专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明申请

US20070002323A1 Mark position detection apparatus 有权
标题翻译：标记位置检测装置
公开(公告)号：US20070002323A1
公开(公告)日：2007-01-04
申请号：US11516542
申请日：2006-09-07
申请人： Tatsuo Fukui , Takeshi Endo
发明人： Tatsuo Fukui , Takeshi Endo
IPC分类号： G01B11/00
CPC分类号： G03F9/7088
摘要： A mark position detection apparatus has an illumination optical system for illuminating a measurement mark with illumination light and an imaging optical system for converging light reflected from the measurement mark to form an image of the measurement mark on an image pickup apparatus. The mark position detection apparatus measures a positional displacement of the measurement mark by processing an image signal obtained by the image pickup apparatus. The mark position detection apparatus has an optical element provided in the illumination optical system for compensating a difference in asymmetry of the image signal that depends on the wavelength of the illumination light.
摘要翻译：标记位置检测装置具有照明用照明光的照明光学系统和用于会聚从测量标记反射的光的成像光学系统，以在摄像装置上形成测量标记的图像。标记位置检测装置通过处理由图像拾取装置获得的图像信号来测量测量标记的位置偏移。标记位置检测装置具有设置在照明光学系统中的光学元件，用于补偿取决于照明光的波长的图像信号的不对称性差异。

12. 发明授权

US06975399B2 mark position detecting apparatus 有权
标题翻译：标记位置检测装置
公开(公告)号：US06975399B2
公开(公告)日：2005-12-13
申请号：US10291680
申请日：2002-11-12
申请人： Tatsuo Fukui
发明人： Tatsuo Fukui
IPC分类号： G03F9/00 , G01B11/14 , G01B11/00
CPC分类号： G03F9/7088
摘要： A mark position detecting apparatus includes: an illuminating unit that illuminates a mark on a substrate; an image forming optical system that forms an image of the mark with light from the mark; an adjustment unit that adjusts distortion manifesting at the image forming optical system; an image capturing unit that captures the image of the mark formed by the image forming optical system in which the distortion has been adjusted and outputs image signals; and a calculation unit that calculates a substantial central position of the mark based upon the image signals output by the image capturing unit.
摘要翻译：标记位置检测装置包括：照亮基板上的标记的照明单元; 用来自标记的光形成标记图像的成像光学系统; 调整单元，调整在图像形成光学系统中显示的失真; 拍摄由已经调整了失真的图像形成光学系统形成的标记的图像并输出图像信号的图像拍摄单元; 以及计算单元，其基于由图像捕获单元输出的图像信号计算标记的实质中心位置。

13. 发明授权

US5526169A Electro-optical modulator 失效
标题翻译：电光调制器
公开(公告)号：US5526169A
公开(公告)日：1996-06-11
申请号：US321921
申请日：1994-10-12
申请人： Hiroki Kikuchi , Asif A. Godil , Tatsuo Fukui
发明人： Hiroki Kikuchi , Asif A. Godil , Tatsuo Fukui
IPC分类号： G02F1/03
CPC分类号： G02F1/0316 , G02F2201/12
摘要： An electro-optical modulator has an electro-optical crystal having an optical path, and a pair of electrodes disposed one on each side of the optical path for applying a signal voltage therebetween. At least one of the electrodes is formed on a side surface of a groove defined along the optical path of the electro-optical crystal.
摘要翻译：电光调制器具有具有光路的电光晶体，以及设置在光路两侧的一对电极，用于在其间施加信号电压。至少一个电极形成在沿着电光晶体的光路限定的凹槽的侧表面上。

14. 发明授权

US08547559B2 Detection method and detection apparatus 有权
公开(公告)号：US08547559B2
公开(公告)日：2013-10-01
申请号：US13568897
申请日：2012-08-07
申请人： Yoshiaki Kito , Masanori Arai , Tatsuo Fukui
发明人： Yoshiaki Kito , Masanori Arai , Tatsuo Fukui
IPC分类号： G02B13/14
CPC分类号： G01B11/14 , G01B11/028 , H01L21/67092 , H01L21/681 , H01L22/12
摘要： A detection method of detecting a position of an uppermost substrate of a plurality of substrates stacked on each other includes applying illumination to a region covering a portion of an edge of the uppermost substrate and a portion of a lower substrate stacked with the uppermost substrate, identifying a position of the edge of the uppermost substrate based on a position of a step-like portion present in the region due to a step formed between the uppermost substrate and the lower substrate, and identifying a position of the uppermost substrate based on the position of the edge of the uppermost substrate.

