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11. 发明授权

US08100147B2 Particle-measuring system and particle-measuring method 有权
标题翻译：粒子测量系统和粒子测量方法
公开(公告)号：US08100147B2
公开(公告)日：2012-01-24
申请号：US11782090
申请日：2007-07-24
申请人： Hayashi Otsuki , Tsukasa Matsuda , Kyoko Ikeda
发明人： Hayashi Otsuki , Tsukasa Matsuda , Kyoko Ikeda
IPC分类号： B01F5/18
CPC分类号： G01N1/24 , C23C16/4405 , C23C16/4412 , G01N15/06 , G01N2015/0693 , H01L21/67069 , H01L21/67115 , H01L21/67253 , H01L21/68742 , Y10T137/8593 , Y10T137/87652 , Y10T137/8766
摘要： The present invention provides a particle measuring system which is provided in a processing system 40 which generates an atmosphere obtained by exhausting air or a gas in a processing chamber 48 by a vacuum pump 98 and applies a process concerning semiconductor manufacture to a wafer W in the atmosphere, attached to an exhaust pipe 90 which connects an exhaust opening 86 of the processing chamber 48 with the vacuum pump 98, and measures the number of the particles in the exhaust gas, and a measuring method thereof, the system and method providing a processing system and a cleaning method which terminate etching process by determining an end point based on the number of the particles in the exhaust gas and perform cleaning of unnecessary films.
摘要翻译：本发明提供一种粒子测量系统，其设置在处理系统40中，该处理系统40产生通过真空泵98排出处理室48中的空气或气体而获得的气氛，并将与半导体制造有关的工艺应用于晶片W 附着在排气管90上，排气管90将处理室48的排气口86与真空泵98连接，并测量废气中的颗粒数量及其测量方法，该系统和方法提供处理系统和清洁方法，其通过基于废气中的颗粒数量确定终点并执行不需要的膜的清洁来终止蚀刻工艺。

12. 发明授权

US07834739B2 Baggage management gate 有权
标题翻译：行李管理门
公开(公告)号：US07834739B2
公开(公告)日：2010-11-16
申请号：US12076337
申请日：2008-03-17
申请人： Shoji Yamaguchi , Mario Fuse , Yasunori Koda , Kunihiro Takahashi , Hiroyoshi Inoue , Tsukasa Matsuda
发明人： Shoji Yamaguchi , Mario Fuse , Yasunori Koda , Kunihiro Takahashi , Hiroyoshi Inoue , Tsukasa Matsuda
IPC分类号： B60R25/00 , G06F7/04 , G06F7/00
CPC分类号： G01R33/02
摘要： A baggage management gate includes a first reading device and a second reading device, a detecting device, a determining unit, a first opening and closing device and a second opening and closing device. The baggage management gate manages baggage that is restricted to be carried in or out from a predetermined region. And in order away from the region in which the baggage is managed, the first reading device, the second opening and closing device, the detecting device for both the first person and the second person, the first opening and closing device, and the second reading device are arranged in an entrance direction from the passage to the management region in which the baggage is managed.
摘要翻译：行李管理门包括第一读取装置和第二读取装置，检测装置，确定装置，第一打开和关闭装置以及第二打开和关闭装置。行李管理门管理被限制在预定区域内进出的行李。并且为了远离管理行李的区域，第一读取装置，第二打开和关闭装置，用于第一人和第二人的检测装置，第一打开和关闭装置以及第二读取设备沿着通道行进管理区域的入口方向排列。

