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11. 发明授权

US5443346A Wafer conveying system in a clean room 失效
标题翻译：晶圆输送系统在洁净室内
公开(公告)号：US5443346A
公开(公告)日：1995-08-22
申请号：US85109
申请日：1993-07-02
申请人： Masanao Murata , Teppei Yamashita , Tsuyoshi Tanaka , Takahide Hoshiko , Mitsuji Karita , Hitoshi Kawano , Tutomu Shinya
发明人： Masanao Murata , Teppei Yamashita , Tsuyoshi Tanaka , Takahide Hoshiko , Mitsuji Karita , Hitoshi Kawano , Tutomu Shinya
IPC分类号： B65G1/00 , B65G49/07 , H01L21/677
CPC分类号： H01L21/67727 , H01L21/67736 , Y10S414/137 , Y10S414/14
摘要： Disclosed is a wafer conveying system for a clean room which is high in wafer conveying efficiency, and makes it possible to achieve a variety of processing operations with high efficiency. The wafer conveying system in a clean room comprises: an interface equipment cooperating with a conveying system to transfer wafers therebetween which is adapted to convey articles between manufacturing lines; a conveying path extended from the interface equipment; on intra-bay wafer conveying equipment which is moved along the conveying path; and a single or plural wafer processing equipments arranged along the conveying path, thus forming one processing line, the conveying system operating to convey cassettes containing wafers, the interface equipment operating to take a specified number of wafers out of a single or plural cassettes which are delivered to the interface equipment, and place the wafers in an auxiliary cassette provided for the one processing line only, and the intra-bay wafer conveying equipment operating to receive the auxiliary cassette, and move to a specified one of the wafer processing equipments, and to give the wafers to the specified wafer processing equipment and receive wafers therefrom.
摘要翻译：公开了一种晶片输送效率高的洁净室用晶片输送系统，能够以高效率实现各种加工作业。洁净室中的晶片输送系统包括：与输送系统配合以在其间转移晶片的界面设备，其适于在制造线之间输送物品; 从接口设备延伸的输送路径; 在沿着输送路径移动的台架间输送设备上; 以及沿输送路径布置的单个或多个晶片处理设备，从而形成一条处理线，该输送系统用于输送含有晶片的盒，该操作用于从单个或多个盒中取出指定数量的晶片的接口设备传送到接口设备，并且将晶片放置在仅用于一个处理线的辅助盒中，以及操作以接收辅助盒的间隔间晶片输送设备，并移动到指定的一个晶片处理设备，以及将晶片提供给指定的晶片处理设备并从其接收晶片。

12. 发明授权

US06530466B2 Overhead conveyance device and overhead conveyance vehicle 失效
公开(公告)号：US06530466B2
公开(公告)日：2003-03-11
申请号：US10193214
申请日：2002-07-12
申请人： Masanao Murata , Teruya Morita , Hitoshi Kawano
发明人： Masanao Murata , Teruya Morita , Hitoshi Kawano
IPC分类号： B65G2900
CPC分类号： B66C7/12 , B66C11/06 , B66C11/08 , Y10S414/14
摘要： An overhead conveyance device and an overhead conveyance vehicle that can convey a conveying object, while keeping it at a minimum distance from surrounding equipment when the overhead conveying vehicle turns around during conveyance of the conveying object. The overhead conveyance device (1) is so structured that even when a carriage part (6) of the overhead conveyance vehicle (5) enters a branching part (3) for allowing the carriage part to change in traveling direction and turns around, the conveying object (25) grasped by a hand (9) can be kept unchanged in direction.

