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    • 16. 发明申请
    • PLASMA MEASURING METHOD, PLASMA MEASURING DEVICE AND STORAGE MEDIUM
    • 等离子体测量方法,等离子体测量装置和储存介质
    • US20100321029A1
    • 2010-12-23
    • US12867120
    • 2009-01-30
    • Toru ItoMasato KawakamiSumie NagasekiKazuki Denpoh
    • Toru ItoMasato KawakamiSumie NagasekiKazuki Denpoh
    • G01N27/62
    • H01J37/3244H01J37/32449H01J37/32935
    • Provided is a technique capable of ascertaining the process condition of the boundary between electrically positive and negative plasma regions. In a vacuum chamber, one of the parameters of process conditions is stepwisely changed to generate a plasma under at least three process conditions. The parameters include a flow rate ratio between an electrically negative gas and an electrically positive gas, a pressure in the vacuum chamber and the magnitude of an energy supplied to the gases. Next, a voltage is applied to a Langmuir probe positioned in that plasma, and a current-voltage curve indicating the relationship between the applied voltage and the electric current to flow through the probe is acquired for each of the process conditions. On the basis of the current-voltage curve group acquired, the process conditions are determined for the boundary between the electrically positive and negative plasma regions.
    • 提供了一种能够确定电正极和负电等离子体区域之间的边界的工艺条件的技术。 在真空室中,逐步改变工艺条件的参数之一,以在至少三个工艺条件下产生等离子体。 参数包括电负气体和电正气体之间的流量比,真空室中的压力和供应给气体的能量的大小。 接下来,对位于该等离子体中的Langmuir探针施加电压,并且针对每个处理条件获取指示施加的电压和流过探针的电流之间的关系的电流 - 电压曲线。 基于所获得的电流 - 电压曲线组,确定电气正电压和负电压区域之间的边界的工艺条件。
    • 20. 发明授权
    • Motor drive camera
    • 电机驱动相机
    • US06574438B2
    • 2003-06-03
    • US10184871
    • 2002-07-01
    • Kenji YamaneToru Ito
    • Kenji YamaneToru Ito
    • G03B1700
    • G03B17/425
    • A zoom lens device is attached in front of a main body. The main body has a film cartridge chamber and a take-up chamber. A take-up spool is rotatably positioned into the take-up chamber. The zoom lens device consists of a fixed lens barrel and plural movable lens barrels. The movable lens barrels move along a photographic optical axis in order to perform zooming. Rotation of a film motor is transmitted to the take-up spool through a film advance gear train. Rotation of the lens motor is transmitted to the zoom lens device through a lens drive gear train. The film advance gear train and the lens drive gear train are positioned side by side on the lower part of the main body.
    • 变焦镜头装置安装在主体前面。 主体具有暗盒室和卷取室。 卷取卷轴可旋转地定位在卷取室中。 变焦透镜装置由固定镜筒和多个可移动透镜筒组成。 可移动透镜筒沿着摄影光轴移动,以进行变焦。 胶片电动机的旋转通过胶片前进齿轮系传递到卷取卷轴。 镜头马达的旋转通过透镜驱动齿轮系传递到变焦镜头装置。 胶卷推进齿轮系和镜头驱动齿轮系并排设置在主体的下部。