13. 发明授权

US07667840B2 Particle-measuring system and particle-measuring method 有权
标题翻译：粒子测量系统和粒子测量方法
公开(公告)号：US07667840B2
公开(公告)日：2010-02-23
申请号：US11965357
申请日：2007-12-27
申请人： Hayashi Otsuki , Tsukasa Matsuda , Kyoko Ikeda
发明人： Hayashi Otsuki , Tsukasa Matsuda , Kyoko Ikeda
IPC分类号： G01N21/00
CPC分类号： G01N1/24 , C23C16/4405 , C23C16/4412 , G01N15/06 , G01N2015/0693 , H01L21/67069 , H01L21/67115 , H01L21/67253 , H01L21/68742 , Y10T137/8593 , Y10T137/87652 , Y10T137/8766
摘要： The present invention provides a particle measuring system which is provided in a processing system that generates an atmosphere obtained by exhausting air or a gas in a processing chamber by a vacuum pump and applies a process concerning semiconductor manufacture to a wafer W in the atmosphere, attached to an exhaust pipe which connects an exhaust opening of the processing chamber with the vacuum pump, and measures the number of the particles in the exhaust gas, and a measuring method thereof, the system and method providing a processing system and a cleaning method which terminate etching process by determining an end point based on the number of the particles in the exhaust gas and perform cleaning of unnecessary films.
摘要翻译：本发明提供一种粒子测量系统，其设置在处理系统中，该处理系统产生通过真空泵排出处理室中的空气或气体而获得的气氛，并将关于半导体制造的处理应用于大气中的晶片W，附着涉及将处理室的排气口与真空泵连接并测量排气中的颗粒数的排气管及其测量方法，提供处理系统的系统和方法以及终止的处理室的清洁方法通过基于排气中的颗粒数确定终点并执行不需要的膜的清洁来进行蚀刻处理。

14. 发明授权

US07351285B2 Method and system for forming a variable thickness seed layer 失效
标题翻译：用于形成可变厚度种子层的方法和系统
公开(公告)号：US07351285B2
公开(公告)日：2008-04-01
申请号：US11092266
申请日：2005-03-29
申请人： Tsukasa Matsuda
发明人： Tsukasa Matsuda
IPC分类号： C30B23/00 , C23C16/00 , B05D3/00
CPC分类号： C23C16/18 , C23C16/16 , H01L21/28556 , H01L21/76868 , H01L21/76873
摘要： A method and system for forming a variable thickness seed layer on a substrate for a subsequent metal electrochemical plating process, where the seed layer thickness profile improves uniformity of the electroplated metal layer compared to when using a constant thickness seed layer. The method includes providing a substrate in a process chamber containing a showerhead, with the center of the substrate generally aligned with an inner gas delivery zone of the showerhead and the edge of the substrate generally aligned with an outer gas delivery zone of the showerhead. The method further includes depositing a seed layer on the substrate by exposing the substrate to a first gas containing a metal-containing precursor flowed through the inner gas delivery zone, and exposing the substrate to a second gas flowed through the outer gas delivery zone, whereby the seed layer is deposited with a thickness at the edge of the substrate that is less than the thickness at the center of the substrate.
摘要翻译：一种用于在随后的金属电化学电镀工艺的衬底上形成可变厚度籽晶层的方法和系统，其中与使用恒定厚度的种子层相比，种子层厚度分布改善了电镀金属层的均匀性。该方法包括在包含喷头的处理室中提供衬底，其中衬底的中心大致与喷头的内部气体输送区域对准，并且衬底的边缘与喷头的外部气体输送区域大致对准。该方法还包括通过将衬底暴露于含有流过内部气体输送区的含金属前体的第一气体，并将衬底暴露于流过外部气体输送区的第二气体，从而将衬底层沉积在衬底上，由此籽晶层在衬底的边缘处被沉积成小于衬底中心的厚度。

15. 发明授权

US07344816B2 Image forming method 有权
标题翻译：图像形成方法
公开(公告)号：US07344816B2
公开(公告)日：2008-03-18
申请号：US10940926
申请日：2004-09-15
申请人： Yasuo Matsumura , Tsukasa Matsuda , Kazuhiko Arai , Tetsuo Yamada
发明人： Yasuo Matsumura , Tsukasa Matsuda , Kazuhiko Arai , Tetsuo Yamada
IPC分类号： G03G15/20
CPC分类号： G03G15/2064 , G03G2215/208
摘要： A method for forming an image contains steps of: transferring a toner having a volume average particle diameter of 5 μm or less to a recording medium as a toner image having a monochromatic maximum toner mass per area of 0.35 mg/cm2 or less; and fixing the toner image at a surface temperature of a fixing roll which is 130° C. or less. The toner preferably has 0.02 log(Pa)/° C. or less of a gradient of a storage, elasticity per temperature in a temperature range of from Tm+20° C. to Tm+50° C. Here, Tm represents a melting temperature of a crystalline resin contained in the crystalline toner.
摘要翻译：形成图像的方法包括以下步骤：将具有5μm或更小的体积平均粒径的调色剂转印到记录介质上，作为每单位面积的单色最大调色剂质量为0.35mg / cm 2的调色剂图像， / SUP>以下; 并将调色剂图像定影在130℃或更低的定影辊的表面温度。调色剂优选在Tm + 20℃至Tm + 50℃的温度范围内具有0.02log（℃）/℃或更低的存储梯度，每温度的弹性。这里，Tm表示熔融包含在结晶调色剂中的结晶树脂的温度。

