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11. 发明授权

US07474461B2 Broad band objective having improved lateral color performance 有权
标题翻译：具有改进的侧面颜色性能的宽带物镜
公开(公告)号：US07474461B2
公开(公告)日：2009-01-06
申请号：US11825405
申请日：2007-07-05
申请人： Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
发明人： Yung-Ho Chuang , David R. Shafer , J. Joseph Armstrong
IPC分类号： G02B3/00
CPC分类号： G02B27/0025 , G01N21/8806 , G02B21/02
摘要： A system and method for inspection is disclosed. The design generally employs as many as four design principles, including employing at least one lens from a relatively low dispersion glass, at least one additional lens from an additional material different from the relatively low dispersion glass, generally matching the relatively low dispersion properties of the relatively low dispersion glass. The design also may include at least one further lens from a further material different from and exhibiting a significantly different dispersion power from the relatively low dispersion glass and the additional material. Finally, the design may include lenses positioned to insert a significant amount of color within the objective, a gap, and additional lenses, the gap and additional lenses serving to cancel the color inserted.
摘要翻译：公开了一种用于检查的系统和方法。该设计通常采用多达四个设计原理，包括使用来自相对低色散玻璃的至少一个透镜，来自不同于相对低色散玻璃的附加材料的至少一个附加透镜，通常匹配相对低色散玻璃的相对低的色散特性相对较低的分散玻璃。该设计还可以包括来自与相对低的分散玻璃和附加材料不同并表现出显着不同的色散功率的另外材料的至少一个另外的透镜。最后，设计可以包括定位成在物镜内插入大量颜色的透镜，间隙和附加透镜，间隙和附加透镜用于抵消所插入的颜色。

12. 发明授权

US6064517A High NA system for multiple mode imaging 失效
公开(公告)号：US6064517A
公开(公告)日：2000-05-16
申请号：US46814
申请日：1998-03-24
申请人： Yung-Ho Chuang , David Shafer , Bin-Ming B. Tsai , J. Joseph Armstrong
发明人： Yung-Ho Chuang , David Shafer , Bin-Ming B. Tsai , J. Joseph Armstrong
IPC分类号： G01N21/33 , G02B13/14 , G02B17/08 , G02B21/16 , G03C5/16 , G03F1/00 , G03F1/84 , G03F3/00 , G03F7/20 , H04N5/225 , G02B21/10
CPC分类号： G03F7/7065 , G02B13/12 , G02B13/22 , G02B17/08 , G02B17/0808 , G02B17/0812 , G02B17/0852 , G02B17/0856 , G02B17/0892 , G02B21/16 , G03F1/84 , G03F7/70225 , G03F7/70275 , G03F7/70616
摘要： A system for multiple mode imaging is disclosed herein. The system is a catadioptric system preferably having an NA greater than 0.9, highly corrected for low and high order monochromatic aberrations. This system uses unique illumination entrances and can collect reflected, diffracted, and scattered light over a range of angles. The system includes a catadioptric group, focusing optics group, and tube lens group. The catadioptric group includes a focusing mirror and a refractive lens/mirror element. The focusing optics group is proximate to an intermediate image, and corrects for aberrations from the catadioptric group, especially high order spherical aberration and coma. The tube lens group forms the magnified image. Different tube lens groups can be used to obtain different magnifications, such as a varifocal tube lens group to continuously change magnifications from 20 to 200.times.. Multiple imaging modes are possible by varying the illumination geometry and apertures at the pupil plane. Imaging modes include bright-field, full sky, ring dark-field, inverted ring dark-field, directional dark-field, double dark-field, Manhattan geometry, confocal bright-field, confocal dark-field, conoscopic, etc. Illumination can enter the catadioptric optical system using an auxiliary beamsplitter or mirror, or through the catadioptric group at any angle from 0 to 85 degrees from vertical. Multiple beams at multiple angles may be used for illumination. The high NA catadioptric system can also have a relayed pupil plane, used to select different imaging modes, providing simultaneous operation of different imaging modes, Fourier filtering, and other pupil shaping operations.

