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11. 发明授权

US07573634B2 Micromechanical mirrors with a high-reflection coating, method for production thereof and use thereof 失效
标题翻译：具有高反射涂层的微机镜，其制造方法和用途
公开(公告)号：US07573634B2
公开(公告)日：2009-08-11
申请号：US11630175
申请日：2005-06-27
申请人： Uwe Jan Schmidt , Thilo Sandner , Harald Schenk , Alexandre Gatto , Minghong Yang , Jörg Heber , Norbert Kaiser
发明人： Uwe Jan Schmidt , Thilo Sandner , Harald Schenk , Alexandre Gatto , Minghong Yang , Jörg Heber , Norbert Kaiser
IPC分类号： G02B5/08
CPC分类号： G02B26/0833 , G02B5/08
摘要： The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with an aluminum layer and a transparent blooming coating. Likewise the invention relates to a method for the production of such micromechanical layers with a high-reflection coating and to the use thereof for the production of microsensors, optical data stores or video and data projection displays.
摘要翻译：本发明涉及具有用于深紫外（DUV）和真空 - 紫外（VUV）光谱范围的高反射涂层的微机械镜，其基于涂覆有铝层和透明喷涂涂层的基底。同样，本发明涉及用于生产具有高反射涂层的这种微机械层的方法及其用于生产微传感器，光学数据存储或视频和数据投影显示器的用途。

12. 发明申请

US20080068704A1 Micromechanical Mirrors with a High-Reflection Coating, Method for Production Thereof and Use Thereof 失效
标题翻译：具有高反射涂层的微机镜，其制造方法及其用途
公开(公告)号：US20080068704A1
公开(公告)日：2008-03-20
申请号：US11630175
申请日：2005-06-27
申请人： Jan-Uwe Schmidt , Thilo Sandner , Harald Schenk , Alexandre Gatto , Minghong Yang , Jorg Heber , Norbert Kaiser
发明人： Jan-Uwe Schmidt , Thilo Sandner , Harald Schenk , Alexandre Gatto , Minghong Yang , Jorg Heber , Norbert Kaiser
IPC分类号： G02B5/08
CPC分类号： G02B26/0833 , G02B5/08
摘要： The invention relates to micromechanical mirrors with a high-reflection coating for the deep-ultraviolet (DUV) and vacuum-ultraviolet (VUV) spectral range, based on a substrate which is coated with an aluminium layer and a transparent blooming coating. Likewise the invention relates to a method for the production of such micromechanical layers with a high-reflection coating and to the use thereof for the production of microsensors, optical data stores or video and data projection displays.
摘要翻译：本发明涉及具有用于深紫外（DUV）和真空 - 紫外（VUV）光谱范围的高反射涂层的微机械镜，其基于涂覆有铝层和透明喷涂涂层的基底。同样，本发明涉及用于生产具有高反射涂层的这种微机械层的方法及其用于生产微传感器，光学数据存储或视频和数据投影显示器的用途。

13. 发明申请

US20070165297A1 Microoptic reflecting component 有权
标题翻译：微光反射组件
公开(公告)号：US20070165297A1
公开(公告)日：2007-07-19
申请号：US11640497
申请日：2006-12-18
申请人： Thilo Sandner , Wolfram Pufe , Harald Schenk
发明人： Thilo Sandner , Wolfram Pufe , Harald Schenk
IPC分类号： G02B26/00
CPC分类号： G02B26/0866 , G02B26/0825
摘要： The invention relates to active microoptic reflecting components for adapting or changing the focal length or focal position in optical systems. It is the object of the invention to make available a miniaturised reflecting microoptic component for focusing or defocusing incident electromagnetic radiation, with which a variation in the focal distance can be achieved simply and at low cost. On the component according to the invention there is an elastically deformably membrane which is formed at least with one reflecting layer comprising a first material or material mixture and at least with one further layer or substrate which is formed from a second material or material mixture. First and second materials or material mixtures have thermal coefficients of expansion which deviate from each other. In addition a heating or temperature control mechanism is present.
摘要翻译：本发明涉及用于适应或改变光学系统中的焦距或焦点位置的有源微光反射部件。本发明的目的是提供一种用于聚焦或散焦入射电磁辐射的小型化反射微光学元件，通过该小型化可以简单且低成本地实现焦距的变化。在根据本发明的部件上，存在可弹性变形的膜，其至少形成有一个包含第一材料或材料混合物的反射层，并且至少形成有由第二材料或材料混合物形成的另一层或基底。第一和第二材料或材料混合物具有彼此偏离的热膨胀系数。此外，存在加热或温度控制机构。

