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    • 16. 发明申请
    • CONTINUOUS LIQUID EJECTION USING COMPLIANT MEMBRANE TRANSDUCER
    • 使用合适的膜传感器进行连续液体喷射
    • US20120268529A1
    • 2012-10-25
    • US13089594
    • 2011-04-19
    • Michael F. BaumerJames D. HuffmanHrishikesh V. PanchawaghJeremy M. GraceYonglin XieQing YangDavid P. TrauernichtJohn A. Lebens
    • Michael F. BaumerJames D. HuffmanHrishikesh V. PanchawaghJeremy M. GraceYonglin XieQing YangDavid P. TrauernichtJohn A. Lebens
    • B41J2/04
    • B41J2/03B41J2002/14346
    • A method of continuously ejecting liquid includes providing a liquid ejection system that includes a substrate and an orifice plate affixed to the substrate. Portions of the substrate define a liquid chamber. The orifice plate includes a MEMS transducing member. A first portion of the MEMS transducing member is anchored to the substrate. A second portion of the MEMS transducing member extends over at least a portion of the liquid chamber. The second portion of the MEMS transducing member is free to move relative to the liquid chamber. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member and a second portion of the compliant membrane is anchored to the substrate. The compliant membrane includes an orifice. Liquid is provided under a pressure sufficient to eject a continuous jet of the liquid through the orifice located in the compliant membrane of the orifice plate by a liquid supply. A drop of liquid is caused to break off from the liquid jet by selectively actuating the MEMS transducing member which causes a portion of the compliant membrane to be displaced relative to the liquid chamber.
    • 一种连续喷射液体的方法包括提供一种液体喷射系统,其包括基板和固定在基板上的孔板。 衬底的一部分限定了液体室。 孔板包括MEMS换能构件。 MEMS转换构件的第一部分被锚定到基底。 MEMS转换构件的第二部分在液体室的至少一部分上延伸。 MEMS转换构件的第二部分相对于液体腔自由移动。 柔性膜定位成与MEMS换能件接触。 柔性膜的第一部分覆盖MEMS换能构件,并且柔性膜的第二部分锚定到基底。 柔性膜包括孔口。 在足够的压力下提供液体,该压力通过位于孔板的柔顺膜中的孔通过液体供应喷射液体的连续射流。 通过选择性地致动MEMS转换构件使一滴液体从液体射流中脱离,这导致顺应性膜的一部分相对于液体腔移位。
    • 19. 发明申请
    • MEMBRANE MEMS ACTUATOR INCLUDING FLUIDIC IMPEDANCE STRUCTURE
    • 膜式MEMS致动器,其中包括流体阻抗结构
    • US20140307032A1
    • 2014-10-16
    • US13859804
    • 2013-04-10
    • Yonglin XieJames A. Katerberg
    • Yonglin XieJames A. Katerberg
    • B41J2/04
    • B41J2/14064B41J2202/11B41J2202/12
    • A liquid dispenser includes a first liquid chamber including a nozzle and a second liquid chamber. A flexible membrane is positioned to separate and fluidically seal the first liquid chamber and the second liquid chamber. A heater is associated with the second liquid chamber. A liquid supply channel is in fluid communication with the second chamber. A liquid return channel is in fluid communication with the second chamber. A liquid supply provides a liquid that flows continuously from the liquid supply through the liquid supply channel through the second liquid chamber through the liquid return channel and back to the liquid supply. A fluidic impedance structure is positioned in the second liquid chamber between the heater and the liquid return channel.
    • 液体分配器包括包括喷嘴和第二液体室的第一液体室。 定位柔性膜以分离和流体密封第一液体室和第二液体室。 加热器与第二液体室相连。 液体供应通道与第二腔室流体连通。 液体返回通道与第二腔室流体连通。 液体供应提供从液体供应通过液体供应通道通过第二液体室通过液体返回通道连续流动并返回到液体供应的液体。 流体阻抗结构位于加热器和液体返回通道之间的第二液体室中。
    • 20. 发明授权
    • Corrugated membrane MEMS actuator fabrication method
    • 波纹膜MEMS致动器制造方法
    • US08835195B2
    • 2014-09-16
    • US13552721
    • 2012-07-19
    • Yonglin XieWeibin Zhang
    • Yonglin XieWeibin Zhang
    • H01L21/00
    • B41J2/1601B41J2/1607B41J2/1628B41J2/1631B41J2/1639B41J2/1645B81B2201/032B81B2201/052B81C1/00158
    • A MEMS device fabrication method includes providing a substrate and a chamber wall material layer on a first surface of the substrate, the chamber wall material layer including a chamber cavity having a sacrificial material located therein. A mask material is deposited on the chamber wall material layer and the sacrificial material and patterned to form a mask pattern including a plurality of discrete portions. The mask material and some of the sacrificial material are removed to transfer the mask pattern including the plurality of discrete portions to the sacrificial material. A membrane material layer is deposited on the chamber wall material layer and the sacrificial material that includes the transferred mask pattern including the plurality of discrete portions. Some of the substrate and the sacrificial material are removed to release the membrane material layer using at least one process initiated from a second surface of the substrate.
    • MEMS器件制造方法包括在衬底的第一表面上提供衬底和室壁材料层,室壁材料层包括具有位于其中的牺牲材料的腔室腔。 掩模材料沉积在室壁材料层和牺牲材料上并被图案化以形成包括多个离散部分的掩模图案。 去除掩模材料和一些牺牲材料以将包括多个离散部分的掩模图案转移到牺牲材料。 膜材料层沉积在室壁材料层和牺牲材料上,该牺牲材料包括包含多个离散部分的转印掩模图案。 使用从衬底的第二表面引发的至少一种工艺,去除一些衬底和牺牲材料以释放膜材料层。