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11. 发明申请

US20060057761A1 Method for fabricating microstructure and microstructure 有权
标题翻译：微结构和微结构的制作方法
公开(公告)号：US20060057761A1
公开(公告)日：2006-03-16
申请号：US11256959
申请日：2005-10-25
申请人： Xiaoyu Mi , Norinao Kouma , Osamu Tsuboi , Masafumi Iwaki , Hisao Okuda , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
发明人： Xiaoyu Mi , Norinao Kouma , Osamu Tsuboi , Masafumi Iwaki , Hisao Okuda , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
IPC分类号： H01L21/00
CPC分类号： B81C1/00547 , B81B2201/042 , B81B2203/0136 , B81C2201/0132 , B81C2201/0133 , G01P15/0802 , G02B26/0841
摘要： A method of making a microstructure with thin wall portions (T1-T3) includes a step of performing a first etching process to a material substrate having a laminate structure including a first conductive layer (11) and a second conductive layer (12) having a thickness of the thin wall portions (T1-T3), where the etching is performed from the side of the first conductive layer (11) thereby forming in the second conductive layer (12) pre thin wall portions (T1′-T3′) which has a pair of side surfaces apart from each other in an in-plane direction of the second conductive layer (12) and contact the first conductive layer (11). The method also includes a step of performing a second etching process from the side of the first conductive layer (11) for removing part of the first conductive layer (11) contacting the pre thin wall portions (T1′-T3′) to form the thin wall portions.
摘要翻译：制造具有薄壁部分（T 1 -T 3）的微结构的方法包括对具有包括第一导电层（11）和第二导电层（12）的层压结构的材料基板进行第一蚀刻工艺的步骤，具有薄壁部分（T 1 -T 3）的厚度，其中从第一导电层（11）的侧面进行蚀刻，从而在第二导电层（12）中形成预薄壁部分（T 1' -T 3'），其在第二导电层（12）的面内方向上具有彼此分离的一对侧表面，并与第一导电层（11）接触。该方法还包括从第一导电层（11）侧进行第二蚀刻处理以去除与预薄壁部分（T 1'-T 3'）接触的第一导电层（11）的一部分的步骤形成薄壁部分。

12. 发明授权

US06887396B2 Micromirror unit and method of making the same 有权
标题翻译：微镜单元及其制作方法
公开(公告)号：US06887396B2
公开(公告)日：2005-05-03
申请号：US09950710
申请日：2001-09-13
申请人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Fumio Yamagishi
发明人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Fumio Yamagishi
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08 , G11B7/09 , C03C15/00
CPC分类号： B81C1/00142 , B81B3/0078 , B81B2201/042 , B81B2201/045 , B81B2203/0136 , B81B2203/0181 , B81B2203/058 , B81C1/00396 , G02B26/0841 , Y10S359/904
摘要： A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.
摘要翻译：提供了一种用于制造微镜单元的方法，该微镜单元包括框架，反射镜形成基座和将框架连接到反射镜形成基座的桥。该方法包括以下步骤。首先，在基板上形成第一掩模图案，以掩蔽基板的被加工成框架和反射镜形成基座的部分。然后，在衬底上形成第二掩模图案，用于掩蔽加工成桥的衬底部分。然后，以第一和第二掩模图形作为掩模装置对基板进行第一蚀刻处理。然后，选择性地去除第二掩模图案。然后，以第一掩模图案作为掩模装置对基板进行第二蚀刻处理。最后，删除第一个掩模图案。

13. 发明授权

US06817725B2 Micro mirror unit and method of making the same 有权
标题翻译：微镜单元及其制作方法
公开(公告)号：US06817725B2
公开(公告)日：2004-11-16
申请号：US10327855
申请日：2002-12-26
申请人： Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
发明人： Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
IPC分类号： G02B7182
CPC分类号： G02B26/0841 , B81B2201/045 , B81B2203/0136 , B81C1/00182 , B81C2203/0109 , Y10S359/904
摘要： A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.
摘要翻译：微镜单元包括承载镜部分的移动部分，框架和将移动部件连接到框架的扭杆。移动部件，框架和扭杆从材料基板形成为一体。框架包括比移动部分更厚的部分。

