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11. 发明专利

JP2013068270A Joint sealing device 有权
标题翻译：接头密封装置
公开(公告)号：JP2013068270A
公开(公告)日：2013-04-18
申请号：JP2011206750
申请日：2011-09-22
申请人： Tokyo Electron Ltd , 東京エレクトロン株式会社 , Fujikin Inc , 株式会社フジキン
发明人： OKABE YASUYUKI , MORIYA SHUJI , SATO KENICHI , NAKADA TOMOHIRO , SHINOHARA TSUTOMU , YAMAJI MICHIO
IPC分类号： F16L23/16 , F16J15/08 , F16J15/10
摘要： PROBLEM TO BE SOLVED: To provide a joint sealing device that can prevent fine particle from entering a fluid pathway from outside, thus maintaining high cleanliness.SOLUTION: Outer circumferential surfaces in retainer storage recesses 7, 8 of joint members 5, 6 comprise large diameter outer circumferential surface parts 7a, 8a on an abutting end surface side and small diameter outer circumferential surface parts 7b, 8b on the side opposite thereto in the axial direction. A retainer 12 includes a cylindrical retainer body 16 having the outside diameter equal to the diameter of the small diameter outer circumferential surface parts 7b, 8b of the retainer storage recesses 7, 8, an annular projecting part 17 integrated with the retainer body 16, and an annular groove 18 to be opened to an outer circumferential surface of the annular projecting part 17. An elastic ring 13 for retaining the retainer 12 by the joint member 5 is fitted in the annular groove 18 of the retainer 12.
摘要翻译：要解决的问题：提供一种可以防止细颗粒从外部进入流体通道的关节密封装置，从而保持高清洁度。解决方案：接头构件5,6的保持架保持凹部7,8中的外周面包括在邻接端面侧上的大直径外周面部7a，8a和侧面上的小直径外周面部7b，8b 与轴向相反。保持器12包括具有等于保持器保持凹部7,8的小直径外周表面部分7b，8b的直径的外径的圆柱形保持器主体16，与保持器主体16成一体的环形突出部17，以及环形槽18，其被开放到环形突出部17的外周表面。用于通过接合构件5保持保持器12的弹性环13被装配在保持器12的环形槽18中。（C）2013，JPO＆INPIT

12. 发明专利

JP2013068269A Pipe joint 有权
标题翻译：管接头
公开(公告)号：JP2013068269A
公开(公告)日：2013-04-18
申请号：JP2011206749
申请日：2011-09-22
申请人： Tokyo Electron Ltd , 東京エレクトロン株式会社 , Fujikin Inc , 株式会社フジキン
发明人： OKABE YASUYUKI , MORIYA SHUJI , SATO KENICHI , NAKADA TOMOHIRO , SHINOHARA TSUTOMU , YAMAJI MICHIO
IPC分类号： F16L19/03 , F16J15/08 , F16L23/16
CPC分类号： F16L19/0212 , F16L19/0286
摘要： PROBLEM TO BE SOLVED: To provide a pipe joint that can prevent fine particles arising when screwing together a male threaded member and a female threaded member from entering a fluid pathway, thus maintaining high cleanliness.SOLUTION: Joint members 2, 3 are jointed to each other by means of a male threaded member 6 provided on one joint member 2 and a female threaded member 7 provided on the other joint member 3. A cover part 16 for covering an outer circumferential surface of an abutting section of the joint members 2, 3 is provided on the male threaded member 6.
摘要翻译：要解决的问题：提供一种管接头，其可以防止在将阳螺纹构件和内螺纹构件螺纹连接在一起进入流体通路时产生的细小颗粒，从而保持高清洁度。解决方案：接头构件2,3通过设置在一个接头构件2上的外螺纹构件6和设置在另一接头构件3上的内螺纹构件7彼此接合。盖部16，用于覆盖接合部件2,3的抵接部的外周面设置在外螺纹部件6上。（C）2013，JPO＆INPIT

