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11. 发明授权

US5471723A Methods of manufacturing thin-film absolute pressure sensors 失效
标题翻译：制造薄膜绝对压力传感器的方法
公开(公告)号：US5471723A
公开(公告)日：1995-12-05
申请号：US280616
申请日：1994-07-26
申请人： Ernst Luder , Traugott Kallfass , Masoud Habibi , Frank Hegner , Georg Schneider
发明人： Ernst Luder , Traugott Kallfass , Masoud Habibi , Frank Hegner , Georg Schneider
IPC分类号： G01L9/00 , H01G5/16
CPC分类号： G01L9/0073 , G01L9/0042 , G01L9/0054 , Y10T29/43
摘要： Resistive and capacitive absolute pressure sensors are disclosed which are made by surface micromachining and thin-film techniques. In the case of a capacitive sensor, the electrodes have a high insulation resistance relative to each other, the diaphragm exhibits only little tensile strain in the finished condition, no sublimation step is necessary to prevent the diaphragm from sticking to the substrate, the diaphragm provides a measurement signal over a wide pressure range even if its rests against the substrate, the measurement signal is virtually temperature-independent, and only few chemical-vapor-deposition and photolithographic steps are necessary. The capacitive sensor has a glass substrate and a diaphragm which bound a hermetically sealed cavity, the substrate supporting, on the cavity side, a substrate electrode with first interconnection tracks or corner pads extending therefrom, the diaphragm being made of the material of a first insulating layer, which firmly adheres, at least in part, to the substrate at the edge of the cavity, and supporting, on the side remote from the cavity, a top electrode and a second insulating layer which completely covers the top electrode and the diaphragm and hermetically seals the cavity, and the top electrode having second interconnection tracks extending therefrom onto the first insulating layer outside the diaphragm. In the case of a resistive sensor, the substrate electrode is omitted, and the top electrode is replaced by a half or full bridge consisting of piezoresistors. Four manufacturing process variants are disclosed.
摘要翻译：公开了通过表面微加工和薄膜技术制造的电阻和电容绝对压力传感器。在电容传感器的情况下，电极相对于彼此具有高的绝缘电阻，隔膜在成品状态下仅显示很小的拉伸应变，不需要升华步骤来防止隔膜粘附到基板上，隔膜提供测量信号在宽的压力范围内，即使其靠在衬底上，测量信号实际上与温度无关，并且仅需要少量化学气相沉积和光刻步骤。电容式传感器具有玻璃基板和隔膜，其结合密封空腔，所述基板在空腔侧支撑具有从其延伸的第一互连轨道或角垫的基板电极，所述隔膜由第一绝缘材料层，其至少部分地在空腔的边缘处粘附到基底，并且在远离腔的一侧支撑完全覆盖顶部电极和隔膜的顶部电极和第二绝缘层，以及密封空腔，顶部电极具有从其延伸到隔膜外侧的第一绝缘层上的第二互连轨道。在电阻传感器的情况下，省略了基板电极，并且顶部电极由由压敏电阻器组成的半桥或全桥替代。披露了四种制造方法变体。

12. 发明授权

US09046428B2 Pressure detection module and pressure sensor device having such a pressure detection module 有权
标题翻译：具有这种压力检测模块的压力检测模块和压力传感器装置
公开(公告)号：US09046428B2
公开(公告)日：2015-06-02
申请号：US13926399
申请日：2013-06-25
申请人： Masoud Habibi , Markus Reinhard
发明人： Masoud Habibi , Markus Reinhard
IPC分类号： G01L9/12 , G01L9/00 , G01L19/00 , G01L19/06 , G01L19/14
CPC分类号： G01L9/0073 , G01L9/0042 , G01L9/0045 , G01L9/0052 , G01L19/0076 , G01L19/0645 , G01L19/148
摘要： A pressure detection module of a pressure sensor device includes a receptacle part for receiving a carrier substrate. The carrier substrate is located on a first side with a pressure detection unit, and is inserted into the receptacle part with a second side facing away from the first side. The carrier substrate is fixed with its second side on a base of a receptacle groove. In order to construct the pressure detection module as small as possible, and to manufacture it in a cost-effective way, the receptacle part, the receptacle groove and a peripheral flange around the receptacle groove are, for example, provided with a plate-shaped design. The base has a contacting opening, through which contact surfaces of the carrier substrate, which are exposed at the contacting opening, are electrically contactable.
摘要翻译：压力传感器装置的压力检测模块包括用于接收载体衬底的容器部分。载体基板位于具有压力检测单元的第一侧上，并且以与第一侧相反的第二侧插入到容纳部中。载体基板的第二侧固定在容器槽的基部上。为了构造尽可能小的压力检测模块，并且以成本有效的方式制造压力检测模块，插座部分，插座槽和容器槽周围的周边凸缘例如设置有板状设计。底座具有接触开口，通过该接触开口暴露在接触开口处的载体基板的接触表面可电接触。

