO2020146436A1
公开(公告)日：2020-07-16
申请号：PCT/US2020/012641
申请日：2020-01-08
申请人： EAGLE HARBOR TECHNOLOGIES, INC.
发明人： PRAGER, James , ZIEMBA, Timothy , MILLER, Kenneth , SLOBODOV, Ilia , QUINLEY, Morgan
IPC分类号： H03K3/01 , H03K3/02 , H03K3/021 , H03K3/53 , H03K3/57 , H03K17/80
摘要： Some embodiments include a nanosecond pulser circuit. In some embodiments, a nanosecond pulser circuit may include: a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an energy recovery circuit electrically coupled with the secondary side of the transformer. In some embodiments, the energy recovery circuit comprises: an inductor electrically coupled with the high voltage power supply; a crowbar diode arranged in parallel with the secondary side of the transformer; and a second diode disposed in series with the inductor and arranged to conduct current from a load to the high voltage power supply.

14. 发明申请

WO2022072947A1 ION CURRENT DROOP COMPENSATION 审中-公开
公开(公告)号：WO2022072947A1
公开(公告)日：2022-04-07
申请号：PCT/US2021/053436
申请日：2021-10-04
申请人： EAGLE HARBOR TECHNOLOGIES, INC.
发明人： BOWMAN, Christopher , LISTON, Connor , MILLER, Kenneth , ZIEMBA, Timothy
IPC分类号： H03K3/017 , H03K3/64 , H03K3/78 , H01J37/34
摘要： A pulse generator is disclosed. The pulse generator includes a DC source; a plurality of switches, a transformer; and a pulsing output. The pulse generator can be coupled with a plasma chamber. The pulsing output outputs high voltage pulses having a peak-to-peak voltage greater than 1 kV and a voltage portion between consecutive high voltage bipolar pulses that has a negative slope that substantially offsets the voltage reduction on a wafer within a plasma chamber due to an ion current. The resulting voltage at the wafer may be substantially flat between consecutive pulses.

15. 发明申请

WO2021231629A1 HIGH FREQUENCY RF GENERATOR AND DC PULSING 审中-公开
公开(公告)号：WO2021231629A1
公开(公告)日：2021-11-18
申请号：PCT/US2021/032063
申请日：2021-05-12
申请人： EAGLE HARBOR TECHNOLOGIES, INC.
发明人： BOWMAN, Christopher , LISTON, Connor , MILLER, Kenneth , ZIEMBA, Timothy
IPC分类号： H01L21/3065 , H05H1/46 , H01J37/32
摘要： A nanosecond pulser system is disclosed. In some embodiments, the nanosecond pulser system may include a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an output electrically coupled with the transformer producing a waveform. In some embodiments, the waveform includes a plurality of high voltage pulses having a pulse amplitude greater than about 2 kV, a pulse width, and a pulse repetition frequency; and a sinusoidal waveform having a waveform frequency and a waveform amplitude greater than 100 V.

16. 发明申请

WO2020243023A1 KLYSTRON DRIVER 审中-公开
公开(公告)号：WO2020243023A1
公开(公告)日：2020-12-03
申请号：PCT/US2020/034427
申请日：2020-05-23
申请人： EAGLE HARBOR TECHNOLOGIES, INC.
发明人： PRAGER, James , ZIEMBA, Timothy , MILLER, Kenneth , CARSCADDEN, John , HENSON, Alex , WILSON, Steven
IPC分类号： H03F3/56 , G05F1/46 , H03F3/189 , H02M7/02 , H02M7/10
摘要： Some embodiments include a resonant converter klystron driver. A resonant converter klystron driver, for example, may include an input power supply; a full -bridge circuit coupled with the input power supply; a resonant circuit coupled with the full-bridge; a step-up transformer coupled with the resonant circuit; a rectifier coupled with a step-up transformer; a filter stage coupled with the rectifier; and an output coupled with the filter stage. In some embodiments, the output could be coupled with a klystron.