13. 发明授权

US06427824B1 Overhead conveying device and overhead conveying vehicle 失效
标题翻译：架空输送装置和架空输送车
公开(公告)号：US06427824B1
公开(公告)日：2002-08-06
申请号：US09446194
申请日：1999-12-17
申请人： Masanao Murata , Teruya Morita , Hitoshi Kawano
发明人： Masanao Murata , Teruya Morita , Hitoshi Kawano
IPC分类号： B65G3700
CPC分类号： B66C7/12 , B66C11/06 , B66C11/08 , Y10S414/14
摘要： An overhead conveyance device and an overhead conveyance vehicle that can convey a conveying object, while keeping it at a minimum distance from surrounding equipment when the overhead conveying vehicle turns around during conveyance of the conveying object. The overhead conveyance device (1) is so structured that even when a carriage part (6) of the overhead conveyance vehicle (5) enters a branching part (3) for allowing the carriage part to change in traveling direction and turns around, the conveying object (25) grasped by a hand (9) can be kept unchanged in direction.
摘要翻译：一种架空输送装置和架空输送车辆，其能够在输送物体的输送期间在架空输送车辆转过时将输送物体输送到与周围设备的最小距离处。架空输送装置（1）的结构使得即使当顶棚运输车辆（5）的托架部分（6）进入分支部分（3）以允许托架部分在行进方向上改变并转动时，输送用手（9）抓住的物体（25）可以在方向上保持不变。

14. 发明授权

US6095054A Transport system 失效
标题翻译：运输系统
公开(公告)号：US6095054A
公开(公告)日：2000-08-01
申请号：US52625
申请日：1998-03-31
申请人： Hitoshi Kawano , Masanao Murata , Tanaka Tsuyoshi , Atsushi Okuno
发明人： Hitoshi Kawano , Masanao Murata , Tanaka Tsuyoshi , Atsushi Okuno
IPC分类号： B61B13/00 , B61B13/04 , B61B13/12 , B65G54/02 , B61F13/00 , E01B25/00
CPC分类号： B61B13/04
摘要： A transport system has a track provided along a transport route forming a main route and at least one branch route connected to the main route at a branch point. A first power supply line is provided along the main route; a second power supply line is provided along the branch route and a transport vehicle moves along the track. There is a drive unit for driving the transport vehicle along the track with the drive unit being attached to the transport vehicle, a route selector for selecting a branch route at the branch point and a power receiver for receiving electric power from the first and second power supply lines to supply electric power to the drive unit.
摘要翻译：运输系统沿着形成主路线的运输路线和在分支点处连接到主路线的至少一条分支路线设置轨道。沿着主路线提供第一电源线; 沿着分支路线设置第二供电线路，并且运输车辆沿轨道移动。具有驱动单元，用于沿着轨道驱动运输车辆，其中驱动单元附接到运输车辆;路线选择器，用于选择分支点处的分支路线;以及电力接收器，用于从第一和第二电力接收电力供电线路为驱动单元提供电力。

15. 发明授权

US5332013A Unmanned conveying device in clean room 失效
标题翻译：无尘输送装置在洁净室内
公开(公告)号：US5332013A
公开(公告)日：1994-07-26
申请号：US850668
申请日：1992-03-13
申请人： Masanao Sugita , Hitoshi Kawano , Teppei Yamashita
发明人： Masanao Sugita , Hitoshi Kawano , Teppei Yamashita
IPC分类号： H01L21/673 , H01L21/677 , H05K3/00 , B60L11/00
CPC分类号： H01L21/67389 , H01L21/67393 , H01L21/67724 , H01L21/67736
摘要： An unmanned conveying device for a clean room is capable of restraining a spontaneous oxide film from growing in case that an unmanned carriage is obliged to stop for a long time due to its own cause of a cause at a destination spot while it conveys a semiconductor wafer from one spot to the destination spot. It is a first aspect of the invention to provide the unmanned conveying device which is self-propelled for conveying an object from a ground facility to a destination spot while loading an object to be conveyed thereon, characterized in that the object is accommodated in a container and the container is connected to an inert gas reservoir through a gas supply passage so that the atmosphere in the container can be replaced by a nitrogen gas. It is a second aspect of the invention to provide an unmanned conveying device for a clean room provided with a container for accommodating an object to be conveyed therein, the container being connected to an inert gas reservoir through a gas supply passage so that the air in the container can be replaced by a nitrogen gas, characterized in that the unmanned conveying device has a coupler unit mounted thereon and connected to the gas supply passage and the inert gas reserving source is located on the ground and connected to a coupler unit of a coupler device on the ground through a pipe and the gas supply passage is connected to the inert gas reservoir through both coupler unit.
摘要翻译：用于洁净室的无人输送装置能够抑制自发氧化膜生长，这是因为在传送半导体晶片的过程中由于自身原因造成的原因造成无人驾驶的车辆被长时间停止从一个地方到目的地。本发明的第一方面是提供一种自行推进的无人输送装置，用于将物体从地面设备输送到目的地点，同时装载要运送的物体，其特征在于，所述物体容纳在容器并且容器通过气体供给通道连接到惰性气体储存器，使得容器中的气氛可以用氮气代替。本发明的第二方面是提供一种用于洁净室的无人输送装置，该清洁室设有用于容纳要输送的物体的容器，该容器通过气体供应通道连接到惰性气体储存器，容器可以用氮气代替，其特征在于，无人输送装置具有安装在其上的联接器单元并且连接到气体供应通道，惰性气体储存源位于地面上并连接到耦合器的耦合器单元设备在地面上通过管道，气体供应通道通过两个联接器单元连接到惰性气体储存器。