13. 发明授权

US08272272B2 Pressure measurement module 有权
标题翻译：压力测量模块
公开(公告)号：US08272272B2
公开(公告)日：2012-09-25
申请号：US12812732
申请日：2008-11-26
申请人： Jan Gebauer , Masoud Habibi
发明人： Jan Gebauer , Masoud Habibi
IPC分类号： G01L9/00
CPC分类号： G01L19/0084 , G01L19/143 , Y10T29/49124
摘要： A pressure measuring module for recording an absolute pressure or a relative pressure. Pressure measuring module includes a housing produced preferably as a premold, in which a pressure measuring chip is accommodated. The latter is contacted electrically either to a lead frame or to at least one printed circuit trace, at least one electronic component being provided, which is connected to a section of the lead frame or of the at least one printed circuit trace, exiting laterally from the housing that is produced as a premold, and is covered by a partition of a cover.
摘要翻译：用于记录绝对压力或相对压力的压力测量模块。压力测量模块包括优选地被预制的壳体，其中容纳有压力测量芯片。后者与引线框架或至少一个印刷电路迹线电接触，至少提供一个电子部件，其连接到引线框架或至少一个印刷电路迹线的一部分，其横向离开作为预制件生产并被盖的隔板覆盖的外壳。

14. 发明申请

US20090323760A1 DEVICE FOR RECORDING THE PRESSURE AND THE TEMPERATURE IN AN INTAKE MANIFOLD OF AN INTERNAL COMBUSTION ENGINE 有权
标题翻译：用于记录内燃机的进气歧管中的压力和温度的装置
公开(公告)号：US20090323760A1
公开(公告)日：2009-12-31
申请号：US12492581
申请日：2009-06-26
申请人： Jan Gebauer , Masoud Habibi , Markus Reinhard
发明人： Jan Gebauer , Masoud Habibi , Markus Reinhard
IPC分类号： G01K13/00
CPC分类号： G01L23/24 , G01D11/24 , G01D21/02 , G01K1/08 , G01K13/02 , G01K2205/02 , G01L19/0084 , G01L19/0092 , G01L19/069 , G01L19/141
摘要： A device for recording the pressure and the temperature in an intake manifold of an internal combustion engine, a pressure sensor and a temperature sensor being situated in a common housing, and an evaluation of a signal of the temperature sensor being provided outside the housing. An EMC protective circuit is provided in this context, which is integrated into the housing and/or is situated on the housing, and is electrically connected to the temperature sensor.
摘要翻译：一种用于记录位于公共壳体中的内燃机，压力传感器和温度传感器的进气歧管中的压力和温度的装置，以及设置在壳体外部的温度传感器的信号的评估。在本上下文中提供了EMC保护电路，其集成到壳体中和/或位于壳体上，并且电连接到温度传感器。

