会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 15. 发明授权
    • Method of producing nanopatterned templates
    • 生成纳米图案模板的方法
    • US08361337B2
    • 2013-01-29
    • US12049541
    • 2008-03-17
    • Soojin ParkThomas P. RussellJia-Yu WangBokyung Kim
    • Soojin ParkThomas P. RussellJia-Yu WangBokyung Kim
    • B31D3/00
    • B01D71/80B01D67/003B01D67/0034B01D67/0072B01D71/28B01D2325/028
    • Nanopatterned substrates can be prepared by a method that includes forming a block copolymer film on a substrate, annealing the block copolymer film, surface reconstructing the annealed block copolymer film, coating an etch-resistant layer on the surface reconstructed block copolymer film, etching the resist-coated block copolymer film to create an etched article comprising a nanopatterned substrate, and separating the etch-resistant layer and the block copolymer film from the nanopatterned substrate. The method is applicable to a wide variety of substrate materials, avoids any requirement for complicated procedures to produce long-range order in the block copolymer film, and avoids any requirement for metal functionalization of the block copolymer.
    • 纳米图案化的基材可以通过包括在基材上形成嵌段共聚物膜,退火嵌段共聚物膜,重整退火的嵌段共聚物膜的表面,在表面重整的嵌段共聚物膜上涂覆耐蚀刻层,蚀刻抗蚀剂 涂覆的嵌段共聚物膜以产生包含纳米图案化基材的蚀刻制品,并将该耐蚀刻层和嵌段共聚物膜与纳米图案化的基材分离。 该方法适用于各种基板材料,避免了在嵌段共聚物膜中产生长距离顺序的复杂程序的任何要求,并且避免了对嵌段共聚物的金属官能化的任何要求。