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    • 11. 发明申请
    • Semiconductor device with strain
    • 具有应变的半导体器件
    • US20050285137A1
    • 2005-12-29
    • US10970160
    • 2004-10-22
    • Shigeo Satoh
    • Shigeo Satoh
    • H01L21/3115H01L21/8238H01L29/73
    • H01L29/7843H01L21/31155H01L21/823807H01L21/823828H01L2924/0002H01L2924/00
    • A semiconductor device includes: a semiconductor substrate having a p-MOS region; an element isolation region formed in a surface portion of the semiconductor substrate and defining p-MOS active regions in the p-MOS region; a p-MOS gate electrode structure formed above the semiconductor substrate, traversing the p-MOS active region and defining a p-MOS channel region under the p-MOS gate electrode structure; a compressive stress film selectively formed above the p-MOS active region and covering the p-MOS gate electrode structure; and a stress released region selectively formed above the element isolation region in the p-MOS region and releasing stress in the compressive stress film, wherein a compressive stress along the gate length direction and a tensile stress along the gate width direction are exerted on the p-MOS channel region. The performance of the semiconductor device can be improved by controlling the stress separately for the active region and element isolation region.
    • 半导体器件包括:具有p-MOS区的半导体衬底; 形成在所述半导体衬底的表面部分并限定所述p-MOS区中的p-MOS有源区的元件隔离区; 形成在半导体衬底上方的p-MOS栅极电极结构,穿过p-MOS有源区并在p-MOS栅电极结构下限定p-MOS沟道区; 选择性地形成在p-MOS有源区上方并覆盖p-MOS栅电极结构的压应力膜; 以及选择性地形成在p-MOS区域中的元件隔离区域上方并且释放压缩应力膜中的应力的应力释放区域,其中沿着栅极长度方向的压缩应力和沿着栅极宽度方向的拉伸应力施加在p -MOS通道区域。 通过分别对有源区域和元件隔离区域进行控制来提高半导体器件的性能。
    • 15. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
    • 半导体器件及其制造方法
    • US20110018067A1
    • 2011-01-27
    • US12833279
    • 2010-07-09
    • Akihiro UsujimaShigeo Satoh
    • Akihiro UsujimaShigeo Satoh
    • H01L27/092H01L21/8238
    • H01L21/823892H01L21/823412H01L21/823481H01L21/823493H01L21/823807H01L21/823878
    • A method of manufacturing a semiconductor device includes forming a first and a second isolation insulating film to define a first, a second, a third and a fourth region, forming a first insulating film, implanting a first impurity of a first conductivity type through the first insulating film into the first, the second and the fourth region at a first depth, forming a second insulating film thinner than the first insulating film, implanting a second impurity of a second conductivity type through the second insulating film into the third region at a second depth in the semiconductor substrate, implanting a third impurity of the second conductivity type into the third region at a third depth shallower than the second depth, forming a first transistor of the first conductivity type in the third region, and forming a second transistor of the second conductivity type in the fourth region.
    • 一种制造半导体器件的方法包括:形成第一隔离绝缘膜和第二隔离绝缘膜,以限定第一,第二,第三和第四区域,形成第一绝缘膜,通过第一和第二区域注入第一导电类型的第一杂质; 在第一深度处将第一,第二和第四区域的绝缘膜形成为比第一绝缘膜更薄的第二绝缘膜,在第二绝缘膜中将第二导电类型的第二杂质通过第二绝缘膜注入第三区域 深度在所述半导体衬底中,在比所述第二深度浅的第三深度处将第二导电类型的第三杂质注入所述第三区域,在所述第三区域中形成所述第一导电类型的第一晶体管,以及形成所述第二晶体管, 第四区域的第二导电类型。