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11. 发明申请

US20050034529A1 Strain sensors based on nanowire piezoresistor wires and arrays 有权
标题翻译：基于纳米线压敏电阻电线和阵列的应变传感器
公开(公告)号：US20050034529A1
公开(公告)日：2005-02-17
申请号：US10826007
申请日：2004-04-16
申请人： Hongxing Tang , Michael Roukes
发明人： Hongxing Tang , Michael Roukes
IPC分类号： G01B5/28 , G01L1/00 , G01L1/18 , G01L1/20 , G01L19/04 , G01N13/16 , G12B21/08
CPC分类号： G01L1/18 , G01L1/20 , G01N33/54346 , G01N33/54373
摘要： A highly sensitive and ultra-high density array of electromechanical nanowires is fabricated. Nanowires are extremely sensitive to the strain induced by the attachment of biological and chemical species. Real-time detection is realized through piezoresistive transduction from the specially designed materials that form the nanowires. These specially designed materials include doped silicon or germanium, doped III-V semiconductors such as GaAs, GaN and InAs systems, and ultra-thin metal films.
摘要翻译：制造了高灵敏度和超高密度的机电纳米线阵列。纳米线对由生物和化学物质的附着引起的菌株非常敏感。通过形成纳米线的专门设计的材料的压阻传导实现实时检测。这些特殊设计的材料包括掺杂的硅或锗，掺杂的III-V半导体，例如GaAs，GaN和InAs系统，以及超薄金属膜。

12. 发明授权

US06676813B1 Technology for fabrication of a micromagnet on a tip of a MFM/MRFM probe 失效
标题翻译：用于在MFM / MRFM探针的尖端上制造微型磁体的技术
公开(公告)号：US06676813B1
公开(公告)日：2004-01-13
申请号：US10097893
申请日：2002-03-13
申请人： Denis V. Pelekhov , P. Chris Hammel , Geoffrey Nunes, Jr. , Melissa M. Midzor , Michael Roukes
发明人： Denis V. Pelekhov , P. Chris Hammel , Geoffrey Nunes, Jr. , Melissa M. Midzor , Michael Roukes
IPC分类号： C23C1400
CPC分类号： G01Q60/56 , Y10S977/865
摘要： A method for coating the tip of a mechanical resonator for use in magnetic force microscopy and magnetic resonance force microscopy in which the tip is coated with a ferromagnetic material and the cantilever is not, and the product resulting from the method. A cantilever and incorporated tip are coated with a photoresist, except that surface tension keeps photoresist off the tip. The cantilever and tip are then coated with a magnetic material. Next, acetone is used to lift off the magnetic material from the cantilever but not from the tip.
摘要翻译：用于涂覆用于磁力显微镜和磁共振力显微镜的机械谐振器的尖端的方法，其中尖端涂覆有铁磁材料，并且悬臂不是，并且由该方法产生的产物。悬臂和引入的尖端涂覆有光致抗蚀剂，除了表面张力将光致抗蚀剂从尖端保持下来。然后用磁性材料涂覆悬臂和尖端。接下来，丙酮用于从悬臂上提取磁性材料，但不从尖端剥离。

13. 发明申请

US20120272742A1 NEMS COMPRISING ALSI ALLOY BASED TRANSDUCTION MEANS 有权
标题翻译：包含基于AlSi合金的传导手段的NEMS
公开(公告)号：US20120272742A1
公开(公告)日：2012-11-01
申请号：US13384474
申请日：2010-07-13
申请人： Philippe Andreucci , Laurent Duraffourg , Carine Marcoux , Pierre Brianceau , Sebastien Hentz , Stephane Minoret , Edward Myers , Michael Roukes
发明人： Philippe Andreucci , Laurent Duraffourg , Carine Marcoux , Pierre Brianceau , Sebastien Hentz , Stephane Minoret , Edward Myers , Michael Roukes
IPC分类号： G01L1/18 , B81B3/00
CPC分类号： G01P15/097 , B81B3/0021 , B81B2203/0118 , B81B2203/058 , G01N29/022 , G01N2291/014 , G01N2291/0427 , G01P15/123
摘要： The invention relates to a nano electro- mechanical system (NEMS) formed on a substrate (21) and comprising at least one fixed part associated with the substrate and at least one movable part (23) in relation to the substrate, said system comprising transduction means (24) capable of exciting the movable part to confer on it a movement and/or to detect a movement of movable part, the transduction means comprising at least one electrically conductive material. The electrically conductive material is made of an AlSi alloy based deposition, said deposition being supported at least in part by the movable part of the system.
摘要翻译：本发明涉及一种形成在基片（21）上的纳米电子机械系统（NEMS），它包括至少一个与该基片有关的固定部分和至少一个相对于该基片的可动部分（23），该系统包括转导能够激励可移动部分以赋予运动和/或检测可移动部分的运动的装置（24），所述转导装置包括至少一种导电材料。导电材料由基于AlSi合金的沉积制成，所述沉积至少部分地由系统的可移动部分支撑。

