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    • 17. 发明申请
    • Magneto-resistive effect element and magnetic disk device
    • 磁阻效应元件和磁盘装置
    • US20070297100A1
    • 2007-12-27
    • US11589110
    • 2006-10-30
    • Toyoo MiyajimaMineharu Tsukada
    • Toyoo MiyajimaMineharu Tsukada
    • G11B5/33G11B5/127
    • G11B5/3909B82Y10/00B82Y25/00G11B5/3163G11B5/3912G11B2005/3996Y10T29/49043
    • An alignment control film is formed on an alumina film by sputtering. A Ti film, a Ta film, a Ru film, a MgO film or the like is formed as the alignment control film. A lower shield layer is formed on the alignment control film. Crystal grains composing the lower shield layer will be of a columnar crystal grains. The lower shield layer will have the (111) surface exposed to the surface thereof when a Ti film, a Ta film or a Ru film is formed as the alignment control film, whereas the lower shield layer will have the (100) surface exposed to the surface thereof when a MgO film is formed as the alignment control film. A GMR film is then formed on the lower shield layer. The GMR film is formed by first allowing an anti-ferromagnetic film to epitaxially grow on the lower shield layer. The anti-ferromagnetic film will have also the (111) surface or the (100) surface reflecting the crystal structure of the lower shield layer.
    • 通过溅射在氧化铝膜上形成取向控制膜。 形成Ti膜,Ta膜,Ru膜,MgO膜等作为取向控制膜。 在取向控制膜上形成下屏蔽层。 构成下屏蔽层的晶粒将是柱状晶粒。 当形成Ti膜,Ta膜或Ru膜作为取向控制膜时,下屏蔽层具有暴露于其表面的(111)表面,而下屏蔽层将(100)表面暴露于 当形成MgO膜时作为取向控制膜的表面。 然后在下屏蔽层上形成GMR膜。 GMR膜通过首先使反铁磁膜在下屏蔽层上外延生长而形成。 反铁磁膜还具有(111)表面或(100)表面反映下屏蔽层的晶体结构。