14. 发明授权

US06723659B2 Micromirror unit fabrication method and micromirror unit made by the same 有权
标题翻译：微镜单元制造方法和由其制成的微镜单元
公开(公告)号：US06723659B2
公开(公告)日：2004-04-20
申请号：US09995588
申请日：2001-11-29
申请人： Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Norinao Kouma
发明人： Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Norinao Kouma
IPC分类号： H01L21302
CPC分类号： G02B26/0841 , B01D53/885 , B01J8/0453 , B01J8/0496 , B01J2208/00212 , B01J2208/00309 , B01J2208/025 , B81B2201/045 , B81B2203/0136 , B81C1/00142 , B81C1/00626 , B81C2201/0142 , C01B3/16 , C01B2203/0288 , C01B2203/045 , C01B2203/0485 , Y10S359/904
摘要： A method of making a micromirror unit is provided. In accordance with the method, a micromirror unit is made from a material substrate having a multi-layer structure composed of silicon layers and at least one intermediate layer. The resulting micromirror unit includes a mirror forming base, a frame and a torsion bar. The method includes the following steps. First, a pre-torsion bar is formed by subjecting one of the silicon layers to etching. The obtained pre-torsion bar is rendered smaller in thickness than the mirror forming base and is held in contact with the intermediate layer. Then, the desired torsion bar is obtained by removing the intermediate layer contacting with the pre-torsion bar.
摘要翻译：提供了制造微镜单元的方法。根据该方法，微镜单元由具有由硅层和至少一个中间层构成的多层结构的材料基板制成。所得到的微镜单元包括反射镜形成基座，框架和扭杆。该方法包括以下步骤。首先，通过使一个硅层进行蚀刻来形成预扭杆。所获得的预扭杆的厚度比反射镜形成基座的厚度小，并与中间层保持接触。然后，通过去除与预扭杆接触的中间层来获得所需的扭力杆。

15. 发明申请

US20100231087A1 Micro oscillating element 有权
标题翻译：微振荡元件
公开(公告)号：US20100231087A1
公开(公告)日：2010-09-16
申请号：US12659975
申请日：2010-03-26
申请人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
发明人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
IPC分类号： H02N11/00
CPC分类号： H02N1/008 , G02B26/0841
摘要： A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends from the functional section. The first comb-tooth electrode includes first electrode teeth extending from the arm section in a direction intersecting the arm section. The micro oscillating element further includes a second comb-tooth electrode to cooperate with the first comb-tooth electrode for causing the oscillation section to oscillate about an oscillation axis defined by the torsional joining section. The second comb-tooth, electrode includes second electrode teeth extending from the frame in a direction intersecting the arm section.
摘要翻译：微振荡元件包括框架和经由扭转接合部分连接到框架的振荡部分。振荡部包括可动功能部，臂部和第一梳齿电极。臂部分从功能部分延伸。第一梳齿电极包括从臂部沿与臂部相交的方向延伸的第一电极齿。微振荡元件还包括第二梳齿电极，与第一梳齿电极配合，用于使振动部分围绕由扭转接合部分限定的摆动轴线摆动。第二梳齿电极包括从框架沿与臂部相交的方向延伸的第二电极齿。

16. 发明授权

US07459331B2 Micro mirror unit and method of making the same 有权
标题翻译：微镜单元及其制作方法
公开(公告)号：US07459331B2
公开(公告)日：2008-12-02
申请号：US11589075
申请日：2006-10-30
申请人： Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
发明人： Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
IPC分类号： H01L21/00
CPC分类号： G02B26/0841 , B81B2201/045 , B81B2203/0136 , B81C1/00182 , B81C2203/0109 , Y10S359/904
摘要： A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.
摘要翻译：微镜单元包括承载镜部分的移动部分，框架和将移动部件连接到框架的扭杆。移动部件，框架和扭杆从材料基板形成为一体。框架包括比移动部分更厚的部分。

