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    • 13. 发明授权
    • Method of making semiconductor devices having dielectric isolation
regions
    • 制造具有绝缘隔离区域的半导体器件的方法
    • US4596071A
    • 1986-06-24
    • US640833
    • 1984-08-15
    • Akio Kita
    • Akio Kita
    • H01L21/76H01L21/31H01L21/3105H01L21/762
    • H01L21/76294H01L21/31055
    • A method of making semiconductor devices having fine dielectric element isolation regions is disclosed. The method comprises the steps of preparing a semiconductor substrate of one conductivity type which is in a high impurity concentration; forming on the surface of the semi-conductor substrate an epitaxial layer having the same conductivity type as that of the semiconductor substrate in a low impurity concentration; etching off selected regions of the epitaxial layer so as to form islands of the epitaxial layer; forming a CVD oxide layer all over the surface of the structure obtained by the steps; applying high-molecular material film all over the surface of the oxide layer; and removing both the oxide layer and the high-molecular material film so as to expose the surface of the islands, whereby fine element isolation regions of the oxide layer are obtained between the islands.
    • 公开了一种制造具有精细电介质元件隔离区域的半导体器件的方法。 该方法包括制备高杂质浓度的一种导电型半导体衬底的步骤; 在半导体衬底的表面上形成具有与半导体衬底相同导电类型的外延层,其杂质浓度低; 蚀刻所述外延层的选定区域以形成所述外延层的岛; 在通过该步骤获得的结构的整个表面上形成CVD氧化物层; 在氧化物层的整个表面上施加高分子材料膜; 并且除去氧化物层和高分子材料膜以暴露岛的表面,由此在岛之间获得氧化物层的微细元素隔离区。
    • 16. 发明授权
    • Method of forming semiconductor memory device
    • 形成半导体存储器件的方法
    • US06218257B1
    • 2001-04-17
    • US09007835
    • 1998-01-15
    • Akio Kita
    • Akio Kita
    • H01L2120
    • H01L28/87H01L21/02532H01L21/02576H01L21/0262H01L27/10814H01L28/88H01L28/91H01L28/92
    • Since the capacitor of the semiconductor memory has the storage electrode comprising a shape of the cylindrical structure having rough polysilicon portions on base and sidewall portions thereof, it can increase electrostatic capacitance. Further, since the rough portions of the base and sidewall rough storage electrode layers are respectively formed by independently controlling a condition of Chemical Vapor Deposition, it can easily control formations of the rugged portions of the capacitor, therefore it can achieve the improvement of the productivity of the rough portions. Accordingly, the semiconductor can achieve a stability of a memory operation.
    • 由于半导体存储器的电容器具有包括其基底和侧壁部分上具有粗多晶硅部分的圆柱形结构的形状的存储电极,因此可以增加静电电容。 此外,由于通过独立地控制化学气相沉积的条件分别形成基底和侧壁粗糙储存电极层的粗糙部分,所以可以容易地控制电容器的凹凸部分的形成,从而可以实现生产率的提高 的粗糙部分。 因此,半导体可以实现存储器操作的稳定性。