13. 发明申请

US20130077086A1 Solid-State Laser And Inspection System Using 193nm Laser 审中-公开
标题翻译：使用193nm激光器的固态激光和检测系统
公开(公告)号：US20130077086A1
公开(公告)日：2013-03-28
申请号：US13558318
申请日：2012-07-25
申请人： Yung-Ho Chuang , Vladimir Dribinski , J. Joseph Armstrong
发明人： Yung-Ho Chuang , Vladimir Dribinski , J. Joseph Armstrong
IPC分类号： G01J3/00 , G02F1/35 , G01N21/47 , H01S3/02 , G01N21/00
CPC分类号： G01N21/9501 , G01J3/10 , G01J3/1256 , G01N2021/8825 , G01N2021/95676 , G02F1/3501 , G02F1/3532 , G02F2001/3507 , G02F2001/354 , G03F1/84 , G03F7/70025 , G03F7/7065 , H01S3/0092 , H01S3/06754 , H01S3/1618 , H01S3/302
摘要： An improved solid-state laser for generating 193 nm light is described. This laser uses the 6th harmonic of a fundamental wavelength near 1160 nm to generate the 193 nm light. The laser mixes the 1160 nm fundamental wavelength with the 5th harmonic, which is at a wavelength of approximately 232 nm. By proper selection of non-linear media, such mixing can be achieved by nearly non-critical phase matching. This mixing results in high conversion efficiency, good stability, and high reliability.
摘要翻译：描述了用于产生193nm光的改进的固态激光器。该激光器使用1160nm附近的基波的6次谐波来产生193nm的光。激光器将1160nm基波长与波长约为232nm的5次谐波混合。通过适当选择非线性介质，可以通过几乎非关键的相位匹配来实现这种混合。这种混合导致高转换效率，良好的稳定性和高可靠性。

14. 发明授权

US07817260B2 Beam delivery system for laser dark-field illumination in a catadioptric optical system 有权
标题翻译：反射折射光学系统激光暗场照明光束传输系统
公开(公告)号：US07817260B2
公开(公告)日：2010-10-19
申请号：US12074405
申请日：2008-03-03
申请人： Yung-Ho Chuang , J. Joseph Armstrong
发明人： Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G01N21/00
CPC分类号： G02B21/10 , G02B17/0856
摘要： A method and apparatus for inspecting a specimen are provided. The apparatus comprises a primary illumination source, a catadioptric objective exhibiting central obscuration that directs light energy received from the primary illumination source at a substantially normal angle toward the specimen, and an optical device, such as a prism or reflective surface, positioned within the central obscuration resulting from the catadioptric objective for receiving further illumination from a secondary illumination source and diverting the further illumination to the specimen. The method comprises illuminating a surface of the specimen at a variety of angles using a primary illumination source, illuminating the surface using a secondary illumination source, the illuminating by the secondary illumination source occurring at a substantially normal angle of incidence; and imaging all reflected, scattered, and diffracted light energy received from the surface onto a detector.
摘要翻译：提供了一种用于检查样本的方法和装置。该装置包括初级照明源，显示中心遮蔽的反折射物镜，其将从主照明源接收的光能以基本上垂直的角度朝向样本引导，以及位于中心内的光学装置，例如棱镜或反射表面由反射折射物镜产生的遮挡，用于接收来自次级照明源的进一步照明并将另外的照明转移到样本。该方法包括使用主照明源以各种角度照射样本的表面，使用次级照明源照亮表面，由次级照明源以基本上正常入射角发生的照明; 并将从表面接收的所有反射，散射和衍射的光能成像到检测器上。