16. 发明申请

US20080013212A1 Magnetic wire and recording medium 有权
标题翻译：磁线和记录介质
公开(公告)号：US20080013212A1
公开(公告)日：2008-01-17
申请号：US11730628
申请日：2007-04-03
申请人： Mario Fuse , Shoji Yamaguchi , Tsukasa Matsuda , Eizo Kurihara , Yasunori Koda , Kunihiro Takahashi
发明人： Mario Fuse , Shoji Yamaguchi , Tsukasa Matsuda , Eizo Kurihara , Yasunori Koda , Kunihiro Takahashi
IPC分类号： G11B5/62
CPC分类号： G11B5/642 , Y10T428/31993 , Y10T428/32
摘要： A magnetic wire includes a magnetic metal wire material having a surface coated with a layer of an insulating material. The magnetic wire has a magnetic coercive force of 30 A/m or less and has a Barkhausen effect.
摘要翻译：磁线包括具有涂覆有绝缘材料层的表面的磁性金属线材料。磁线具有30A / m以下的磁矫顽力，具有巴克豪森效应。

17. 发明申请

US20070281138A1 Electrophotographic recording medium and method of forming image 失效
标题翻译：电子照相记录介质及形成图像的方法
公开(公告)号：US20070281138A1
公开(公告)日：2007-12-06
申请号：US11599294
申请日：2006-11-15
申请人： Eizo Kurihara , Tsukasa Matsuda
发明人： Eizo Kurihara , Tsukasa Matsuda
IPC分类号： G03G15/20 , G03G13/20 , B41M5/00 , B32B7/12
CPC分类号： G03G7/002 , G03G7/0026 , G03G7/0046 , Y10T428/24802 , Y10T428/28 , Y10T428/31504 , Y10T428/31801 , Y10T428/31804
摘要： An electrophotographic recording medium including a substrate and formed on the substrate at least one image receiving layer has a thermoplastic resin, the image receiving layer containing at least one kind of unsaturated fatty acid or an unsaturated fatty acid derivative having a melting point of from about 40° C. to about 120° C.
摘要翻译：一种电子照相记录媒体，包括基板，在基板上形成有至少一个图像接收层，具有热塑性树脂，图像接收层含有至少一种不饱和脂肪酸或不饱和脂肪酸衍生物，其熔点为约40 ℃至约120℃

18. 发明申请

US20070263217A1 PARTICLE-MEASURING SYSTEM AND PARTICLE-MEASURING METHOD 有权
标题翻译：粒子测量系统和粒子测量方法
公开(公告)号：US20070263217A1
公开(公告)日：2007-11-15
申请号：US11782031
申请日：2007-07-24
申请人： Hayashi Otsuki , Tsukasa Matsuda , Kyoko Ikeda
发明人： Hayashi Otsuki , Tsukasa Matsuda , Kyoko Ikeda
IPC分类号： G01N21/00
CPC分类号： G01N1/24 , C23C16/4405 , C23C16/4412 , G01N15/06 , G01N2015/0693 , H01L21/67069 , H01L21/67115 , H01L21/67253 , H01L21/68742 , Y10T137/8593 , Y10T137/87652 , Y10T137/8766
摘要： The present invention provides a particle measuring system which is provided in a processing system 40 which generates an atmosphere obtained by exhausting air or a gas in a processing chamber 48 by a vacuum pump 98 and applies a process concerning semiconductor manufacture to a wafer W in the atmosphere, attached to an exhaust pipe 90 which connects an exhaust opening 86 of the processing chamber 48 with the vacuum pump 98, and measures the number of the particles in the exhaust gas, and a measuring method thereof, the system and method providing a processing system and a cleaning method which terminate etching process by determining an end point based on the number of the particles in the exhaust gas and perform cleaning of unnecessary films.
摘要翻译：本发明提供一种粒子测量系统，其设置在处理系统40中，该处理系统40产生通过真空泵98排出处理室48中的空气或气体而获得的气氛，并将与半导体制造有关的工艺应用于晶片W 附着在排气管90上，排气管90将处理室48的排气口86与真空泵98连接，并测量废气中的颗粒数量及其测量方法，该系统和方法提供处理系统和清洁方法，其通过基于废气中的颗粒数量确定终点并执行不需要的膜的清洁来终止蚀刻工艺。