15. 发明授权

US08520188B2 Illumination apparatus for efficiently gathering illumination light 有权
标题翻译：用于有效地收集照明光的照明装置
公开(公告)号：US08520188B2
公开(公告)日：2013-08-27
申请号：US12805213
申请日：2010-07-19
申请人： Tatsuo Fukui , Masaki Kato
发明人： Tatsuo Fukui , Masaki Kato
IPC分类号： G03B27/42
CPC分类号： G03F7/70208 , G03F7/7005
摘要： An illumination apparatus includes a light guide fiber receiving illumination light, which is generated by first to third light sources, with first to third entrances and emitting at least part of the illumination light received by each entrance from a common exit. A second illumination relay optical system optically relays the illumination light from the second light source to form a first light beam having a first angle of incidence and sends the first light beam to the second entrance. First and third illumination relay optical systems optically relay the illumination light from the first and third light sources to form a second light beam having a second angle of incidence differing from the first angle of incidence and send the second light beam to the first and third entrances.
摘要翻译：照明装置包括：光导纤维，其由第一至第三光源产生，具有第一至第三入射并且从公共出口发射由每个入口接收的照明光的至少一部分的照明光。第二照明继电器光学系统光学地中继来自第二光源的照明光，以形成具有第一入射角的第一光束并将第一光束发送到第二入口。第一和第三照明继电器光学系统光学地中继来自第一和第三光源的照明光，以形成具有与第一入射角不同的第二入射角的第二光束，并将第二光束发送到第一入口和第三入口。

16. 发明申请

US20060082775A1 Mark position detecting apparatus 审中-公开
标题翻译：标记位置检测装置
公开(公告)号：US20060082775A1
公开(公告)日：2006-04-20
申请号：US11296422
申请日：2005-12-08
申请人： Tatsuo Fukui
发明人： Tatsuo Fukui
IPC分类号： G01B11/00
CPC分类号： G03F9/7088 , G03F7/70258 , G03F7/706 , G03F7/70633
摘要： A mark position detecting apparatus includes: an illuminating unit that illuminates a mark on a substrate; an image forming optical system that forms an image of the mark with light from the mark; an adjustment unit that adjusts distortion manifesting at the image forming optical system; an image capturing unit that captures the image of the mark formed by the image forming optical system in which the distortion has been adjusted and outputs image signals; and a calculation unit that calculates a substantial central position of the mark based upon the image signals output by the image capturing unit.
摘要翻译：标记位置检测装置包括：照亮基板上的标记的照明单元; 用来自标记的光形成标记图像的成像光学系统; 调整单元，调整在图像形成光学系统中显示的失真; 拍摄由已经调整了失真的图像形成光学系统形成的标记的图像并输出图像信号的图像拍摄单元; 以及计算单元，其基于由图像捕获单元输出的图像信号计算标记的实质中心位置。

17. 发明授权

US06760146B2 Light modulation element, GLV device, and laser display 失效
标题翻译：光调制元件，GLV器件和激光显示器
公开(公告)号：US06760146B2
公开(公告)日：2004-07-06
申请号：US10189417
申请日：2002-07-08
申请人： Koichi Ikeda , Tatsuo Fukui
发明人： Koichi Ikeda , Tatsuo Fukui
IPC分类号： G02B2600
CPC分类号： G02B26/0808
摘要： A light-modulation element is constituted as a light-modulation element for constituting a GLV device and has the same constitution as the conventional light-modulation element except for differing in the structure of the combined light-reflective film and membrane-side electrode of a membrane. The combined light-reflective film and membrane-side electrode is composed of a two-layer metallic film forming a TiN film of 10 nm to 70 nm in thickness provided as a lower layer and an Al film of 50 nm to 150 nm in thickness provided thereon. In the combined light-reflective film and membrane-side electrode, the Al film has a smooth reflective surface and a high light-reflectance, so that the light-utilization efficiency of the light-modulation element is high.
摘要翻译：光调制元件构成为用于构成GLV器件的光调制元件，并且具有与常规的光调制元件相同的结构，除了组合的光反射膜和膜侧电极的结构不同之外膜。组合的光反射膜和膜侧电极由形成设置为下层的厚度为10nm至70nm的TiN膜的两层金属膜和厚度为50nm至150nm的Al膜构成，上。在组合的光反射膜和膜侧电极中，Al膜具有平滑的反射表面和高的光反射率，使得光调制元件的光利用效率高。

18. 发明授权

US08305556B2 Projection optical system, exposure apparatus, exposure method, display manufacturing method, mask, and mask manufacturing method 有权
标题翻译：投影光学系统，曝光装置，曝光方法，显示制造方法，掩模和掩模制造方法
公开(公告)号：US08305556B2
公开(公告)日：2012-11-06
申请号：US12190260
申请日：2008-08-12
申请人： Masato Kumazawa , Tatsuo Fukui
发明人： Masato Kumazawa , Tatsuo Fukui
IPC分类号： G03B27/44 , G03B27/00 , G03B27/42
CPC分类号： G02B17/0804 , G03F1/144 , G03F7/70275 , G03F7/70791 , G03F9/7084
摘要： An exposure apparatus of the present invention is an exposure apparatus for, while moving a first object M and a second object P along a scanning direction, performing projection exposure on the second object, which has a first projection optical system PL10 for forming an enlargement image of a portion on the first object in a first region being a partial region on the second object, and a second projection optical system PL11 for forming an enlargement image of a different portion from the portion on the first object in a second region different from the partial region on the second object, and which also has a first stage MST holding the first object and making at least one of the portion and the different portion of the first object movable along the non-scanning direction, wherein the first region and the second region are arranged at a predetermined interval along the non-scanning direction intersecting with the scanning direction.
摘要翻译：本发明的曝光装置是用于在第一物体M和第二物体P沿着扫描方向移动的同时对第二物体进行投射曝光的曝光装置，该第二物体具有用于形成放大图像的第一投影光学系统PL10 在第一区域中的第一区域上的部分是第二物体上的部分区域;以及第二投影光学系统PL11，用于在不同于第二物体的第二区域中形成与第一物体上的部分不同部分的放大图像并且还具有保持第一物体的第一级MST，并且使得第一物体的部分和不同部分中的至少一个沿着非扫描方向可移动，其中第一区域和第二物体区域沿着与扫描方向相交的非扫描方向以预定间隔布置。