15. 发明授权

US07679842B2 High performance catadioptric imaging system 有权
标题翻译：高性能反射折射成像系统
公开(公告)号：US07679842B2
公开(公告)日：2010-03-16
申请号：US11543519
申请日：2006-10-04
申请人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
发明人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B9/00
CPC分类号： G02B17/0892 , G02B17/0812 , G02B17/0856 , G02B21/04 , G03F7/70225 , G03F7/70341
摘要： A reduced size catadioptric objective and system is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range. Elements are less than 100 mm in diameter. The objective comprises a focusing lens group configured to receive the light energy, at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy from the field lens and form controlled light energy for transmission to a specimen. The Mangin mirror arrangement imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90, and the design may be employed in various environments.
摘要翻译：公开了一种减小尺寸的反射折射物镜和系统。该目的可以通过红外光范围具有在约190纳米范围内的波长的光能。元件的直径小于100毫米。该目的包括被配置为接收光能的聚焦透镜组，至少一个取向为从聚焦透镜组接收聚焦光能并提供中间光能的场透镜，以及设置成接收来自光源的中间光能并且形成用于传输到样本的受控光能。芒格镜配置赋予数值孔径超过0.65并且高达约0.90的受控光能，并且该设计可以用于各种环境中。

16. 发明授权

US07633675B2 Catadioptric imaging system employing immersion liquid for use in broad band microscopy 有权
标题翻译：使用浸没液的反射折射成像系统用于宽带显微镜
公开(公告)号：US07633675B2
公开(公告)日：2009-12-15
申请号：US11999558
申请日：2007-12-05
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
IPC分类号： G02B17/08
CPC分类号： G03F7/70341 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G02B21/04 , G02B21/33 , G03F7/70225
摘要： A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
摘要翻译：公开了一种使用反射折射物镜和浸没物质的缩小尺寸反射折射检查系统。该目的可以通过红外光范围具有在约190纳米范围内的波长的光能，并且可以提供超过0.9的数值孔径。元素的直径小于100毫米，并且可以适合标准显微镜。该目的包括聚焦透镜组，场透镜，Mangin镜布置以及Mangin镜布置和样品之间的浸没物质或液体。还公开了用于反射折射检查系统中的目的的可变焦距光学系统。

17. 发明授权

US07457034B2 High NA system for multiple mode imaging 失效
标题翻译：高NA系统用于多模式成像
公开(公告)号：US07457034B2
公开(公告)日：2008-11-25
申请号：US11406138
申请日：2006-04-14
申请人： Yung-Ho Chuang , David Shafer , Bin-Ming B. Tsai , J. Joseph Armstrong
发明人： Yung-Ho Chuang , David Shafer , Bin-Ming B. Tsai , J. Joseph Armstrong
IPC分类号： G02B23/00 , G02B17/00
CPC分类号： G03F7/7065 , G02B13/12 , G02B13/22 , G02B17/08 , G02B17/0808 , G02B17/0812 , G02B17/0852 , G02B17/0856 , G02B17/0892 , G02B21/16 , G03F1/84 , G03F7/70225 , G03F7/70275 , G03F7/70616
摘要： A system for multiple mode imaging is disclosed. The catadioptric system has an NA greater than 0.65, and preferably greater than 0.9, highly corrected for low and high order monochromatic aberrations. The system employs unique illumination entrances and optics to collect reflected, diffracted, and scattered light over a range of angles. Multiple imaging modes are possible by varying the illumination geometry and apertures at the pupil plane. Illumination can enter the catadioptric optical system using an auxiliary beamsplitter or mirror, or through the catadioptric elements at any angle from 0 to 85 degrees from vertical. The system may employ a relayed pupil plane, used to select different imaging modes, provide simultaneous operation of different imaging modes, Fourier filtering, and other pupil shaping operations.
摘要翻译：公开了一种用于多模式成像的系统。反折射系统对于低阶和高阶单色像差具有高于0.65，优选大于0.9的NA。该系统采用独特的照明入口和光学器件在一定范围的角度收集反射，衍射和散射光。通过改变光瞳面上的照明几何形状和孔径，可以实现多种成像模式。照明可以使用辅助分光镜或镜子进入反折射光学系统，或者通过反射折射元件以垂直方向从0到85度的角度进入反折射光学系统。该系统可以采用中继的光瞳平面，用于选择不同的成像模式，提供不同成像模式，傅立叶滤波和其他光瞳成形操作的同时操作。