16. 发明授权

US5892790A Cold crucible induction furnace 失效
标题翻译：冷坩埚感应炉
公开(公告)号：US5892790A
公开(公告)日：1999-04-06
申请号：US939652
申请日：1997-09-29
申请人： Kenji Abiko , Hitoshi Kawano , Masanori Tsuda , Tadahito Nakajima
发明人： Kenji Abiko , Hitoshi Kawano , Masanori Tsuda , Tadahito Nakajima
IPC分类号： F27B14/06 , H05B6/24 , H05B6/32 , H05B5/16
CPC分类号： H05B6/32 , F27B14/063 , H05B6/24
摘要： A cold crucible induction melting furnace is provided with a plurality of segments separated by a plurality of slits that surround a bottom member which together form the melting chamber. Each lower end of each segment is overlapped with and spaced from a short part of a vertically extending side wall of the bottom member so as to form a horizontal gap there between. A radially and outwardly extending flange protrudes from the bottom member side wall below each segment lower end to form a lower gap there between. An induction coil is disposed around and spaced from an outer face of the segments with a lower end adjacent to each of the lower segment ends and an upper end adjacent to an upper part of each segment that is in turn connected with an adjacent upper segment part to form a short circuited part. The radial thickness of each segment from the upper end of the coil to the lower end of the segments is the same and the magnetic flux generated by the induction coil passing through the lower gap and the horizontal gap provides increased magnetic flux density at least adjacent to the region adjacent to the bottom member and the lower ends of the segments.
摘要翻译：冷坩埚感应熔炼炉设置有多个由多个狭缝隔开的段，所述多个狭缝围绕底部构件，所述底部构件一起形成熔化室。每个段的每个下端与底部构件的垂直延伸的侧壁的短部分重叠并间隔开，从而在其之间形成水平间隙。径向和向外延伸的凸缘从每个段下端下方的底部构件侧壁突出，以在其之间形成较小间隙。一个感应线圈设置在该片段的外表面周围并与该片段的外表面间隔开，并具有与每个下段末端相邻的下端，以及与每个片段的上部相邻的上端，该上端又与相邻的上片段连接形成短路部分。从线圈的上端到段的下端的每个段的径向厚度是相同的，并且由感应线圈产生的通过下间隙和水平间隙的磁通量提供至少相邻的线圈的增加的磁通密度邻近底部构件的区域和段的下端。

