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    • 19. 发明授权
    • Pixel, a storage capacitor, and a method for forming the same
    • 像素,存储电容器及其形成方法
    • US08890147B2
    • 2014-11-18
    • US12048631
    • 2008-03-14
    • Yi-Sheng Cheng
    • Yi-Sheng Cheng
    • H01L27/32H01L27/13G02F1/1362H01L27/12
    • H01L27/1255G02F1/136213H01L27/1214H01L27/1259H01L27/1288H01L27/13
    • A pixel, a storage capacitor, and a method for forming the same. The storage capacitor formed on a substrate comprises a semiconductor layer, a first dielectric layer, a first conductive layer, a second dielectric layer and a second conductive layer. The semiconductor layer is formed on the substrate wherein the semiconductor layer and the substrate are covered by the first dielectric layer. The first conductive layer is formed on a part of the first dielectric layer. The second dielectric layer is formed on the first conductive layer, and the lateral side of the stacking structure including the second dielectric layer and the first conductive layer has a taper shaped. The second conductive layer is formed on a part of the second dielectric layer.
    • 像素,存储电容器及其形成方法。 形成在基板上的存储电容器包括半导体层,第一介电层,第一导电层,第二介电层和第二导电层。 半导体层形成在基板上,其中半导体层和基板被第一介电层覆盖。 第一导电层形成在第一介电层的一部分上。 第二电介质层形成在第一导电层上,并且包括第二电介质层和第一导电层的堆叠结构的横向侧具有锥形。 第二导电层形成在第二电介质层的一部分上。