14. 发明授权

US07416911B2 Electrochemical method for attaching molecular and biomolecular structures to semiconductor microstructures and nanostructures 有权
标题翻译：将分子和生物分子结构连接到半导体微结构和纳米结构的电化学方法
公开(公告)号：US07416911B2
公开(公告)日：2008-08-26
申请号：US10876276
申请日：2004-06-23
申请人： James R. Heath , Yuri Bunimovich , Guanglu Ge , Kristen Beverly , John Nagarah , Michael Roukes , Peter Willis
发明人： James R. Heath , Yuri Bunimovich , Guanglu Ge , Kristen Beverly , John Nagarah , Michael Roukes , Peter Willis
IPC分类号： H01L21/306
CPC分类号： H01L51/0098 , B82Y10/00 , B82Y30/00 , H01L51/0595 , Y10S977/704 , Y10S977/762 , Y10S977/792 , Y10S977/794 , Y10S977/83 , Y10S977/899 , Y10S977/92 , Y10S977/924 , Y10S977/958
摘要： A method by which silicon nanostructures may be selectively coated with molecules or biomolecules using an electrochemical process. This chemical process may be employed as a method for coating many different nanostructures within a circuit, each with a different molecular or biomolecular material. The density of devices within a circuit of devices that can be coated with different molecules is limited only by the ability to electronically address each device separately. This invention has applications toward the fabrication of molecular electronic circuitry and toward the fabrication of nanoelectronic molecular sensor arrays.
摘要翻译：使用电化学方法可以用分子或生物分子选择性地涂布硅纳米结构的方法。该化学方法可以用作在电路中涂覆许多不同纳米结构的方法，每种纳米结构具有不同的分子或生物分子材料。可以用不同分子涂覆的器件的电路内的器件的密度仅受到分别对每个器件进行电子地址的能力的限制。本发明具有制造分子电子电路和制造纳米电子分子传感器阵列的应用。

15. 发明申请

US20070158553A1 Dynamics bionems sensors and arrays of bionems sensor immersed in fluids 有权
标题翻译：传感器和传感器的传感器和传感器浸入液体中
公开(公告)号：US20070158553A1
公开(公告)日：2007-07-12
申请号：US10502551
申请日：2003-05-07
申请人： Michael Roukes
发明人： Michael Roukes
IPC分类号： G21K7/00
CPC分类号： G01N33/54373
摘要： A bioNEMS device comprises a piezoresistive cantilever having flexing legs of which attach the cantilever to a support and a biofunctionalized portion at the tip. A bias current applied to the legs is limited by a maximal acceptable temperature increase at the biofunctionalized tip. The length of the cantilever has a magnitude chosen to minimize background Johnson noise. A catalyzed receptor on the device binds to a ligand whose binding rate coefficient is enhanced. The catalyst lowers the receptor-ligand binding activation energy and is designed by forced evolution to preferentially bind with the ligand. A carrier signal is injected by a magnetic film disposed on the cantilever which is electromagnetically coupled to a source of the carrier signal. A plurality of NEMS fluidicly coupled transducers generate a plurality of output signals from which a collective output signal is derived, either by averaging or thresholding. The NEMS devices are disposed in microfluidic flow channels and fabricated in a membrane. A linking molecule is attached to the tip of the transducer and a fluffball attached to the linking molecule to increase damping.
摘要翻译： bioNEMS装置包括压阻悬臂，其具有将悬臂连接到支撑件上的弯曲腿和在尖端的生物功能化部分。施加到腿上的偏置电流受生物功能化尖端的最大可接受的温度升高的限制。悬臂的长度具有选择的最小化背景约翰逊噪声的大小。器件上的催化受体与结合速率系数增强的配体结合。催化剂降低受体 - 配体结合活化能，并通过强制进化来优先与配体结合而设计。载体信号由布置在悬臂上的磁膜注入，该磁膜电磁耦合到载波信号源。多个NEMS流体耦合的换能器产生多个输出信号，通过平均或阈值从该输出信号导出集体输出信号。 NEMS装置设置在微流体流动通道中并制成膜。连接分子连接到换能器的尖端，并且连接到连接分子上的绒毛增加阻尼。