17. 发明授权

US5283805A Segmented cold-wall induction melting crucible 失效
标题翻译：分段冷壁感应熔化坩埚
公开(公告)号：US5283805A
公开(公告)日：1994-02-01
申请号：US961362
申请日：1992-10-15
申请人： Hitoshi Kawano , Masanori Tsuda , Yasuhiro Nakai
发明人： Hitoshi Kawano , Masanori Tsuda , Yasuhiro Nakai
IPC分类号： F27B14/06 , F27B14/10 , H05B5/16 , H05B11/00
CPC分类号： F27B14/10
摘要： In a segmented water-cooled induction melting crucible mainly used for melting special metals such as reactive metals or alloys, two adjacent segments are coupled as a segment having two legs, one leg having an inlet water passage and the other leg having an outlet water passage, so that these water passages form a one-way water flow path when they are connected. When the two legs are connected at their top portion to form a shorted portion, the lower end of the legs are insulated from each other and from a base forming a bottom of the crucible. Alternatively the two legs can be entirely separated by elongating the slit and the water passage formed in each leg can be connected throgh an insulative, connecting member. In either case, the water pasage in each leg can be reduced to the same size as the inner tube in each segment of a conventional crucible, and by virtue of this construction, both the radial thickness and the width of each segment can be reduced which enables an increase the number of segments in a crucible with the same inner space.
摘要翻译：在主要用于熔化诸如反应性金属或合金的特殊金属的分段水冷感应熔炼坩埚中，两个相邻的段联接为具有两个腿的段，一个腿具有入口水通道，另一个腿具有出口水通道使得这些水通道在连接时形成单向水流路径。当两个腿在其顶部连接以形成短路部分时，腿部的下端彼此绝缘并形成坩埚底部的底座。或者，两条腿可以通过延长狭缝而完全分开，并且每条腿中形成的水通道可以连接在绝缘的连接构件上。在任一情况下，每个腿中的水管可以缩小成与常规坩埚的每个区段中的内管相同的尺寸，并且由于这种结构，可以减小每个区段的径向厚度和宽度，能够增加具有相同内部空间的坩埚中的段的数量。

18. 发明授权

US6049559A Method of refining metal to high degree of purity and high-frequency vacuum induction melting apparatus 有权
标题翻译：精炼金属高纯度方法和高频真空感应熔炼装置
公开(公告)号：US6049559A
公开(公告)日：2000-04-11
申请号：US298899
申请日：1999-04-26
申请人： Kenji Abiko , Hitoshi Kawano , Masanori Tsuda , Yasuhiro Nakai , Tadahito Nakajima , Masanobu Harada , Yoshihiro Ashino
发明人： Kenji Abiko , Hitoshi Kawano , Masanori Tsuda , Yasuhiro Nakai , Tadahito Nakajima , Masanobu Harada , Yoshihiro Ashino
IPC分类号： C21C5/52 , C21C7/10 , C22B9/00 , C22B9/04 , F27B14/04 , F27B14/06 , F27B17/00 , F27D7/06 , F27D9/00 , F27D19/00
CPC分类号： F27B14/063 , C22B9/003 , C22B9/04 , F27B14/04 , F27B17/00 , F27D9/00 , C21C5/5241 , C21C7/10 , F27B2014/045 , F27D2007/066 , F27D2009/0013 , F27D2009/0083 , F27D2019/0003 , Y02P10/216 , Y02P10/253
摘要： A method of refining metal to be processed to a high degree of purity by heat-melting the metal in a melting furnace in the form of a metal crucible placed in a vacuum vessel. The method includes evacuating prior to melting, preheating the inside of the entire vacuum atmosphere including the inner wall surface of the vacuum vessel, component parts inside the vessel and the like in order to keep the total pressure within the vessel at 1.times.10.sup.-8 Torr or lower, and effecting high frequency induction heating while controlling the partial pressure of each of O.sub.2, H.sub.2, CO in the atmosphere inside the vessel. Further, the vacuum vessel, the metal crucible and an induction heating coil attached to the crucible, each of which has double jacket structure, are heated or cooled by supplying circulating heating or cooling water in a water-passage space of each of the vacuum vessel, the metal crucible and the induction heating coil, so that the inside of the melting furnace is baked.
摘要翻译：通过将熔融炉中的金属以放置在真空容器中的金属坩埚的形式进行热熔融来精炼待处理的高纯度金属的方法。该方法包括在熔化之前抽真空，预热包括真空容器的内壁表面，容器内部的组成部分等的整个真空气氛的内部，以便将容器内的总压力保持在1×10 -8乇或降低并实现高频感应加热，同时控制容器内的气氛中的各种O2，H2，CO的分压。此外，通过在每个真空容器的水通道空间中供应循环加热或冷却水，将具有双层护套结构的安装在坩埚上的真空容器，金属坩埚和感应加热线圈加热或冷却，金属坩埚和感应加热线圈，使得熔炉内部被烘烤。

