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    • 12. 发明公开
    • ACCELERATION SENSOR
    • BESCHLEUNIGUNGSSENSOR
    • EP0762130A4
    • 1998-12-02
    • EP95919625
    • 1995-05-24
    • TOKAI RIKA CO LTD
    • IWATA HITOSHIKOGISO KATSUYAKINOSHITA KENICHI
    • G01P15/02G01P15/00G01P15/08G01P15/12
    • G01P15/006G01P15/08G01P15/12G01P15/123G01P15/18
    • An acceleration sensor (1) is provided with a rectangular parallelepiped case (2). A circuit board (3) is fixed in the case (2) and a sensor chip (5) provided with a diffusion strain gauge (5b) is fixed to the circuit board (3). A cylindrical acceleration selecting section (13) is provided on the upper surface of the case (2), with the center axis of the section (13) being oriented in x-direction. In addition, a cylindrical pressure transmitting section (14) is formed on the upper surface of the case (2), and an opening above the sensor chip (5) is communicating with the inside of the selecting section (13) through the transmitting section (14). In addition, the opening above the chip (5), transmitting section (14), and selecting section (13) are filled up with a silicon gel (10).
    • 加速度传感器(1)具有长方体壳体(2)。 电路板(3)固定在壳体(2)中,并且设置有扩散应变仪(5b)的传感器芯片(5)固定到电路板(3)。 圆柱形加速度选择部分(13)设置在壳体(2)的上表面上,部分(13)的中心轴线在x方向上取向。 另外,在壳体(2)的上表面上形成有圆筒状的压力传递部(14),传感器芯片(5)的上方的开口部通过传递部与选择部(13)的内部连通 (14)。 另外,芯片(5),发射部分(14)和选择部分(13)上方的开口用硅胶(10)填充。
    • 13. 发明专利
    • Magnetometric sensor
    • 磁电传感器
    • JP2005337810A
    • 2005-12-08
    • JP2004155090
    • 2004-05-25
    • Tokai Rika Co Ltd株式会社東海理化電機製作所
    • ISHIZAKI YOICHIKOGISO KATSUYA
    • G01R33/09G01B7/14G01D3/02G01D5/14G01D5/16H01L43/08
    • G01D5/145B82Y25/00G01D3/021G01R33/093
    • PROBLEM TO BE SOLVED: To provide a magnetometric sensor capable of suppressing a change with time of an offset voltage.
      SOLUTION: This magnetometric sensor 1 detects a change of the direction of a magnetic field based on a change of each electric resistance value of a plurality of magnetic resistance elements 11-14 corresponding to the change of the direction of the magnetic field. The magnetometric sensor 1 is provided with heat-treated parts 31a-34a, 41a-44a melted by application of heat corresponding to each of all the magnetic resistance elements 11-14 constituting the magnetometric sensor 1. Namely, when manufacturing the magnetometric sensor 1, the heat-treated parts 31a-34a, 41a-44a are provided prior to trimming.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供能够抑制偏移电压随时间变化的磁力计传感器。 解决方案:该磁力计传感器1基于与磁场方向的变化相对应的多个磁阻元件11-14的每个电阻值的变化来检测磁场方向的变化。 磁测计传感器1设置有通过施加与构成磁力计传感器1的所有磁阻元件11-14中的每一个相对应的热而熔化的热处理部31a-34a,41a-44a。即,当制造磁测计传感器1时, 在修整之前设置热处理部31a-34a,41a-44a。 版权所有(C)2006,JPO&NCIPI