14. 发明授权

US07898071B2 Apparatus and method for housing micromechanical systems 有权
标题翻译：微机械系统的装置和方法
公开(公告)号：US07898071B2
公开(公告)日：2011-03-01
申请号：US11971371
申请日：2008-01-09
申请人： Thor Bakke , Thilo Sandner
发明人： Thor Bakke , Thilo Sandner
IPC分类号： H01L23/006
CPC分类号： B81B7/0067 , B81C2203/0118
摘要： An apparatus for housing a micromechanical system includes a substrate with a surface on which the micromechanical system is formed, a transparent cover and a dry film layer arrangement between the surface of the substrate and the transparent cover. The dry film layer arrangement has an opening, so that the micromechanical system adjoins the opening.
摘要翻译：用于容纳微机械系统的装置包括其上形成有微机械系统的表面的基板，在基板的表面和透明盖之间布置的透明盖和干膜层布置。干膜层布置具有开口，使得微机械系统邻接开口。

15. 发明申请

US20120099175A1 REDUCTION OF THE DYNAMIC DEFORMATION OF TRANSLATIONAL MIRRORS USING INERTIAL MASSES 有权
标题翻译：减少使用实际质量的转换镜的动态变形
公开(公告)号：US20120099175A1
公开(公告)日：2012-04-26
申请号：US13377667
申请日：2010-07-06
申请人： Holger Conrad , Thomas Grasshoff , Denis Jung , Thilo Sandner
发明人： Holger Conrad , Thomas Grasshoff , Denis Jung , Thilo Sandner
IPC分类号： G02B26/00
CPC分类号： G02B26/0833 , B81B3/007 , B81B2201/042 , B81B2203/051 , G02B26/0841
摘要： A micromechanical mirror arrangement comprising a mirror plate (1) which forms a translation mirror, which is connected via at least one holding element (2), preferably two or more holding elements, to a frame structure (3) and is movable in translation relative to this frame structure, characterized in that the connection region (4) of at least one holding element (2), preferably of all holding elements, with the mirror plate (1) is arranged inwardly offset, viewed from the outer margin (5) of the mirror plate toward to the center (6) of the mirror plate.
摘要翻译：一种微机械镜装置，包括形成平移反射镜的镜板（1），所述平板镜经由至少一个保持元件（2）连接，优选地两个或更多个保持元件连接到框架结构（3），并且可平移相对移动该框架结构的特征在于，从外边缘（5）观察，至少一个保持元件（2）的连接区域（4），优选地具有所有保持元件与镜板（1）的镜板朝向镜板的中心（6）。

16. 发明授权

US08147136B2 Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device 有权
标题翻译：具有温度稳定性的微机械装置以及用于在微机械装置上调整限定温度或限定温度过程的方法
公开(公告)号：US08147136B2
公开(公告)日：2012-04-03
申请号：US12058872
申请日：2008-03-31
申请人： Jörg Heber , Thomas Klose , Thilo Sandner , Andreas Bergmann , Christian Gerwig , Thomas Knieling
发明人： Jörg Heber , Thomas Klose , Thilo Sandner , Andreas Bergmann , Christian Gerwig , Thomas Knieling
IPC分类号： G01K1/16 , G01K11/26 , G01K3/04 , G01K3/06 , G01J5/08
CPC分类号： G01J5/061 , G01J5/026 , G01J5/08 , G01J5/0809 , G02B7/008 , G02B26/0816
摘要： A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.
摘要翻译：微机械装置包括微机械功能结构和与微机械功能结构相关联的电磁辐射加热，其形成为在微机械功能结构中引起空间和时间上限定的温度或空间和时间上限定的温度过程。

17. 发明授权

US07929192B2 Method of fabricating a micromechanical structure out of two-dimensional elements and micromechanical device 有权
标题翻译：从二维元件和微机械器件制造微机械结构的方法
公开(公告)号：US07929192B2
公开(公告)日：2011-04-19
申请号：US12058812
申请日：2008-03-31
申请人： Thilo Sandner
发明人： Thilo Sandner
IPC分类号： G02B26/08
CPC分类号： G02B26/0833 , B81B3/0021 , B81B2201/047 , B81B2203/058
摘要： In a method of fabricating a micromechanical structure, first, a deflectably supported two-dimensional structure is formed in a substrate and, then, is arranged in a package such that an integrated micromanipulator is arranged between the package and the two-dimensional structure so as to effect a deflection of the two-dimensional structure out of a plane of the substrate.
摘要翻译：在制造微机械结构的方法中，首先，在衬底中形成可偏转地支撑的二维结构，然后将其布置在封装中，使得集成显微操纵器布置在封装和二维结构之间，以便以使二维结构偏离衬底的平面。

