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    • 20. 发明授权
    • Handling device and handling method of quartz glass crucible
    • 石英玻璃坩埚的处理装置及处理方法
    • US08585346B2
    • 2013-11-19
    • US12804479
    • 2010-07-21
    • Manabu ShonaiTaira SatoMinoru ShirakawaHiroshi TakahashiShuichi Ikehata
    • Manabu ShonaiTaira SatoMinoru ShirakawaHiroshi TakahashiShuichi Ikehata
    • B23Q1/52B65G47/90
    • B65G47/90B65G47/248C30B15/00C30B15/10C30B35/005
    • An object of the present invention is to provide a crucible handling device that can firmly sandwich and reliably move a quartz glass crucible under a clean environment and a method of handling a quartz glass crucible using the crucible handling device. The present invention provides a crucible handling device 1 for handling a quartz glass crucible 5, the device including: a frame 4 having a beam 2 extending in a horizontal direction and a pair of arms 3 protruding from the beam 2 in a direction perpendicular to a central axis line direction of the beam 2 such that at least one of the arms 3 is able to move in the central axis line direction of the beam 2; a pair of sandwiching means 6 assembled with the pair of the arm 3 to face each other, for sandwiching a body 50 of the quartz glass crucible 5 in a radial direction of the crucible; engagement means 7 provided adjacent to each sandwiching means 6 and formed by a pair of tongues 70 movable to approach or be separated from each other in a central axis direction of the crucible, for sandwiching and holding the quartz glass crucible 5 therebetween in the central axis direction of the crucible; and driving means 8 for causing the sandwiching means 6 and the engagement means 7 to reciprocate along the arm 3. The present invention also provides a method of handling a quartz glass crucible using such a device 1 as described above.
    • 本发明的目的在于提供一种能够在清洁环境下牢固地夹持和可靠地移动石英玻璃坩埚的坩埚处理装置以及使用坩埚处理装置处理石英玻璃坩埚的方法。 本发明提供了一种用于处理石英玻璃坩埚5的坩埚处理装置1,该装置包括:框架4,其具有沿水平方向延伸的梁2和一对臂3,梁3沿垂直于水平方向的方向从梁2突出 梁2的中心轴线方向使得臂3中的至少一个能够在梁2的中心轴线方向上移动; 一对夹持装置6与一对臂3组装成彼此面对,用于将石英玻璃坩埚5的主体50沿坩埚的径向夹持; 接合装置7设置在每个夹持装置6附近,并且由一对舌片70形成,舌片70可在坩埚的中心轴线方向上相互接近或分离,用于将石英玻璃坩埚5夹在中间轴线 坩埚的方向; 以及用于使夹持装置6和接合装置7沿着臂3往复运动的驱动装置8.本发明还提供了使用如上所述的装置1来处理石英玻璃坩埚的方法。