13. 发明专利

JP2013068268A Joint 有权
标题翻译：联合
公开(公告)号：JP2013068268A
公开(公告)日：2013-04-18
申请号：JP2011206746
申请日：2011-09-22
申请人： Tokyo Electron Ltd , 東京エレクトロン株式会社 , Fujikin Inc , 株式会社フジキン
发明人： OKABE YASUYUKI , MORIYA SHUJI , SATO KENICHI , NAKADA TOMOHIRO , SHINOHARA TSUTOMU , YAMAJI MICHIO
IPC分类号： F16L23/036
CPC分类号： F16L23/036 , F16L23/0283 , F16L23/18
摘要： PROBLEM TO BE SOLVED: To provide a joint such as a flange type pipe joint which has the reduced number of types of components.SOLUTION: A bolt 5 has a shaft part 14 in which a male thread 14a is formed on its tip portion and a male thread is not formed to the remaining portion 14b. A first and a second joint members 2, 3 have the same shape, and in each of the joint members 2, 3, a shaft insertion hole 15 on an abutting end surface side and a thread hole 16 continuous therewith and extending to the counter abutting end surface are formed.
摘要翻译：要解决的问题：提供具有减少的部件类型数量的诸如法兰式管接头的接头。解决方案：螺栓5具有轴部14，在其末端部分上形成有阳螺纹14a，并且在其余部分14b上没有形成阳螺纹。第一和第二关节构件2,3具有相同的形状，并且在每个接合构件2,3中，在邻接端面侧具有轴插入孔15和与其连续的螺纹孔16并延伸到相反的邻接形成端面。版权所有（C）2013，JPO＆INPIT

14. 发明专利

JP2013066969A Screw member tightening method and pipe joint 有权
标题翻译：螺杆挤压方法和管接头
公开(公告)号：JP2013066969A
公开(公告)日：2013-04-18
申请号：JP2011206753
申请日：2011-09-22
申请人： Tokyo Electron Ltd , 東京エレクトロン株式会社 , Fujikin Inc , 株式会社フジキン
发明人： OKABE YASUYUKI , MORIYA SHUJI , SATO KENICHI , NAKADA TOMOHIRO , SHINOHARA TSUTOMU , YAMAJI MICHIO
IPC分类号： B25B23/14 , F16B31/02
摘要： PROBLEM TO BE SOLVED: To provide a screw member tightening method capable of performing a fasting operation added with a tightening-forgetting prevention function by only performing work which is the same with that of a conventional device without newly manufacturing an exclusive tool, and to provide a pipe joint which enables the screw member tightening method.SOLUTION: The pipe joint 1 comprises first and second pipe-shaped joint members 2, 3, and a male screw member 4 and a female screw member 5 which connect both joint members 2, 3. Notches 6, 7 for indicating processing start positions are formed at the male screw member 4 and the female screw member 5, respectively. In a manually-tightend state shown in the figure, the notch 6 of the male screw member 4 and the notch 7 of the female screw member 5 oppose each other. Then, after final tightening by a tool is performed, the notch 6 of the male screw member 4 and the notch 7 of the female screw member 5 are changed in positional relationship, and it can be confirmed that the final tightening has been performed.
摘要翻译：解决问题的方案为了提供一种能够通过仅进行与以往的装置相同的作业而不进行专门的工具的新制作而能够进行具有防止收紧忘记功能的空腹作业的螺杆部件收紧方法，并提供能够实现螺杆构件收紧方法的管接头。管接头1包括连接两个接头构件2,3的第一和第二管状接头构件2,3和外螺纹构件4和内螺纹构件5，用于指示加工的槽口6,7 开始位置分别形成在外螺纹构件4和内螺纹构件5上。在图中所示的手动紧固状态下，外螺纹部件4的切口6和内螺纹部件5的切口7彼此相对。然后，在通过工具进行最终紧固之后，外螺纹部件4的切口6和内螺纹部件5的切口7的位置关系发生变化，可以确认已经进行了最终紧固。版权所有（C）2013，JPO＆INPIT