19. 发明授权

US07273814B2 Method for forming a ruthenium metal layer on a patterned substrate 有权
标题翻译：在图案化基板上形成钌金属层的方法
公开(公告)号：US07273814B2
公开(公告)日：2007-09-25
申请号：US10907022
申请日：2005-03-16
申请人： Tsukasa Matsuda
发明人： Tsukasa Matsuda
IPC分类号： H01L21/44
CPC分类号： H01L21/28556 , C23C16/18 , C23C16/4481 , C23C16/45542 , C23C16/52 , H01L21/28562 , H01L21/76846 , H01L21/76873 , H01L23/53238 , H01L2924/0002 , H01L2924/3011 , H01L2924/00
摘要： A method for forming a ruthenium metal layer includes providing a patterned substrate in a process chamber of a deposition system, where the patterned substrate contains one or more vias or trenches, or combinations thereof, depositing a first ruthenium metal layer on the substrate in an atomic layer deposition process, and depositing a second ruthenium metal layer on the first ruthenium metal layer in a thermal chemical vapor deposition process. The deposited ruthenium metal layer can be used as a diffusion barrier layer, a seed layer for electroplating, or both.
摘要翻译：一种用于形成钌金属层的方法包括在沉积系统的处理室中提供图案化衬底，其中图案化衬底包含一个或多个通孔或沟槽，或其组合，在衬底上以原子形式沉积第一钌金属层层沉积工艺，以及在热化学气相沉积工艺中在第一钌金属层上沉积第二钌金属层。沉积的钌金属层可以用作扩散阻挡层，用于电镀的种子层或两者。

20. 发明申请

US20070146765A1 Recording medium 有权
标题翻译：录音媒体
公开(公告)号：US20070146765A1
公开(公告)日：2007-06-28
申请号：US11583901
申请日：2006-10-20
申请人： Tsukasa Matsuda , Eizo Kurihara , Shoji Yamaguchi , Kunihiro Takahashi , Mario Fuse , Yasunori Koda , Ryuichi Kisaka , Tomotsugu Takahashi
发明人： Tsukasa Matsuda , Eizo Kurihara , Shoji Yamaguchi , Kunihiro Takahashi , Mario Fuse , Yasunori Koda , Ryuichi Kisaka , Tomotsugu Takahashi
IPC分类号： G06K15/00
CPC分类号： G03G7/0093 , G03G7/004 , G03G7/008 , Y10T428/24851 , Y10T428/24934 , Y10T428/32
摘要： A recording medium comprising a magnetic material inside, and having a Taber abrasion amount of 10 mg or less. Also provided is a recording medium comprising a magnetic material inside, and having, in an environment of 23° C. and 50% RH, a surface electroresistivity of 1×109 Ω/sq to 2×1011 Ω/sq and a volume electroresistivity of 1×1010 Ωcm to 2×1012 Ωcm.
摘要翻译：一种记录介质，其内部包含磁性材料，并具有10mg以下的泰伯磨损量。还提供了一种记录介质，其在23℃和50％RH的环境内部具有磁性材料，其表面电阻率为1×10 9/2至2×10 11 欧米加/平方厘米，体积电阻率为1×10 10至2×10 12Ω。

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