18. 发明授权

US07830577B2 Micromechanical device with adjustable resonant frequency by geometry alteration and method for operating same 有权
标题翻译：具有可变谐振频率的微机械装置及其操作方法
公开(公告)号：US07830577B2
公开(公告)日：2010-11-09
申请号：US11968743
申请日：2008-01-03
申请人： Thomas Grasshoff , Thomas Klose , Thilo Sandner
发明人： Thomas Grasshoff , Thomas Klose , Thilo Sandner
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , B81B3/0086 , H03H9/02338 , H03H9/02393 , H03H2009/02496 , H03H2009/02511 , H03H2009/02527
摘要： A micromechanical device described has an oscillation system with an oscillation body and an elastic suspension, by which the oscillation body is oscillatorily suspended. The elastic suspension has at least two spring beams. An adjuster for adjusting a resonant frequency of the oscillation system by changing the position of the at least two spring beams of the elastic suspension towards each other is provided.
摘要翻译：所描述的微机械装置具有振荡体和弹性悬架的振荡系统，通过该摆动体振动体被振荡地悬挂。弹性悬挂具有至少两个弹簧梁。提供一种用于通过将弹性悬架的至少两个弹簧梁的位置彼此改变来调节振荡系统的谐振频率的调节器。

19. 发明授权

US08873128B2 Reduction of the dynamic deformation of translational mirrors using inertial masses 有权
标题翻译：使用惯性质量减少平移反射镜的动态变形
公开(公告)号：US08873128B2
公开(公告)日：2014-10-28
申请号：US13377667
申请日：2010-07-06
申请人： Holger Conrad , Thomas Grasshoff , Denis Jung , Thilo Sandner
发明人： Holger Conrad , Thomas Grasshoff , Denis Jung , Thilo Sandner
IPC分类号： G02B26/00 , G02B26/10
CPC分类号： G02B26/0833 , B81B3/007 , B81B2201/042 , B81B2203/051 , G02B26/0841
摘要： A micromechanical mirror arrangement comprising a mirror plate (1) which forms a translation mirror, which is connected via at least one holding element (2), preferably two or more holding elements, to a frame structure (3) and is movable in translation relative to this frame structure, characterized in that the connection region (4) of at least one holding element (2), preferably of all holding elements, with the mirror plate (1) is arranged inwardly offset, viewed from the outer margin (5) of the mirror plate toward to the center (6) of the mirror plate.
摘要翻译：一种微机械镜装置，包括形成平移反射镜的镜板（1），所述平板镜经由至少一个保持元件（2）连接，优选地两个或更多个保持元件连接到框架结构（3），并且可平移相对移动该框架结构的特征在于，从外边缘（5）观察，至少一个保持元件（2）的连接区域（4），优选地具有所有保持元件与镜板（1）的镜板朝向镜板的中心（6）。

20. 发明授权

US07841242B2 Deflectable micromechanical system and use thereof 有权
标题翻译：可偏转微机械系统及其应用
公开(公告)号：US07841242B2
公开(公告)日：2010-11-30
申请号：US12162404
申请日：2006-02-03
申请人： Holger Conrad , Thomas Klose , Thilo Sandner
发明人： Holger Conrad , Thomas Klose , Thilo Sandner
IPC分类号： G01B7/16
CPC分类号： G01L9/0002 , G01L1/18 , G01L9/0055
摘要： The invention relates to deflectable micromechanical systems as well as their use in which the deflection of at least one deflectable element can be determined. In accordance with the invention, a deflectable element is held with at least one spring element and at least one unit detecting the deflection is present. It is formed as a piezoresistive sensor with contacts arranged at least at a spacing from one another and in a region deforming on deflection. The contacts are connected to an electrical voltage source. An inhomogeneous electrical field is formed perpendicular to the contact surfaces in the depth direction so that the electrical resistance between contacts varying in dependence on the deflection can be detected as a measure for the position. The deforming region is formed from electrically conductive or semiconductive material.
摘要翻译：本发明涉及可偏转的微机械系统以及其可以确定至少一个可偏转元件的偏转的用途。根据本发明，可挠曲元件被保持有至少一个弹簧元件，并且存在检测偏转的至少一个单元。它形成为压阻传感器，其触点至少彼此间隔开并且在偏转变形的区域中布置。触点连接到电压源。在深度方向上垂直于接触表面形成不均匀的电场，使得可以检测根据偏转而变化的触点之间的电阻作为位置的量度。变形区域由导电或半导体材料形成。

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