15. 发明专利

JP2009145986A Pressure-controlled type flow rate reference unit and corrosion-resistant pressure type flow rate control unit 有权
标题翻译：压力控制型流量参考单元和耐腐蚀压力型流量控制单元
公开(公告)号：JP2009145986A
公开(公告)日：2009-07-02
申请号：JP2007319977
申请日：2007-12-11
申请人： Fujikin Inc , Tokyo Electron Ltd , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： MORIYA SHUJI , OKASE WATARU , SHINOHARA TSUTOMU , IKEDA SHINICHI , YAMAJI MICHIO , HAYASHI KYOTAKA , YOSHIDA SHUNEI , OMATA YASUYUKI
IPC分类号： G05D7/06 , G05D16/20
CPC分类号： G05D7/0635 , Y10T137/2708 , Y10T137/776 , Y10T137/7761 , Y10T137/7793
摘要： PROBLEM TO BE SOLVED: To provide a pressure control type flow rate reference unit which easily allows performing flow rate calibration of a flow rate control unit on all types of gases, including corrosive gases, at low cost, and which also has superior flow rate control accuracy. SOLUTION: This pressure control type flow rate reference unit is configured of a pressure control unit for adjusting the pressure of a calibration gas from a gas supply source for calibration; a volume provided on the downstream side of a pressure control unit; the connection mouth of an calibration flow rate control unit, provided on the downstream side of the volume; a reference pressure type flow rate control unit connected to a connection hole on the downstream side of the calibration flow rate control unit; a volume provided on the downstream side of a reference pressure type flow rate control unit; and a vacuum pump provided on the downstream side of the volume. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种压力控制型流量参考单元，其容易地允许以低成本对包括腐蚀性气体的所有类型的气体进行流量校准，并且还具有优越性流量控制精度。该压力控制型流量基准单元由压力控制单元构成，用于调节来自用于校准的气体供给源的校准气体的压力; 设置在压力控制单元的下游侧的容积; 校准流量控制单元的连接口，设置在容积的下游侧; 参考压力型流量控制单元，连接到校准流量控制单元的下游侧的连接孔; 设置在基准压力型流量控制单元的下游侧的容积; 以及设置在容积的下游侧的真空泵。版权所有（C）2009，JPO＆INPIT

16. 发明专利

JP2008298177A Fluid control device 审中-公开
标题翻译：流体控制装置
公开(公告)号：JP2008298177A
公开(公告)日：2008-12-11
申请号：JP2007144919
申请日：2007-05-31
申请人： Fujikin Inc , Tokyo Electron Ltd , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： NAKADA TOMOHIRO , SHINOHARA TSUTOMU , YAMAJI MICHIO , OKASE WATARU , MORIYA SHUJI
IPC分类号： F16K27/00 , C23C16/455 , H01L21/02
CPC分类号： F16K27/003
摘要： PROBLEM TO BE SOLVED: To provide a fluid control device with improved assembling workability.
SOLUTION: Joint members 3, 6a are abutted on and coupled to each other by male screw members 18 from a forward and backward direction. A sealing part 20 is provided at an approximate center of a rectangular abutting face between the adjacent joint members 3 and 6a. The male screw members 18 from the forward and backward direction are arranged at only two corners separated by 180 degrees among four corners of the rectangle. Screw insertion holes 29 and female screws 30 are alternately provided at four corners of one joint member 3, and the screw insertion holes 29 and the female screws 30 are alternately provided at four corners of the other joint member 6a in opposite positions to those of the joint member 3.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供具有改进的组装操作性的流体控制装置。解决方案：接头构件3,6a从前后方向抵靠并由外螺纹构件18彼此联接。密封部20设置在相邻接合部件3和6a之间的矩形抵接面的大致中心处。外螺纹构件18从前后方向排列成仅在矩形的四个角分隔180度的两个角。螺钉插入孔29和内螺纹30交替地设置在一个接头构件3的四个角处，螺钉插入孔29和内螺纹30交替地设置在另一个接头构件6a的四个角处，联合会员3.版权所有（C）2009，JPO＆INPIT