15. 发明授权

US07426868B2 Sensor module 有权
标题翻译：传感器模块
公开(公告)号：US07426868B2
公开(公告)日：2008-09-23
申请号：US10592631
申请日：2004-11-17
申请人： Thomas Fessele , Masoud Habibi , Christian Roesser , Markus Ledermann , Jan Gebauer , Daniel Toews
发明人： Thomas Fessele , Masoud Habibi , Christian Roesser , Markus Ledermann , Jan Gebauer , Daniel Toews
IPC分类号： G01L7/00
CPC分类号： G01L19/069 , G01L19/143 , G01L19/148
摘要： A pressure sensor module having a sensor housing which includes a housing part in which electrical conductors are partially embedded, the sensor housing being provided with a first cavity, in which a sensor system is situated, and a second cavity which is sealed against the first cavity and in which is provided at least one capacitor, and the first cavity being provided with a receptacle part having a receptacle formed by a peripheral wall, the sensor system being inserted into this receptacle and covered by a protective covering filled into the receptacle. The sensor system is contacted with connecting elements provided on the receptacle part, these connecting elements being directly connected to connecting sections of the electrical conductors; and the at least one capacitor provided in the second cavity is connected to at least one of the electrical conductors via an electrically conductive material.
摘要翻译：一种压力传感器模块，其具有传感器壳体，该传感器壳体包括壳体部分，电气导体部分地嵌入该壳体部分中，传感器壳体设置有第一空腔，传感器系统位于该第一空腔中，第二腔体与第一空腔密封并且其中设置有至少一个电容器，并且所述第一空腔设置有具有由周壁形成的容座的容器部分，所述传感器系统插入到所述容器中并被填充到所述容器中的保护性覆盖物覆盖。传感器系统与设置在容器部分上的连接元件接触，这些连接元件直接连接到电导体的连接部分; 并且设置在第二腔中的至少一个电容器经由导电材料连接到至少一个电导体。

16. 发明申请

US20050178208A1 Pressure sensor having a silicon chip on a steel diaphragm 有权
标题翻译：压力传感器在钢隔膜上具有硅芯片
公开(公告)号：US20050178208A1
公开(公告)日：2005-08-18
申请号：US11055473
申请日：2005-02-09
申请人： Hubert Benzel , Masoud Habibi , Gilbert Moersch , Roland Guenschel , Jan Gebauer
发明人： Hubert Benzel , Masoud Habibi , Gilbert Moersch , Roland Guenschel , Jan Gebauer
IPC分类号： B81B3/00 , G01L9/00 , H01L29/84 , E03B1/00
CPC分类号： G01L19/146 , G01L9/0048 , G01L9/0055
摘要： A micromechanical device for measuring a pressure variable and a method for manufacturing a micromechanical pressure sensor. The sensor includes, two components; a first component featuring a diaphragm made of a first material, and a second component of a second material. This second component is designed to have a thin first region and a thick second region. The first and second components are permanently joined together via the first diaphragm and at least a portion of the first region. The materials are selected such that the temperature expansion coefficient of the first material is higher than that of the second material. The first and second components are joined in such a manner that a lateral expansion of the first diaphragm caused by temperature changes is transferred to the first region of the second component as a lateral expansion as well.
摘要翻译：用于测量压力变量的微机械装置和用于制造微机械压力传感器的方法。传感器包括两个部件; 具有由第一材料制成的隔膜的第一部件和第二材料的第二部件。该第二部件被设计成具有薄的第一区域和厚的第二区域。第一和第二部件通过第一隔膜和第一区域的至少一部分永久地连接在一起。选择材料使得第一材料的温度膨胀系数高于第二材料的温度膨胀系数。第一和第二部件以这样的方式接合，使得由温度变化引起的第一隔膜的横向膨胀也作为横向膨胀传递到第二部件的第一区域。

17. 发明授权

US08413496B2 Pressure compensation unit 有权
标题翻译：压力补偿单元
公开(公告)号：US08413496B2
公开(公告)日：2013-04-09
申请号：US12735346
申请日：2008-12-01
申请人： Reza Eslami , Masoud Habibi , Marcell Ott , Thomas Fessele
发明人： Reza Eslami , Masoud Habibi , Marcell Ott , Thomas Fessele
IPC分类号： G01M15/00
CPC分类号： G01L19/003 , B60K15/03 , G01L19/0636 , G01L19/0654
摘要： A pressure-compensation unit, particularly for a tank-pressure sensor in a tank of a motor vehicle. The pressure-compensation unit includes a housing lid and a gas-permeable filter diaphragm, which covers an air hole. The pressure-compensation unit includes a cap-shaped cover element, which covers the filter diaphragm.
摘要翻译：压力补偿单元，特别是用于机动车辆箱中的罐式压力传感器。压力补偿单元包括盖住空气孔的壳体盖和透气过滤膜。压力补偿单元包括覆盖过滤隔膜的盖形盖元件。