16. 发明申请

US20060155478A1 Method and apparatus for providing signal analysis of a bionems resonator or transducer 有权
标题翻译：用于提供二元共振器或换能器的信号分析的方法和装置
公开(公告)号：US20060155478A1
公开(公告)日：2006-07-13
申请号：US10502466
申请日：2003-05-07
申请人： Michael Roukes , Scott Fraser , Jerry Solomon
发明人： Michael Roukes , Scott Fraser , Jerry Solomon
IPC分类号： G01N33/48
CPC分类号： G01N33/54373
摘要： An outputs signal, v(t), is generated from a bioNEMs transducer and mixed with a reference signal and then filtered to generate a correlator output, r(t). The correlator output is detected to generate a signal u(t) and then determined whether the signal u(t) satisfies a predetermined threshold. If qualified, it is then decided whether the signal u(t) represents a predetermined type of interaction between a free ligand in a fluid in which the NEMS device is immersed and a receptor attached to the transducer. The threshold is the Neyman-Pearson criterion based on a predetermined probability of false detection, Pfa. The interaction may be binding of a free ligand to the receptor or releasing a bound ligand from the receptor by competitive binding with the free ligand. The step of detecting comprises detecting the envelope of the signal, r(t).
摘要翻译：输出信号v（t）由bioNEMs传感器产生并与参考信号混合，然后被滤波以产生相关器输出r（t）。检测相关器输出以产生信号u（t），然后确定信号u（t）是否满足预定阈值。如果合格，则判定信号u（t）是否表示在其中浸入NEMS装置的流体中的游离配体与附接到换能器的受体之间的预定类型的相互作用。阈值是基于预先确定的错误检测概率的Neyman-Pearson标准Pfa。相互作用可以是游离配体与受体的结合或通过与游离配体的竞争性结合从受体释放结合的配体。检测步骤包括检测信号的包络r（t）。

17. 发明申请

US20050032100A1 Electrochemical method and resulting structures for attaching molecular and biomolecular structures to semiconductor micro and nanostructures 有权
标题翻译：将分子和生物分子结构连接到半导体微结构和纳米结构的电化学方法和所得结构
公开(公告)号：US20050032100A1
公开(公告)日：2005-02-10
申请号：US10876276
申请日：2004-06-23
申请人： James Heath , Yuri Bunimovich , Guanglu Ge , Kristen Beverly , John Nagarah , Michael Roukes , Peter Willis
发明人： James Heath , Yuri Bunimovich , Guanglu Ge , Kristen Beverly , John Nagarah , Michael Roukes , Peter Willis
IPC分类号： C12M1/34 , C12Q1/68 , H01L20060101 , H01L21/00
CPC分类号： H01L51/0098 , B82Y10/00 , B82Y30/00 , H01L51/0595 , Y10S977/704 , Y10S977/762 , Y10S977/792 , Y10S977/794 , Y10S977/83 , Y10S977/899 , Y10S977/92 , Y10S977/924 , Y10S977/958
摘要： A method by which silicon nanostructures may be selectively coated with molecules or biomolecules using an electrochemical process. This chemical process may be employed as a method for coating many different nanostructures within a circuit, each with a different molecular or biomolecular material. The density of devices within a circuit of devices that can be coated with different molecules is limited only by the ability to electronically address each device separately. This invention has applications toward the fabrication of molecular electronic circuitry and toward the fabrication of nanoelectronic molecular sensor arrays.
摘要翻译：使用电化学方法可以用分子或生物分子选择性地涂布硅纳米结构的方法。该化学方法可以用作在电路中涂覆许多不同纳米结构的方法，每种纳米结构具有不同的分子或生物分子材料。可以用不同分子涂覆的器件的电路内的器件的密度仅受到分别对每个器件进行电子地址的能力的限制。本发明具有制造分子电子电路和制造纳米电子分子传感器阵列的应用。

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