17. 发明专利

JP2014234905A ダイヤフラム弁有权
标题翻译：透膜阀
公开(公告)号：JP2014234905A
公开(公告)日：2014-12-15
申请号：JP2013118008
申请日：2013-06-04
申请人：株式会社フジキン , Fujikin Inc
发明人： SHINOHARA TSUTOMU , YAMAJI MICHIO , NISHINO KOJI , DOI RYOSUKE , IKEDA NOBUKAZU , AKAGANE TOSHIO
IPC分类号： F16K7/12 , F16K7/17
CPC分类号： F16K37/0083 , F16K7/17 , G01N27/20
摘要：【課題】簡単な構成でありながら、ダイヤフラムが破断する前に、ダイヤフラムの損傷を確実に検出することができるダイヤフラム弁を提供する。【解決手段】流体流入通路2a、及び流体流出通路2bを設けたボディ2内のシート4にダイヤフラム5接離させ流体の導通、遮断を行うダイヤフラム弁1において、ダイヤフラム5を多層構造とし、最上層のダイヤフラム表面に配線を配置し、配線の断線を検出することによりダイヤフラム5の異常を検出する。【選択図】図1
摘要翻译：要解决的问题：提供一种能够在隔膜破裂之前可靠地检测膜片损坏的隔膜阀，同时采用简单的结构。解决方案：隔膜阀1通过使膜片5接触而导致流体的传导/截留将隔膜5与设置有流体流入通道2a和流体流出通道2b的主体2内的片材4分隔开。隔膜5被构造成多层结构; 布线布置在最上层的隔膜表面上; 并且通过检测布线的断裂来检测隔膜5中的异常。

18. 发明专利

JP2013119877A Diaphragm valve 审中-公开
标题翻译：透膜阀
公开(公告)号：JP2013119877A
公开(公告)日：2013-06-17
申请号：JP2011266922
申请日：2011-12-06
申请人： Fujikin Inc , 株式会社フジキン
发明人： KITANO TAICHI , SHINOHARA TSUTOMU , YAMAJI MICHIO , NISHIMURA RYUTARO
IPC分类号： F16K7/17
CPC分类号： F16K7/12 , F16K7/14 , F16K7/17 , F16K25/005 , F16K27/0236
摘要： PROBLEM TO BE SOLVED: To provide a diaphragm valve capable of preventing a body from being greatly damaged, even when seat replacement is carried out repeatedly.SOLUTION: The diaphragm valve includes: a body 2l; a seat 4 detachably disposed in the peripheral edge of a fluid passage 2a formed on the body 2; and a seat holder 5 detachably disposed with respect to the body 2 to hold the seat 4. The body 2 and the seat holder 5 are made of metals. Vickers hardness of the seat holder 5 is made lower than that of the body 2.
摘要翻译：要解决的问题：即使重复进行座椅更换，也能够提供能够防止身体受到极大损伤的隔膜阀。解决方案：隔膜阀包括：主体21; 可拆卸地设置在形成在主体2上的流体通道2a的周缘中的座4; 以及相对于主体2可拆卸地设置以保持座椅4的座椅保持件5.主体2和座椅保持器5由金属制成。座椅座5的维氏硬度低于身体2的维氏硬度。版权所有（C）2013，JPO＆INPIT