17. 发明申请

WO2020146436A9 EFFICIENT ENERGY RECOVERY IN A NANOSECOND PULSER CIRCUIT 审中-公开
公开(公告)号：WO2020146436A9
公开(公告)日：2020-07-16
申请号：PCT/US2020/012641
申请日：2020-01-08
申请人： EAGLE HARBOR TECHNOLOGIES, INC.
发明人： PRAGER, James , ZIEMBA, Timothy , MILLER, Kenneth , SLOBODOV, Ilia , QUINLEY, Morgan
IPC分类号： H03K3/01 , H03K3/02 , H03K3/021 , H03K3/53 , H03K3/57 , H03K17/80
摘要： Some embodiments include a nanosecond pulser circuit. In some embodiments, a nanosecond pulser circuit may include: a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an energy recovery circuit electrically coupled with the secondary side of the transformer. In some embodiments, the energy recovery circuit comprises: an inductor electrically coupled with the high voltage power supply; a crowbar diode arranged in parallel with the secondary side of the transformer; and a second diode disposed in series with the inductor and arranged to conduct current from a load to the high voltage power supply.

18. 发明申请

WO2020112921A1 VARIABLE OUTPUT IMPEDANCE RF GENERATOR 审中-公开
公开(公告)号：WO2020112921A1
公开(公告)日：2020-06-04
申请号：PCT/US2019/063477
申请日：2019-11-27
申请人： EAGLE HARBOR TECHNOLOGIES, INC.
发明人： PRAGER, James , ZIEMBA, Timothy
IPC分类号： H02M1/42 , H02M9/06 , H02M9/02 , H02M9/04
摘要： Various RF plasma systems are disclosed that do not require a matching network. In some embodiments, the RF plasma system includes an energy storage capacitor; a switching circuit coupled with the energy storage capacitor, the switching circuit producing a plurality of pulses with a pulse amplitude and a pulse frequency, the pulse amplitude being greater than 100 volts; a resonant circuit coupled with the switching circuit. In some embodiments, the resonant circuit includes: a transformer having a primary side and a secondary side; and at least one of a capacitor, an inductor, and a resistor. In some embodiments, the resonant circuit having a resonant frequency substantially equal to the pulse frequency, and the resonant circuit increases the pulse amplitude to a voltage greater than 2 kV.

19. 发明申请

WO2020033931A1 PLASMA SHEATH CONTROL FOR RF PLASMA REACTORS 审中-公开
公开(公告)号：WO2020033931A1
公开(公告)日：2020-02-13
申请号：PCT/US2019/046067
申请日：2019-08-09
申请人： EAGLE HARBOR TECHNOLOGIES, INC.
发明人： SLOBODOV, Ilia , ZIEMBA, Timothy , MILLER, Kenneth , PRAGER, James
IPC分类号： H03K3/57
摘要： Some embodiments include a plasma sheath control system that includes an RF power supply producing an A sinusoidal waveform with a frequency greater than 20 kHz and a peak voltage greater than 1 kV and a plasma chamber electrically coupled with the RF power supply, the plasma chamber having a plurality of ions that are accelerated into a surface disposed with energies greater than about 1 kV, and the plasma chamber produces a plasma sheath within the plasma chamber from the sinusoidal waveform. The plasma sheath control system includes a blocking diode electrically connected between the RF power supply and the plasma chamber and a capacitive discharge circuit electrically coupled with the RF power supply, the plasma chamber, and the blocking diode; the capacitive discharge circuit discharges capacitive charges within the plasma chamber with a peak voltage greater than 1 kV and a discharge time that less than 250 nanoseconds.

20. 发明申请

WO2020023974A1 NANOSECOND PULSER PULSE GENERATION 审中-公开
公开(公告)号：WO2020023974A1
公开(公告)日：2020-01-30
申请号：PCT/US2019/043988
申请日：2019-07-29
申请人： EAGLE HARBOR TECHNOLOGIES, INC.
发明人： SLOBODOV, Ilia , ZIEMBA, Timothy , CARSCADDEN, John , MILLER, Kenneth , YEAGER, Huatsern , HANSON, Eric , YEAGER, TaiSheng , MUGGLI, Kevin , QUINLEY, Morgan , LISTON, Connor
IPC分类号： H05H1/24 , H01J37/32 , C01B13/11 , C01B13/10 , H03K5/13 , H03K3/02 , H03K7/04 , H03K7/06 , H03K7/08 , H03K7/10
摘要： Some embodiments include a high voltage pulsing power supply. A high voltage pulsing power supply may include: a high voltage pulser having an output that provides pulses with an amplitude greater than about 1 kV, a pulse width greater than about 1μs, and a pulse repetition frequency greater than about 20 kHz; a plasma chamber; and an electrode disposed within the plasma chamber that is electrically coupled with the output of the high voltage pulser to produce a pulsing an electric field within the chamber.

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