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    • 15. 发明申请
    • SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
    • 半导体器件及其制造方法
    • US20100102395A1
    • 2010-04-29
    • US12572646
    • 2009-10-02
    • Yoshiki YamamotoYukio NishidaJiro Yugami
    • Yoshiki YamamotoYukio NishidaJiro Yugami
    • H01L27/092H01L21/28H01L21/8238
    • H01L21/823828H01L21/823857
    • Provided is a semiconductor device capable of having a single metal/dual high-k structure with a good shape and having flat band voltages suited for nMOS and pMOS, respectively. The semiconductor device according to the one embodiment of the present invention has a first conductivity type MOSFET and a second conductivity type MOSFET. The first and second conductivity type MOSFETs are each equipped with a first insulating film formed over a semiconductor substrate, a second insulating film formed over the first insulating film and made of an insulating material having a higher dielectric constant than the first insulating film, and a gate electrode formed over the second insulating film and having, as a lower layer of the gate electrode, a metal layer containing a material which diffuses into the second insulating film to control a work function thereof. The second conductivity type MOSFET is equipped further with a diffusion barrier film formed between the first insulating film and the second insulating film to prevent diffusion of a work-function controlling material into the interface of the first insulating film.
    • 提供了能够分别具有适合于nMOS和pMOS的具有良好形状并具有平坦带电压的单个金属/双高k结构的半导体器件。 根据本发明的一个实施例的半导体器件具有第一导电型MOSFET和第二导电型MOSFET。 第一导电型MOSFET和第二导电型MOSFET分别配置有形成在半导体基板上的第一绝缘膜,形成在第一绝缘膜上并且由具有比第一绝缘膜高的介电常数的绝缘材料制成的第二绝缘膜, 栅电极形成在第二绝缘膜上,并且具有作为栅电极的下层的含有扩散到第二绝缘膜中以控制其功函的材料的金属层。 第二导电型MOSFET还具有形成在第一绝缘膜和第二绝缘膜之间的扩散阻挡膜,以防止功函数控制材料扩散到第一绝缘膜的界面中。
    • 19. 发明授权
    • Semiconductor device and manufacturing method thereof
    • 半导体装置及其制造方法
    • US08796780B2
    • 2014-08-05
    • US12572646
    • 2009-10-02
    • Yoshiki YamamotoYukio NishidaJiro Yugami
    • Yoshiki YamamotoYukio NishidaJiro Yugami
    • H01L29/72
    • H01L21/823828H01L21/823857
    • Provided is a semiconductor device capable of having a single metal/dual high-k structure with a good shape and having flat band voltages suited for nMOS and pMOS, respectively. The semiconductor device according to the one embodiment of the present invention has a first conductivity type MOSFET and a second conductivity type MOSFET. The first and second conductivity type MOSFETs are each equipped with a first insulating film formed over a semiconductor substrate, a second insulating film formed over the first insulating film and made of an insulating material having a higher dielectric constant than the first insulating film, and a gate electrode formed over the second insulating film and having, as a lower layer of the gate electrode, a metal layer containing a material which diffuses into the second insulating film to control a work function thereof. The second conductivity type MOSFET is equipped further with a diffusion barrier film formed between the first insulating film and the second insulating film to prevent diffusion of a work-function controlling material into the interface of the first insulating film.
    • 提供了能够分别具有适合于nMOS和pMOS的具有良好形状并具有平坦带电压的单个金属/双高k结构的半导体器件。 根据本发明的一个实施例的半导体器件具有第一导电型MOSFET和第二导电型MOSFET。 第一导电型MOSFET和第二导电型MOSFET分别配置有形成在半导体基板上的第一绝缘膜,形成在第一绝缘膜上并且由具有比第一绝缘膜高的介电常数的绝缘材料制成的第二绝缘膜,以及 栅电极形成在第二绝缘膜上,并且具有作为栅电极的下层的含有扩散到第二绝缘膜中以控制其功函的材料的金属层。 第二导电型MOSFET还具有形成在第一绝缘膜和第二绝缘膜之间的扩散阻挡膜,以防止功函数控制材料扩散到第一绝缘膜的界面中。