19. 发明授权

US6092678A Overhead hoist transfer 有权
标题翻译：高架起重机转运
公开(公告)号：US6092678A
公开(公告)日：2000-07-25
申请号：US323833
申请日：1999-06-02
申请人： Hitoshi Kawano , Masanao Murata , Susumu Nakagawa , Motonori Inagaki , Toshiyuki Takaoka
发明人： Hitoshi Kawano , Masanao Murata , Susumu Nakagawa , Motonori Inagaki , Toshiyuki Takaoka
IPC分类号： B25J13/08 , B65G17/20 , B66C13/18 , B66C13/48
CPC分类号： H01L21/67733 , H01L21/67736 , H01L21/681
摘要： In an overhead hoist transfer having a moving carriage with a hand portion, which holds a load, elevatably suspended therefrom; and a means for teaching an appointed stop position on a placement base, on which said load is placed, to said moving carriage, LEDs 7a and 7b are installed at the hand portion 6, and a position detecting portion 12 consisting of a lens 12a and PSD 12b is installed at the placement base 53 side, in order to automatically and accurately enable a teaching of position correcting data in a short time without use of any manpower. Further, a teaching portion is installed, which detects a deviation between the present stop position and the above appointed stop position on the basis of the relative position of the hand portion 6 with respect to the placement base, which is obtained by the position detecting portion 12, and carries out a teaching to the moving carriage by, for example, radio, whereby it is not necessary for an operator to carry out a teaching by actually moving the hand portion, wherein it is possible to accurately carry out a teaching of position correcting data in a short time.
摘要翻译：在具有具有手部的移动的支架的顶架式起重机转移中，其保持负载，可升降地悬挂在其上; 以及用于在所述移动托架上放置所述载荷的放置基座上指定指定的停止位置的装置，LED 7a和7b安装在手部6处，以及位置检测部分12，由透镜12a和 PSD 12b安装在放置基座53侧，以便在短时间内自动且准确地实现位置校正数据的教导而不使用任何人力。此外，安装示教部，其基于由手部6相对于配置基座的相对位置来检测当前停止位置与上述指定停止位置之间的偏差，该位置由位置检测部如图12所示，通过例如无线电向移动托架进行教导，由此操作者不需要通过实际移动手部来执行教导，其中可以准确地执行位置的教导在短时间内纠正数据。

20. 发明授权

US6019563A Automated guided vehicle 失效
标题翻译：自动导引车
公开(公告)号：US6019563A
公开(公告)日：2000-02-01
申请号：US59361
申请日：1998-04-14
申请人： Masanao Murata , Tatsuo Tsubaki , Hitoshi Kawano
发明人： Masanao Murata , Tatsuo Tsubaki , Hitoshi Kawano
IPC分类号： B23Q7/14 , B25J5/00 , B25J5/02 , B65G49/07 , H01L21/00 , H01L21/677 , B25J19/00
CPC分类号： H01L21/67724 , B23Q7/1436 , B23Q7/1442 , B25J5/007 , B25J5/02 , H01L21/67259 , H01L21/67736 , G05B2219/37286 , G05B2219/40203 , G05B2219/50393 , Y10S414/14
摘要： An automated guided vehicle includes a transporting portion having an upper surface and a driving device, the transporting portion being movable by the driving device; a transferring device provided on the upper surface of the transporting portion, the transferring device being capable of transferring a workpiece to or from an apparatus; and a mounting portion formed on the upper surface of the transporting portion, the mounting portion having at least two opening portions which allow an operation for transferring the workpiece. In the automated guided vehicle, photosensors are respectively arranged on the opening portions to detect an object which intrudes into a predetermined area or projects from the predetermined area, and a control device monitors a state of the photosensors and controls the transferring device or the driving device in accordance with the state of the photosensors.
摘要翻译：一种自动引导车包括具有上表面和驱动装置的传送部分，该传送部分可由驱动装置移动; 传送装置，其设置在所述传送部的上表面上，所述传送装置能够将工件传送到设备或从设备传送; 以及形成在所述输送部的上表面上的安装部，所述安装部具有至少两个开口部，所述至少两个开口部允许用于传送所述工件的操作。在自动导引车辆中，光敏传感器分别布置在开口部分上以检测入侵到预定区域中的物体或从预定区域突出的物体，并且控制装置监视光传感器的状态并控制传送装置或驱动装置按照照相机的状态。

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