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    • 12. 发明申请
    • Vacuum Tube And Vacuum Tube Manufacturing Apparatus And Method
    • 真空管及真空管制造装置及方法
    • US20070210715A1
    • 2007-09-13
    • US10594896
    • 2005-03-31
    • Tadahiro OhmiAkihiro Morimoto
    • Tadahiro OhmiAkihiro Morimoto
    • H01J7/02H01J9/38H01J9/46
    • H01J9/395H01J7/02H01J9/38H01J9/385H01J17/20H01J21/00H01J37/18H01J61/20H01J61/24
    • With respect to a vacuum tube having a reduced pressure vessel containing an electric discharge gas sealed therein, problems such as the lowering of discharge efficiency owing to an organic material, moisture or oxygen remaining in the reduced pressure vessel have taken place conventionally. It has been now found that the selection of the number of water molecules, the number of molecules of an organic gas and the number of oxygen molecules remaining in the reduced pressure vessel, in a relation with the number of molecules of a gas contributing the electric discharge allows the reduction of the adverse effect by the above-mentioned remaining gas. Specifically, the selection of the number of molecules of the above electric discharge gas being about ten times that of the above-mentioned remaining gas or more can reduce the adverse effect by the above-mentioned remaining gas.
    • 对于具有密封在其中的放电气体的减压容器的真空管,常规地发生诸如由于有机材料引起的排出效率降低,残留在减压容器中的水分或氧气的问题。 现在已经发现,选择水分子的数量,有机气体的分子数和残留在减压容器中的氧分子的数量与导致电气的气体的分子数的关系 放电允许通过上述剩余气体减少不利影响。 具体而言,选择上述放电气体的分子数为上述剩余气体的10倍以上的分子数量,可以减少上述剩余气体的不利影响。
    • 14. 发明授权
    • Rotary silicon wafer cleaning apparatus
    • 旋转硅片清洗装置
    • US07103990B2
    • 2006-09-12
    • US10498800
    • 2003-09-11
    • Tadahiro OhmiYasuyuki ShiraiTakumi FujitaYukio MinamiNobukazu IkedaAkihiro MorimotoKoji Kawada
    • Tadahiro OhmiYasuyuki ShiraiTakumi FujitaYukio MinamiNobukazu IkedaAkihiro MorimotoKoji Kawada
    • F26B5/08
    • H01L21/67034H01L21/02052
    • It is an object of the present invention to provide a rotation type silicon wafer cleaning device to further raise the stability of a silicon wafer by providing a better hydrogen termination on the silicon wafer after completion of chemical and pure water cleaning treatments.According to the present invention, a rotation type silicon wafer cleaning device has a silicon wafer support/rotation driving mechanism inside the case body for cleaning the silicon wafer at the post chemical cleaning with pure water, drying and hydrogen termination treatments on the outer surface of a silicon wafer is performed by means of installing a silicon wafer drying device comprising a gas supply panel attached to a case body to supply a mixed gas of the hydrogen gas and inactive gas containing a hydrogen gas of more than 0.05%, a mixed gas supply pipe coupled to a gas mixer of the afore-mentioned gas supply panel at one end, a mixed gas heating device to heat the mixed gas in the afore-mentioned gas supply pipe, and a hydrogen radical formation apparatus equipped with a platinum coating film to form hydrogen radical at the gas contacting part where to a high temperature gas heated with the afore-mentioned mixed gas heating device touches, thus to gush out the mixed gas containing hydrogen radical formed with the afore-mentioned radical formation apparatus onto the rotating silicon wafer after cleaning is completed.
    • 本发明的目的是提供一种旋转型硅晶片清洁装置,以在化学和纯净水清洗处理完成之后通过在硅晶片上提供更好的氢终止来进一步提高硅晶片的稳定性。 根据本发明,旋转型硅晶片清洗装置在壳体内部具有硅晶片支撑/旋转驱动机构,用于在后期化学清洗时用纯水清洗硅晶片,在外表面上进行干燥和氢终止处理 通过安装硅晶片干燥装置来执行硅晶片,所述硅晶片干燥装置包括附接到壳体的气体供应板,以供应氢气和含有大于0.05%的氢气的惰性气体的混合气体,混合气体供应 一端连接上述气体供给面板的气体混合器的管道,将上述气体供给管内的混合气体加热的混合气体加热装置以及配备有铂镀膜的氢自由基形成装置, 在与上述混合气体加热装置加热的高温气体接触的气体接触部分处形成氢自由基,从而喷出混合气体 在完成清洁之后,将上述自由基形成装置形成的氢基团固定在旋转的硅晶片上。
    • 16. 发明授权
    • Tube facing machine
    • 管面机
    • US5711197A
    • 1998-01-27
    • US627549
    • 1996-04-04
    • Tadahiro OhmiEiji IdetaAkihiro Morimoto
    • Tadahiro OhmiEiji IdetaAkihiro Morimoto
    • B23B5/00B23B5/16
    • B23B5/163Y10T408/5633Y10T82/22
    • A cutter for facing ends of tubes has a cutting edge perpendicular to the axis of a drive shaft and extending obliquely from a plane containing a reference side face of the cutter. The cutter has a base end portion fitted in a cutter mount groove which is defined by a reference side face a specified distance away from the drive shaft axis. The cutter is positioned as shifted a predetermined distance along the length of the groove, with the cutter reference side face bearing on the groove-defining reference side face, whereby the cutter is adapted to cut the tube end in a direction a predetermined angle outward with respect to a tangential direction of the tube at the cutting position.
    • 用于面对管的端部的切割器具有垂直于驱动轴的切割刃并且从包含切割器的参考侧面的平面倾斜延伸。 切割器具有安装在刀具安装槽中的基端部分,该切削器安装槽由参考侧面与驱动轴轴线规定距离限定。 刀具被定位成沿着槽的长度偏移预定的距离,刀具参考侧面承载在槽限定的基准侧面上,由此刀具适于沿着预定角度的方向向外切割管端, 相对于切割位置处的管的切线方向。