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11. 发明授权

US06619142B1 Integrated fluid sensing device 失效
标题翻译：集成流体感测装置
公开(公告)号：US06619142B1
公开(公告)日：2003-09-16
申请号：US09666990
申请日：2000-09-21
申请人： Karl-Heinz Förster , Frank J. Langro , Frank Latino , Josef Binder , Wolfgang Benecke , Thomas Stärz , Oliver Ahrens
发明人： Karl-Heinz Förster , Frank J. Langro , Frank Latino , Josef Binder , Wolfgang Benecke , Thomas Stärz , Oliver Ahrens
IPC分类号： G01F128
CPC分类号： G01F1/28 , F15B13/0814 , F15B13/0857 , F15B13/086 , G01F1/6842 , G01F5/00 , G01F15/14 , G01F15/18 , Y10T137/87885
摘要： A circuit board, which includes one or more sensors, is integrated in a fluid control device, such as a valve manifold and a base plate. The fluid control device selectively directs a fluid used to control pneumatic or hydraulic equipment. The sensors are used to measure physical characteristics of the fluid, such as flow rate, pressure, and temperature.
摘要翻译：包括一个或多个传感器的电路板集成在诸如阀歧管和基板的流体控制装置中。流体控制装置选择性地引导用于控制气动或液压设备的流体。传感器用于测量流体的物理特性，如流量，压力和温度。

12. 发明授权

US5338997A Micromanipulator for moving objects 失效
标题翻译：用于移动物体的微操纵器
公开(公告)号：US5338997A
公开(公告)日：1994-08-16
申请号：US35505
申请日：1993-03-22
申请人： Wolfgang Benecke
发明人： Wolfgang Benecke
IPC分类号： B23Q5/50 , B25J7/00 , B25J9/10 , B25J9/12 , H01J37/20 , H01L41/08
CPC分类号： H01J37/20 , B23Q5/50 , B25J7/00 , B25J9/1085 , B25J9/12
摘要： A micromanipulator suited for use in vacuum and microscopic systems is prded for moving objects permitting variable step spans up to approximately 100 .mu.m while having high precision of movement and a high degree of miniaturization. The micromanipulator is equipped with bimaterial tongues which can be positioned with the aid of heating and sensor elements. The object carrier is moved by suitable coordination of the tongue movements. The micromanipulator permits any desired movements in a plane and rotary and tilting movements of the object carrier.
摘要翻译：适用于真空和微观系统的显微操作器被提供用于允许可变步长达到约100微米的移动物体，同时具有高精度的移动和高度的小型化。显微操纵器配有双材料舌片，可以通过加热和传感器元件定位。通过舌头运动的适当协调来移动对象载体。显微操纵器允许平面中的任何期望的运动以及物体载体的旋转和倾斜运动。

13. 发明授权

US5182910A Micromechanical manipulator 失效
标题翻译：微机械手
公开(公告)号：US5182910A
公开(公告)日：1993-02-02
申请号：US714389
申请日：1991-06-07
申请人： Wolfgang Benecke
发明人： Wolfgang Benecke
IPC分类号： B23Q1/36 , B25J7/00 , F03G7/06 , F15C5/00 , F16H25/02 , F16K99/00 , G02B7/182 , H01H1/00 , H01H61/04
CPC分类号： F16K99/0001 , B23Q1/36 , B25J7/00 , F03G7/06 , F15C5/00 , F16H25/02 , F16K99/0007 , F16K99/0044 , G02B7/1821 , H01H1/0036 , F16K2099/0074 , F16K2099/008 , F16K2099/0086 , H01H2061/006 , H01H2061/0122 , H01H61/04
摘要： Disclosed is a micromechanical manipulator composed of substrate 1, heatinglements and a manipulator arm 2 which is based on the principle of the bimaterial effect. Prior art bimaterial manipulators execute movements perpendicular to the surface of the substrate. However, it is often desirable to have a manipulator which executes movements in the surface of the substrate. The invented manipulator is based on the substrate surface counteracting steering of the manipulator arm with mechanical resistance, which leads to bulging and shortening of the effective length of the arm and thereby to movement in the surface of the substrate. The invented manipulator arm is suited as a drive means for elements, such as toothed disks or joints, which are movably disposed in the surface of the substrate.
摘要翻译：公开了一种由基板1，加热元件和基于双材料效应原理的操纵臂2组成的微机械操纵器。现有技术的双材料操纵器执行垂直于衬底表面的运动。然而，通常期望具有执行基板表面中的运动的操纵器。本发明的机械手基于具有机械阻力的机械手臂的基板表面抵消转向，这导致臂的有效长度的膨胀和缩短，从而在基板的表面中移动。本发明的操纵臂适合作为可移动地设置在基板的表面中的诸如齿形盘或接头的元件的驱动装置。

