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    • 18. 发明授权
    • Method for configuring gas supply for electronics fabrication facilities
    • 电子制造设备供气配置方法
    • US08055365B2
    • 2011-11-08
    • US12415221
    • 2009-03-31
    • Jeremy Michael CabralShrikar Chakravarti
    • Jeremy Michael CabralShrikar Chakravarti
    • G06Q10/00G05B13/02G06F19/00G06F17/50C25F1/00B08B5/00
    • G05B19/41885G05B2219/45031G06Q10/04G06Q10/1097Y02P90/26
    • A system for supplying a reagent to multiple tools in an electronics fabrication facility is configured using a demand probability distribution. In specific examples the reagent is a non-atmospheric or a specialty gas and the demand probability distribution is developed using Monte Carlo statistical techniques. In one embodiment, a method for configuring a reagent supply system for an electronic device manufacturing facility is provided. The method includes (a) collecting representative information for process tools within the fabrication facility which use the reagent; (b) creating a simulation of process tool operation to model an overall demand profile for the process tools; (c) creating a statistical probability distribution of the reagent demand by the process tools using data from the model; and (d) correlating data from the probability distribution with supply system characterization data to configure the supply system.
    • 使用需求概率分布来配置用于向电子制造设备中的多个工具提供试剂的系统。 在具体实例中,试剂是非大气压或特殊气体,并且使用蒙特卡罗统计技术开发需求概率分布。 在一个实施例中,提供了一种用于配置电子设备制造设备的试剂供应系统的方法。 该方法包括(a)收集使用该试剂的制造设备内的工艺工具的代表信息; (b)创建过程工具操作的模拟,以模拟过程工具的整体需求概况; (c)使用来自模型的数据,通过处理工具创建试剂需求的统计概率分布; 和(d)将来自概率分布的数据与供应系统表征数据相关联以配置供应系统。