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    • 11. 发明申请
    • AVALANCHE PHOTODIODE
    • AVALANCHE光电
    • US20130168793A1
    • 2013-07-04
    • US13819559
    • 2011-09-01
    • Tadao IshibashiSeigo AndoMasahiro NadaYoshifumi MuramotoHaruki Yokoyama
    • Tadao IshibashiSeigo AndoMasahiro NadaYoshifumi MuramotoHaruki Yokoyama
    • H01L31/02
    • H01L31/02002H01L31/022416H01L31/03046H01L31/035281H01L31/1075Y02E10/544
    • An APD is provided with the semi-insulating substrate, a first mesa having a first laminate constitution in which a p-type electrode layer, a p-type light absorbing layer, a light absorbing layer with a low impurity concentration, a band gap inclined layer, a p-type electric field control layer, an avalanche multiplier layer, an n-type electric field control layer, and an electron transit layer with a low impurity concentration are stacked in this order on a surface of the semi-insulating substrate, a second mesa having an outer circumference provided inside an outer circumference of the first mesa as viewed from the laminating direction and having a second laminate constitution in which an n-type electrode buffer layer and an n-type electrode layer are stacked in this order on a surface on the electron transit layer side, and a depletion control region that is provided in layers on the second mesa side relative to the p-type electric field control layer, formed in an encircling portion provided inside an outer circumference of the first mesa and encircling an outer circumference of the second mesa, and prevents the encircling portion of the p-type electric field control layer from being depleted when bias is applied.
    • APD设置有半绝缘基板,第一台面具有第一层叠结构,其中p型电极层,p型光吸收层,具有低杂质浓度的光吸收层,带隙倾斜 层叠,p型电场控制层,雪崩乘法器层,n型电场控制层和具有低杂质浓度的电子传输层依次层叠在半绝缘基板的表面上, 第二台面,其具有从层叠方向观察时设置在第一台面的外周的外周,并且具有第二层叠结构,其中n型电极缓冲层和n型电极层依次层叠在 电子转移层侧的表面和相对于p型电场控制层设置在第二台面侧的层的耗尽控制区域,形成在环状端口 n设置在第一台面的外周内并且围绕第二台面的外周,并且在施加偏压时防止p型电场控制层的环绕部分耗尽。
    • 13. 发明授权
    • Semiconductor optoelectronic waveguide
    • 半导体光电波导
    • US07787736B2
    • 2010-08-31
    • US12219061
    • 2008-07-15
    • Tadao IshibashiSeigo AndoKen Tsuzuki
    • Tadao IshibashiSeigo AndoKen Tsuzuki
    • G02B6/10
    • G02F1/01708B82Y20/00
    • The present invention relates to a semiconductor optoelectronic waveguide having a nin-type hetero structure which is able to stably operate an optical modulator. On the upper and lower surfaces of the core layer determined for the structure so that electro-optical effects are effectively exerted at an operating light wavelength and are provided with intermediate clad layers having a band gap which is greater than that of the core layer 11. Respectively on the upper and the lower surface of the intermediate clad layer are provided the clad layers having the band gap which is greater than those of the intermediate clad layers. On the upper surface of the clad layer are sequentially laminated a p-type layer and an n-type layer. In the applied voltage range used under an operating state, a whole region of the p-type layer and a part or a whole region of the n-type layer are depleted.
    • 本发明涉及能够稳定地操作光调制器的具有n型异质结构的半导体光电波导。 在对于结构确定的芯层的上表面和下表面上,使得电光效应在工作光波长下有效地施加,并且设置有具有比芯层11的带隙大的带隙的中间包层。 在中间包层的上表面和下表面上分别设置具有大于中间包层的带隙的包覆层。 在包覆层的上表面依次层叠p型层和n型层。 在工作状态下使用的施加电压范围内,p型层的整个区域和n型层的一部分或全部区域耗尽。
    • 14. 发明申请
    • Avalanche Photodiode
    • 雪崩光电二极管
    • US20070200141A1
    • 2007-08-30
    • US10587818
    • 2005-02-03
    • Tadao IshibashiSeigo AndoYukihiro Hirota
    • Tadao IshibashiSeigo AndoYukihiro Hirota
    • H01L31/00
    • H01L31/1075
    • An ultra high speed APD capable of realizing reduction in an operating voltage and quantum efficiency enhancement at the same time is provided. Under operating conditions APD, a doping concentration distribution of each light absorbing layer is determined so that a p-type light absorbing layer (16) maintains a p-type neutrality except a part thereof, and a low concentration light absorbing layer (15) is depleted. Moreover, a ratio between a layer thickness WAN of the p-type light absorbing layer (16) and a layer thickness WAD of the low concentration light absorbing layer (15) is determined so that WAD>0.3 μm and a delay time of an element response accompanying a transit of carriers generated in the light absorbing layer by light absorption takes on a local minimum under a condition that a layer thickness WA (=WAN+WAD) of the light absorbing layer is constant.