14. 发明授权

US5172950A Micromanipulator for gripping objects 失效
标题翻译：用于传送物体的微型计算机
公开(公告)号：US5172950A
公开(公告)日：1992-12-22
申请号：US601750
申请日：1990-10-26
申请人： Wolfgang Benecke
发明人： Wolfgang Benecke
IPC分类号： B25J7/00 , B25J9/10 , B25J15/06 , B25J15/08 , B25J19/00 , B81B3/00
CPC分类号： B25J15/06 , B25J9/1085 , Y10S294/902
摘要： A gripping device for gripping microscopically small objects for fine-mechanical precision uses a basic body and gripping elements. The basic body consists of one or more semiconductor chips. Thin layer tongues of silicon and metal are precipitated and vapor deposited, respectively, on the body and are equipped with layer-shaped heating elements on or between the tongues for changing temperature and moving a held object.
摘要翻译： PCT No.PCT / DE89 / 00270 Sec。 371 1990年10月26日第 102（e）日期1990年10月26日PCT 1989年4月27日PCT PCT。公开号WO89 / 10243 日期为1989年11月2日。用于抓取微小物体的用于精细机械精度的夹持装置使用基体和夹紧元件。基体由一个或多个半导体芯片组成。硅和金属的薄层舌片分别沉积并气相沉积在主体上，并且在舌头之间或舌头之间配备有层状加热元件，用于改变温度并移动被保持的物体。

15. 发明授权

US5065628A Instrument for measuring accelerations and process of making the same 失效
标题翻译：用于测量加速度的仪器及其制造方法
公开(公告)号：US5065628A
公开(公告)日：1991-11-19
申请号：US477964
申请日：1990-06-04
申请人： Wolfgang Benecke
发明人： Wolfgang Benecke
IPC分类号： G01P15/12 , B81C1/00 , B81C99/00 , G01P9/04 , G01P15/08 , G01P15/125 , G01P15/18
CPC分类号： G01P15/0802 , G01P15/123 , G01P15/125 , G01P15/18 , G01P2015/0828 , G01P2015/0845 , G01P2015/086 , Y10T29/42
摘要： Disclosed is an instrument for measuring accelerations, with the aid of which changes in motion in the three axes of space can be measured with selective sensitivity.In order to detect multi-dimensional changes in motion, three micromechanical sensors, each sensitive to the acceleration in a selected direction, are integrated in a crystal. The sensors are composed of torsion bars having masses eccentrically attached thereto, which, in the event of changes in motion, exercise torques about the axes of the torsion bars. The torques are measured with the aid of integrated piezo-resistances. The planar integration of the acceleration meter permits integrating the evaluation circuit on the same semiconductor surface.Acceleration meters of this kind are fabricated with the prescribed process in planar technology with the aid of epitaxy, lithography and anisotropic etching methods.High precision and high miniaturization make this acceleration meter suited for application in overland and aviation navigation and for component positioning in robotry.
摘要翻译： PCT No.PCT / DE88 / 00740 Sec。 371日期1990年6月4日第 102（e）日期1990年6月4日PCT提交1988年12月1日PCT公布。出版物WO89 / 05459 日期：1989年6月15日。公开是一种用于测量加速度的仪器，借助于这三种空间轴的运动变化可以选择灵敏度测量。为了检测运动中的多维变化，每个对所选方向的加速度敏感的三个微机械传感器被集成在晶体中。传感器由具有偏心连接到其上的质量块的扭杆组成，其在运动变化的情况下围绕扭杆的轴线的运动扭矩。借助于集成的压电阻测量扭矩。加速度计的平面集成允许将评估电路集成在相同的半导体表面上。借助于外延，光刻和各向异性蚀刻方法，这种加速度计在平面技术中用规定的工艺制造。高精度和高度小型化使得该加速度计适用于陆上和航空导航以及机器人部件定位。

16. 发明授权

US4994336A Method for manufacturing a control plate for a lithographic device 失效
标题翻译：光刻设备控制板的制造方法
公开(公告)号：US4994336A
公开(公告)日：1991-02-19
申请号：US353063
申请日：1989-05-17
申请人： Wolfgang Benecke , Uwe Schnakenberg , Burkhard Lischke
发明人： Wolfgang Benecke , Uwe Schnakenberg , Burkhard Lischke
IPC分类号： H01L21/027 , H01J9/02 , H01J37/147 , H01J37/305
CPC分类号： H01J37/1477 , H01J9/02
摘要： A method for manufacturing a control plate for a lithographic device. The control plate manufactured with a method of the present invention is essentially composed of a semiconductor substrate having an opening for the passage of particle probes emanating from a multi-beam source and of a corresponding plurality of deflection elements that are connected via bond pads and connecting lines to the electronics of the lithographic device that generates control signals. Lithographic methods and voltaic shaping techniques are utilized for the manufacture of the deflection elements located on the semiconductor substrate which is coated with a dielectric.
摘要翻译：一种用于制造光刻设备的控制板的方法。用本发明的方法制造的控制板基本上由半导体衬底组成，半导体衬底具有用于通过从多光束源发射的粒子探针的开口和通过接合焊盘连接的对应的多个偏转元件和连接线路到产生控制信号的光刻设备的电子器件。利用光刻方法和电压成形技术来制造位于被电介质涂覆的半导体衬底上的偏转元件。

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