18. 发明申请

US20080247035A1 Catadioptric imaging system employing immersion liquid for use in broad band microscopy 有权
标题翻译：使用浸没液的反射折射成像系统用于宽带显微镜
公开(公告)号：US20080247035A1
公开(公告)日：2008-10-09
申请号：US11999558
申请日：2007-12-05
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
IPC分类号： G02B17/08
CPC分类号： G03F7/70341 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G02B21/04 , G02B21/33 , G03F7/70225
摘要： A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
摘要翻译：公开了一种使用反射折射物镜和浸没物质的缩小尺寸反射折射检查系统。该目的可以通过红外光范围具有在约190纳米范围内的波长的光能，并且可以提供超过0.9的数值孔径。元素的直径小于100毫米，并且可以适合标准显微镜。该目的包括聚焦透镜组，场透镜，Mangin镜布置以及Mangin镜布置和样品之间的浸没物质或液体。还公开了用于反射折射检查系统中的目的的可变焦距光学系统。

19. 发明授权

US07307783B2 Catadioptric imaging system employing immersion liquid for use in broad band microscopy 有权
标题翻译：使用浸没液的反射折射成像系统用于宽带显微镜
公开(公告)号：US07307783B2
公开(公告)日：2007-12-11
申请号：US10812111
申请日：2004-03-29
申请人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
发明人： J. Joseph Armstrong , Yung-Ho Chuang , David R. Shafer
IPC分类号： G02B17/08
CPC分类号： G03F7/70341 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G02B21/04 , G02B21/33 , G03F7/70225
摘要： A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
摘要翻译：公开了一种使用反射折射物镜和浸没物质的缩小尺寸反射折射检查系统。该目的可以通过红外光范围具有在约190纳米范围内的波长的光能，并且可以提供超过0.9的数值孔径。元素的直径小于100毫米，并且可以适合标准显微镜。该目的包括聚焦透镜组，场透镜，Mangin镜布置以及Mangin镜布置和样品之间的浸没物质或液体。还公开了用于反射折射检查系统中的目的的可变焦距光学系统。

20. 发明授权

US08675276B2 Catadioptric imaging system for broad band microscopy 有权
标题翻译：反射折射成像系统用于宽带显微镜
公开(公告)号：US08675276B2
公开(公告)日：2014-03-18
申请号：US10646073
申请日：2003-08-22
申请人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
发明人： David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
IPC分类号： G02B17/00 , G02B21/00 , G02B23/00
CPC分类号： G02B21/04 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G03F7/70225 , G03F7/70341
摘要： A system and method for inspection is disclosed. The design includes an objective employed for use with light energy having a wavelength in various ranges, including approximately 266 to 1000 nm, 157 nm through infrared, and other ranges. The objective includes a focusing lens group having at least one focusing lens configured to receive light, a field lens oriented to receive focused light energy from said focusing lens group and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy from the field lens and form controlled light energy. Each focusing lens has a reduced diameter, such as a diameter of less than approximately 100 mm, and a maximum corrected field size of approximately 0.15 mm. An immersion substance, such as oil, water, or silicone gel, may be employed prior to passing controlled light energy to the specimen inspected.
摘要翻译：公开了一种用于检查的系统和方法。该设计包括用于具有波长在各种范围内的光能的目标，包括大约266至1000nm，157nm至红外线等范围。该目的包括：聚焦透镜组，其具有被配置为接收光的至少一个聚焦透镜;定向成从所述聚焦透镜组接收聚焦光能并提供中间光能的场透镜;以及定位成接收中间光能从现场镜头和形成受控的光能。每个聚焦透镜具有减小的直径，例如小于约100mm的直径，以及大约0.15mm的最大校正场尺寸。在将受控的光能通过检验的样品之前，可以使用浸入物质，例如油，水或硅胶。

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