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    • 14. 发明授权
    • Process for the removal of resist material
    • 去除抗蚀材料的方法
    • US06245188B1
    • 2001-06-12
    • US09348834
    • 1999-07-08
    • Eiji ToyodaMakoto NamikawaTakuji Okeyui
    • Eiji ToyodaMakoto NamikawaTakuji Okeyui
    • B32B3500
    • G03F7/42B08B7/0028Y10S156/922Y10T156/11Y10T156/1147Y10T156/1179
    • The present invention provides a process for the peeling of a resist material with a pressure-sensitive adhesive sheet which involves the improvement in the removal of resist material or the enhancement of peelability of resist material to certainly remove the resist material from the object regardless of the properties or treated state of the resist material. The process comprises (1) after the application of the pressure-sensitive adhesive sheet, effecting a stress-imparting treatment which causes shrinkage or expansion of the pressure-sensitive adhesive sheet so that a stress develops at the interface between the resist material and the object or (2) prior to the application of the resist material to the object, effecting surface treatment to the object such that the surface of the object has a surface free energy of to not greater than 60 dyne/cm.
    • 本发明提供一种用压敏粘合片剥离抗蚀剂材料的方法,该方法涉及抗蚀剂材料的去除改进或抗蚀剂材料的剥离性的提高,以确保从物体上除去抗蚀剂材料,而不管 性质或抗蚀剂材料的处理状态。 该方法包括(1)在施加压敏粘合片之后,进行应力赋予处理,使压敏粘合片收缩或膨胀,使得在抗蚀剂材料和物体之间的界面产生应力 或(2)在将抗蚀剂材料施加到物体之前,对物体进行表面处理,使得物体的表面具有不大于60达因/厘米3的表面自由能。
    • 18. 发明授权
    • Process for the removal of resist material
    • 去除抗蚀材料的方法
    • US06565704B2
    • 2003-05-20
    • US09833812
    • 2001-04-13
    • Eiji ToyodaMakoto NamikawaTakuji Okeyui
    • Eiji ToyodaMakoto NamikawaTakuji Okeyui
    • B32B3500
    • G03F7/42B08B7/0028Y10S156/922Y10T156/11Y10T156/1147Y10T156/1179
    • The present invention provides a process for the peeling of a resist material with a pressure-sensitive adhesive sheet which involves the improvement in the removal of resist material or the enhancement of peelability of resist material to certainly remove the resist material from the object regardless of the properties or treated state of the resist material. The process comprises (1) after the application of the pressure-sensitive adhesive sheet, effecting a stress-imparting treatment which causes shrinkage or expansion of the pressure-sensitive adhesive sheet so that a stress develops at the interface between the resist material and the object or (2) prior to the application of the resist material to the object, effecting surface treatment to the object such that the surface of the object has a surface free energy of to not greater than 60 dyne/cm.
    • 本发明提供一种用压敏粘合片剥离抗蚀剂材料的方法,该方法涉及抗蚀剂材料的去除改进或抗蚀剂材料的剥离性的提高,以确保从物体上除去抗蚀剂材料,而不管 性质或抗蚀剂材料的处理状态。 该方法包括(1)在施加压敏粘合片之后,进行应力赋予处理,使压敏粘合片收缩或膨胀,使得在抗蚀剂材料和物体之间的界面产生应力 或(2)在将抗蚀剂材料施加到物体之前,对物体进行表面处理,使得物体的表面具有不大于60达因/厘米3的表面自由能。