19. 发明申请

US20070258084A1 Focal Point Detection Device 有权
标题翻译：焦点检测装置
公开(公告)号：US20070258084A1
公开(公告)日：2007-11-08
申请号：US11661399
申请日：2005-10-17
申请人： Tatsuo Fukui
发明人： Tatsuo Fukui
IPC分类号： G01J1/04
CPC分类号： G02B21/247 , G02B27/0043 , G03F7/70641
摘要： An object of the present invention is to provide a focal point detection apparatus capable of enlarging a pull-in range of an auto-focus operation easily. To attain the above-stated object, the focal point detection apparatus includes: an illumination part illuminating an object plane (11) via a first visual field stop 16; a first image-forming part (19, 20, 41) forming an intermediate image of the first visual field stop on a positioning plane of a second visual field stop 41 based on light L2 emitted from the object plane, and transmitting the intermediate image without blocking it with the second visual field stop when the object plane is situated within a specified range containing a focused focal plane, and blocking a portion of the intermediate image using the second visual field stop when the object plane is situated outside the specified range, with the remaining portion being transmitted; a second image-forming part (42 to 46) dividing into two parts the final image of the first visual field stop based on light L5 from the first image-forming part; and a generating part (47, 48) detecting a gap between the final images that were divided into two and generating a focusing signal responsive to a locational relationship of the object plane to the focused focal plane.
摘要翻译：本发明的目的是提供一种能够容易地扩大自动聚焦操作的拉入范围的焦点检测装置。为了实现上述目的，焦点检测装置包括：经由第一视场停止部16照射物面（11）的照明部; 基于从所述物平面发射的光L 2，在第二视场停止器41的定位平面上形成所述第一视场停止器的中间图像的第一图像形成部件（19,20,41），并且传送所述中间图像当对象平面位于包含聚焦焦平面的指定范围内时，不阻挡第二视野停止，并且当物平面位于指定范围之外时，使用第二视野停止中断图像的一部分，剩余部分被传输; 基于来自第一图像形成部分的光线L 5将第一视野停止的最终图像分为两部分的第二图像形成部分（42至46）以及生成部件（47,48），其检测被分成两个的最终图像之间的间隙，并且响应于物平面与聚焦焦平面的位置关系产生聚焦信号。

20. 发明授权

US07212559B2 Optical resonator and laser oscillator 失效
标题翻译：光谐振器和激光振荡器
公开(公告)号：US07212559B2
公开(公告)日：2007-05-01
申请号：US10787078
申请日：2004-02-27
申请人： Kazuya Hayashibe , Masayuki Morita , Tatsuo Fukui , Yutaka Imai
发明人： Kazuya Hayashibe , Masayuki Morita , Tatsuo Fukui , Yutaka Imai
IPC分类号： H01S3/08
CPC分类号： H01S3/0627 , H01S3/0604 , H01S3/08031 , H01S3/08059 , H01S3/1611 , H01S3/1643
摘要： An optical resonator includes a first substrate and a second substrate which face each other, the first substrate having a flat main surface on which a first reflective mirror is provided and the second substrate having a concave portion on which a second reflective mirror is provided and a flat portion which surrounds the concave portion. The main surface of the first substrate and the flat portion of the second substrate are bondable. In addition, a laser oscillator includes a solid-state laser medium and a substrate, the solid-state laser medium having a main surface on which a first reflective mirror is provided and the substrate having a concave portion on which a second mirror is provided and a flat portion which surrounds the concave portion. The first and the second reflective mirrors serve as a laser resonator.
摘要翻译：光谐振器包括彼此面对的第一基板和第二基板，第一基板具有平坦的主表面，第一反射镜设置在该主表面上，第二基板具有设置有第二反射镜的凹部，围绕凹部的平坦部。第一基板的主表面和第二基板的平坦部分是可接合的。此外，激光振荡器包括固体激光介质和基板，固体激光介质具有设置有第一反射镜的主表面，并且具有凹部的基板设置有第二反射镜，围绕该凹部的平坦部。第一和第二反射镜用作激光谐振器。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式