19. 发明专利

JP2011149554A Joint for fluid control device 有权
标题翻译：液体控制装置接头
公开(公告)号：JP2011149554A
公开(公告)日：2011-08-04
申请号：JP2011072530
申请日：2011-03-29
申请人： Fujikin Inc , 株式会社フジキン
发明人： TOKUDA ICHIRO , YAMAJI MICHIO , TSUBOTA KENJI , SHINOHARA TSUTOMU , IKEDA SHINICHI
IPC分类号： F16L41/03 , F16L37/56
摘要： PROBLEM TO BE SOLVED: To provide a lightweight joint for a fluid control device which can greatly improve workability of the arrangement of the fluid control device on a vertical wall surface. SOLUTION: This rectangular parallelepiped-shaped joint (13) for a fluid control device is divided into two, a concave-shaped connecting member (23) and flat rectangular parallelepiped-shaped communication member (24). The connecting member has a recessed groove (18) in the center, and has, on each side of the recessed groove (18), a bolt insertion hole (20) having a step (20a) for receiving the head of a joint mounting bolt (19) so as not to protrude from the joint (13) and an internal thread part (22) into which an external thread member for mounting a device structural member (21) is screwed. The communication member is inserted into the recessed groove (18) of the connecting member (23) and has only a U-shaped communication passage (12). The communication member (24) is made of stainless steel, and the connecting member (23) is made of polyamide 6. A positioning protrusion (36) is provided on the bottom face of the recessed groove (18) of the connecting member (23), a positioning recess (37) is provided on the bottom face of the communication member (24), and both are fitted together. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于流体控制装置的轻质接头，其可以极大地改善流体控制装置在垂直壁表面上的布置的可操作性。解决方案：这种用于流体控制装置的长方体形接头（13）被分成两个，一个凹形连接件（23）和一个扁平的长方体形连通件（24）。连接构件在中心具有凹槽（18），并且在凹槽（18）的每一侧上具有螺栓插入孔（20），其具有用于容纳接头安装螺栓的头部的台阶（20a）（19），不会从所述接头（13）突出，并且内螺纹部（22）被安装有装配结构构件（21）的外螺纹构件。连通构件被插入到连接构件（23）的凹槽（18）中，并且仅具有U形连通通道（12）。连通构件（24）由不锈钢制成，连接构件（23）由聚酰胺6构成。定位突起（36）设置在连接构件（23）的凹槽（18）的底面上），在连通构件（24）的底面上设置有定位凹部（37），两者都嵌合在一起。版权所有（C）2011，JPO＆INPIT

20. 发明专利

JP2008298180A Fluid control device 有权
标题翻译：流体控制装置
公开(公告)号：JP2008298180A
公开(公告)日：2008-12-11
申请号：JP2007144932
申请日：2007-05-31
申请人： Fujikin Inc , 株式会社フジキン
发明人： NAKADA TOMOHIRO , SHINOHARA TSUTOMU , YAMAJI MICHIO
IPC分类号： F16K27/00 , C30B25/14
CPC分类号： F16K27/003 , Y10T137/8593 , Y10T137/87885
摘要： PROBLEM TO BE SOLVED: To provide a fluid control device which further reduces an occupied space of a device by narrowing a width of a line. SOLUTION: In this fluid control device, supporting passage blocks 9, 10 have openings of fluid passages 9a, 10a abutted on openings of fluid passages 11c, 11d of overhang passage blocks 11a, 11b via a sealing part 20, and comprises: large block parts 25, 27 contacting bottom faces of the overhang passage blocks 11a, 11b; and small block parts 26, 28 whose bottom faces are flush with the large block parts 25, 27 and which have a height lower than that of the large block parts. Male screw member insertion holes 26a, 28a for mounting the supporting passage blocks 9, 10 to a base member 30 are formed on the small block parts 26, 28. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种流体控制装置，其通过缩小线的宽度来进一步减小装置的占用空间。解决方案：在这种流体控制装置中，支撑通道块9,10具有通过密封部分20邻接突出通道块11a，11b的流体通道11c，11d的开口的流体通道9a，10a的开口，并且包括：接触突出通道块11a，11b的底面的大块部25,27; 以及小块部件26,28，其底面与大块部件25,27齐平，并且其高度低于大块部件的高度。用于将支撑通道块9,10安装到基部构件30的阳螺纹构件插入孔26a，28a形成在小块部件26,28上。（C）2009年，JPO和INPIT

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