    • 提供能够同时实现工作电压降低和量子效率提高的超高速APD。 在操作条件APD下,确定每个光吸收层的掺杂浓度分布,使得p型光吸收层(16)除了其一部分之外保持p型中性,并且低浓度光吸收层(15)为 耗尽 此外,p型光吸收层(16)的层厚度W AN AN与低浓度光吸收层(15)的层厚度W SUB / SUB之比 ),使得在光吸收层中通过光吸收产生的载流子的转移伴随的元素响应的延迟时间在层的一个条件下成为局部最小值 光吸收层的厚度W A(= W AN AN + W AD AD)是恒定的。
    • 17. 发明授权
    • Avalanche photodiode
    • 雪崩光电二极管
    • US08575650B2
    • 2013-11-05
    • US13133990
    • 2009-12-11
    • Tadao IshibashiSeigo AndoYoshifumi MuramotoFumito NakajimaHaruki Yokoyama
    • Tadao IshibashiSeigo AndoYoshifumi MuramotoFumito NakajimaHaruki Yokoyama
    • H01L31/107
    • H01L31/1075
    • An electron injected APD with an embedded n electrode structure in which edge breakdown can be suppressed without controlling the doping profile of an n-type region of the embedded n electrode structure with high precision. The APD comprising a buffer layer with a low ionization rate is inserted between an n electrode connecting layer and an avalanche multiplication layer. Specifically, the APD is an electron injected APD in which an n electrode layer, the n electrode connecting layer, the buffer layer, the avalanche multiplication layer, an electric field control layer, a band gap gradient layer, a low-concentration light absorbing layer, a p-type light absorbing layer, and a p electrode layer are sequentially stacked, and a light absorbing portion that includes at least the low-concentration light absorbing layer and the p-type light absorbing layer forms a mesa shape.
    • 具有嵌入式n电极结构的电子注入APD,其中可以抑制边缘击穿而不以高精度控制嵌入式n电极结构的n型区域的掺杂分布。 包括具有低电离速率的缓冲层的APD插入在n电极连接层和雪崩倍增层之间。 具体地,APD是电子注入APD,其中n电极层,n电极连接层,缓冲层,雪崩倍增层,电场控制层,带隙梯度层,低浓度光吸收层 p型光吸收层和ap电极层依次层叠,并且至少包含低浓度光吸收层和p型光吸收层的光吸收部形成台面形状。
    • 19. 发明授权
    • Heterojunction bipolar transistor and integrated circuit device using
the same
    • 异质结双极晶体管和使用其的集成电路器件
    • US5557117A
    • 1996-09-17
    • US241189
    • 1994-05-11
    • Yutaka MatsuokaEiichi SanoKenji KurishimaHiroki NakajimaTadao Ishibashi
    • Yutaka MatsuokaEiichi SanoKenji KurishimaHiroki NakajimaTadao Ishibashi
    • H01L29/205H01L21/331H01L27/144H01L29/08H01L29/73H01L29/737H01L31/10H01L31/11H01L31/0328
    • H01L29/7371H01L27/1443H01L29/0821H01L31/1105
    • A heterojunction bipolar transistor includes a collector contact layer constituted by a high-concentration first semiconductor layer of a first conductivity type formed on a semiconductor substrate, a collector region stacked on the collector contact layer, a base layer constituted by a fifth semiconductor layer of a second conductivity type formed on the collector region, and an emitter layer constituted by a semiconductor layer of the first conductivity type formed on the base layer. The collector region is constituted by a second semiconductor layer, a third semiconductor layer of the second conductivity type having an impurity concentration higher than that of the second semiconductor layer, and a fourth semiconductor layer of the first conductivity type having a band gap energy higher than that of each of the first and second semiconductor layers and an impurity concentration higher than that of the second semiconductor layer, and the fourth semiconductor layer and lower than that of the first semiconductor layer, the third semiconductor layer, and the second semiconductor layer are sequentially formed on the collector contact layer in an order named.
    • 异质结双极晶体管包括由形成在半导体衬底上的第一导电类型的高浓度第一半导体层,堆叠在集电极接触层上的集电极区域构成的集电极接触层,由第五半导体层 形成在集电极区域上的第二导电类型,以及由形成在基极层上的由第一导电类型的半导体层构成的发射极层。 集电极区域由第二半导体层,具有比第二半导体层的杂质浓度高的第二导电类型的第三半导体层构成,第一导电类型的第四半导体层的带隙能量高于 第一半导体层和第二半导体层的第一半导体层和第二半导体层的杂质浓度高于第二半导体层,第四半导体层的第一半导体层和第二半导体层的杂质浓度比第一半导体层的厚度低 在收集器接触层上形成一个命名的顺序。