18. 发明授权

US08192078B2 Device for recording the pressure and the temperature in an intake manifold of an internal combustion engine 有权
标题翻译：用于记录内燃机的进气歧管中的压力和温度的装置
公开(公告)号：US08192078B2
公开(公告)日：2012-06-05
申请号：US12492581
申请日：2009-06-26
申请人： Jan Gebauer , Masoud Habibi , Markus Reinhard
发明人： Jan Gebauer , Masoud Habibi , Markus Reinhard
IPC分类号： G01K1/14 , G01K13/00
CPC分类号： G01L23/24 , G01D11/24 , G01D21/02 , G01K1/08 , G01K13/02 , G01K2205/02 , G01L19/0084 , G01L19/0092 , G01L19/069 , G01L19/141
摘要： A device for recording the pressure and the temperature in an intake manifold of an internal combustion engine, a pressure sensor and a temperature sensor being situated in a common housing, and an evaluation of a signal of the temperature sensor being provided outside the housing. An EMC protective circuit is provided in this context, which is integrated into the housing and/or is situated on the housing, and is electrically connected to the temperature sensor.
摘要翻译：一种用于记录位于公共壳体中的内燃机，压力传感器和温度传感器的进气歧管中的压力和温度的装置，以及设置在壳体外部的温度传感器的信号的评估。在本上下文中提供了EMC保护电路，其集成到壳体中和/或位于壳体上，并且电连接到温度传感器。

19. 发明授权

US08109148B2 Pressure compensation unit for use in a pressure sensor 有权
标题翻译：用于压力传感器的压力补偿单元
公开(公告)号：US08109148B2
公开(公告)日：2012-02-07
申请号：US12800016
申请日：2010-05-05
申请人： Masoud Habibi , Thomas Fessele
发明人： Masoud Habibi , Thomas Fessele
IPC分类号： G01L19/04
CPC分类号： G01L19/0007 , B60K15/03 , G01L19/0636 , G01L19/142 , Y10T137/7837
摘要： A pressure compensation unit for use in a pressure sensor includes a housing which has at least one continuous channel, at least one opening being provided in a wall of the channel. The opening is connectable to a reference pressure chamber of the pressure sensor via at least one air passage in the housing. The opening is closed by at least one gas-permeable and preferably fluid-tight filter diaphragm.
摘要翻译：用于压力传感器的压力补偿单元包括具有至少一个连续通道的壳体，至少一个开口设置在通道的壁中。开口可通过壳体中的至少一个空气通道连接到压力传感器的参考压力室。开口由至少一个透气且优选流体密封的过滤隔膜封闭。

20. 发明申请

US20110016981A1 PRESSURE MEASUREMENT MODULE 有权
标题翻译：压力测量模块
公开(公告)号：US20110016981A1
公开(公告)日：2011-01-27
申请号：US12812732
申请日：2008-11-26
申请人： Jan Gebauer , Masoud Habibi
发明人： Jan Gebauer , Masoud Habibi
IPC分类号： G01L9/00 , H05K3/00
CPC分类号： G01L19/0084 , G01L19/143 , Y10T29/49124
摘要： A pressure measuring module for recording an absolute pressure or a relative pressure. Pressure measuring module includes a housing produced preferably as a premold, in which a pressure measuring chip is accommodated. The latter is contacted electrically either to a lead frame or to at least one printed circuit trace, at least one electronic component being provided, which is connected to a section of the lead frame or of the at least one printed circuit trace, exiting laterally from the housing that is produced as a premold, and is covered by a partition of a cover.
摘要翻译：用于记录绝对压力或相对压力的压力测量模块。压力测量模块包括优选地被预制的壳体，其中容纳有压力测量芯片。后者与引线框架或至少一个印刷电路迹线电接触，至少提供一个电子部件，其连接到引线框架或至少一个印刷电路迹线的一部分，其横向离开作为预制件生产并被盖的隔板覆盖的外壳。

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