17. 发明授权

US07161274B2 Micro-oscillation element having two rotational axes that are non-orthogonal to each other 失效
标题翻译：微振动元件具有彼此不正交的两个旋转轴
公开(公告)号：US07161274B2
公开(公告)日：2007-01-09
申请号：US10790762
申请日：2004-03-03
申请人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
发明人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
IPC分类号： H02N1/00 , G02B26/08
CPC分类号： H02N1/008
摘要： A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.
摘要翻译：微振荡元件包括可移动主体部分，第一框架和第二框架，以及第一连接部分，其连接可移动主体部分和第一框架，并且限定第一旋转轴线用于可移动主体的第一旋转操作相对于第一帧的截面。元件还包括第二连接部分，其连接第一框架和第二框架并且限定第二旋转轴线用于第一框架和可移动主体部分相对于第二框架的第二旋转操作。第一驱动机构被提供用于产生用于第一旋转操作的驱动力。提供第二驱动机构用于产生用于第二旋转操作的驱动力。第一旋转轴线和第二旋转轴线不正交。

18. 发明申请

US20060119216A1 Micro oscillating element 审中-公开
标题翻译：微振荡元件
公开(公告)号：US20060119216A1
公开(公告)日：2006-06-08
申请号：US11271959
申请日：2005-11-14
申请人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
发明人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
IPC分类号： G02B26/08 , G02B26/00 , H02N1/00
CPC分类号： H02N1/008 , G02B26/0841
摘要： A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends from the functional section. The first comb-tooth electrode includes first electrode teeth extending from the arm section in a direction intersecting the arm section. The micro oscillating element further includes a second comb-tooth electrode to cooperate with the first comb-tooth electrode for causing the oscillation section to oscillate about an oscillation axis defined by the torsional joining section. The second comb-tooth electrode includes second electrode teeth extending from the frame in a direction intersecting the arm section.
摘要翻译：微振荡元件包括框架和经由扭转接合部分连接到框架的振荡部分。振荡部包括可动功能部，臂部和第一梳齿电极。臂部分从功能部分延伸。第一梳齿电极包括从臂部沿与臂部相交的方向延伸的第一电极齿。微振荡元件还包括与第一梳齿电极配合的第二梳齿电极，用于使振动部分围绕由扭转接合部分限定的摆动轴线振荡。第二梳齿电极包括从框架沿与臂部相交的方向延伸的第二电极齿。

19. 发明授权

US07038830B2 Micro-oscillation element 有权
标题翻译：微振荡元件
公开(公告)号：US07038830B2
公开(公告)日：2006-05-02
申请号：US10926053
申请日：2004-08-26
申请人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
发明人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
IPC分类号： G02B26/08 , G02B26/00
CPC分类号： G02B26/0841
摘要： A micro-oscillation element includes a frame, a movable functional part, a driving mechanism, a beam extending from the functional part to the driving mechanism, and a torsion connector for connecting the frame and the beam to each other. The connector defines a rotational axis about which the functional part rotates. The rotational axis crosses the longitudinal direction of the beam. The beam is shorter than the functional part in the longitudinal direction of the rotational axis.
摘要翻译：微振荡元件包括框架，可动功能部件，驱动机构，从功能部件延伸到驱动机构的梁，以及用于将框架和梁彼此连接的扭转连接器。连接器限定了功能部件绕其旋转的旋转轴线。旋转轴线与梁的纵向方向交叉。光束比旋转轴的纵向方向上的功能部分短。

20. 发明申请

US20050277217A1 Method for manufacturing micro-structural unit 有权
公开(公告)号：US20050277217A1
公开(公告)日：2005-12-15
申请号：US11207871
申请日：2005-08-22
申请人： Norinao Kouma , Osamu Tsuboi , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
发明人： Norinao Kouma , Osamu Tsuboi , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
IPC分类号： B81C1/00 , B81B3/00 , H01L21/00 , H01L29/84
CPC分类号： B81C1/00626 , B81B2201/0235 , B81B2201/042 , B81B2203/0136 , B81B2203/04
摘要： A method for manufacturing a micro-structural unit is provided. By the method, micro-machining is performed on a material substrate including first through third conductive layers and two insulating layers, one of which is interposed between the first and the second conductive layers, and the other between the second and the third conductive layers. The method includes several etching steps performed on the layers of the material substrate that are different in thickness.

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