会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 11. 发明授权
    • Attachment and articles using same
    • 附件和文章使用相同
    • US07287574B2
    • 2007-10-30
    • US10502813
    • 2003-02-10
    • Sameer DesaiDaniel R. DomenNorman Woodworth
    • Sameer DesaiDaniel R. DomenNorman Woodworth
    • F28F9/00
    • F28D1/0435F28F9/002F28F2275/085Y10S165/916
    • There is disclosed an attachment (12) suitable for attaching a first component of an article to a second component of the article. The attachment preferably includes a flange portion (20) extending from the first component and one, but preferably, a pair of flange members (22) extending from the second component. The flange portion (12) and the flange members (22) typically interferingly engage one another for attaching the first component to the second component. It has been found that the attachment provided in the present invention is particularly effective for attaching a heat exchanger (14) to another component such as a shroud or another heat exchanger (16) together for forming a heat exchanger assembly (10).
    • 公开了适于将制品的第一部件附着到制品的第二部件的附件(12)。 附件优选地包括从第一部件延伸的凸缘部分(20),并且优选地包括从第二部件延伸的一对凸缘部件(22)。 凸缘部分(12)和凸缘构件(22)通常彼此干涉地接合以将第一部件附接到第二部件。 已经发现,在本发明中提供的附件对于将热交换器(14)附接到另一个部件(例如护罩或另一个热交换器(16))在一起以形成热交换器组件(10)是特别有效的。
    • 13. 发明授权
    • Apparatus for improving barrier layer adhesion to HDP-FSG thin films
    • 用于改善与HDP-FSG薄膜的屏障层粘附性的装置
    • US06803325B2
    • 2004-10-12
    • US10120713
    • 2002-04-10
    • Hichem M'SaadDana TribulaManoj VellaikalFarhad MoghadamSameer Desai
    • Hichem M'SaadDana TribulaManoj VellaikalFarhad MoghadamSameer Desai
    • H01L2131
    • H01L21/02131C23C16/401H01L21/02211H01L21/02274H01L21/02304H01L21/02362H01L21/31629
    • A method of formation of a damascene FSG film with good adhesion to silicon nitride in an HDP-CVD system. Silane (SiH4), silicon tetrafluoride (SiF4), oxygen (O2) and argon (Ar) are used as the reactant gases. SiH4, SiF4, and O2 react to form the FSG. Ar is introduced to promote gas dissociation. All four gases are used for depositing most of the FSG film. SiH4 is not used during deposition of the interfacial part of the FSG film. The interfacial part of the FSG film refers either to the topmost portion, if silicon nitride is to be deposited on top of the FSG or the bottom portion if the FSG is to be deposited on top of silicon nitride. Using SiH4 with the SiF4 tends to mitigate the destructive effects of SiF4 throughout most of the deposition. By removing the SiH4 from the deposition of the interfacial part of the FSG film less hydrogen is incorporated into the film in the interfacial region and adhesion to overlying or underlying silicon nitride is improved.
    • 在HDP-CVD系统中形成对氮化硅具有良好粘附性的镶嵌FSG膜的方法。 使用硅烷(SiH 4),四氟化硅(SiF 4),氧(O 2)和氩(Ar)作为反应气体。 SiH4,SiF4和O2反应形成FSG。 引入Ar来促进气体分解。 所有四种气体都用于沉积大部分FSG膜。 在沉积FSG膜的界面部分期间不使用SiH4。 如果要将FSG沉积在氮化硅的顶部,则FSG膜的界面部分指的是最高部分,如果氮化硅沉积在FSG或底部的顶部。 SiF4与SiF4的共同作用倾向于减少SiF4在大部分沉积过程中的破坏作用。 通过从FSG膜的界面部分的沉积中除去SiH 4,在界面区域中较少的氢被引入到膜中,并且改善了覆盖或下面的氮化硅的粘合性。
    • 19. 发明授权
    • Method for improving barrier layer adhesion to HDP-FSG thin films
    • 改善与HDP-FSG薄膜的隔离层粘附性的方法
    • US06410457B1
    • 2002-06-25
    • US09569744
    • 2000-05-11
    • Hichem M'SaadDana TribulaManoj VellaikalFarhad MoghadamSameer Desai
    • Hichem M'SaadDana TribulaManoj VellaikalFarhad MoghadamSameer Desai
    • H01L2131
    • H01L21/02131C23C16/401H01L21/02211H01L21/02274H01L21/02304H01L21/02362H01L21/31629
    • A method of formation of a damascene FSG film with good adhesion to silicon nitride in an HDP-CVD system. Silane (SiH4), silicon tetrafluoride (SiF4), oxygen (O2) and argon (Ar) are used as the reactant gases. SiH4, SiF4, and O2 react to form the FSG. Ar is introduced to promote gas dissociation. All four gases are used for depositing most of the FSG film. SiH4 is not used during deposition of the interfacial part of the FSG film. The interfacial part of the FSG film refers either to the topmost portion, if silicon nitride is to be deposited on top of the FSG or the bottom portion if the FSG is to be deposited on top of silicon nitride. Using SiH4 with the SiF4 tends to mitigate the destructive effects of SiF4 throughout most of the deposition. By removing the SiH4 from the deposition of the interfacial part of the FSG film less hydrogen is incorporated into the film in the interfacial region and adhesion to overlying or underlying silicon nitride is improved.
    • 在HDP-CVD系统中形成对氮化硅具有良好粘附性的镶嵌FSG膜的方法。 使用硅烷(SiH 4),四氟化硅(SiF 4),氧(O 2)和氩(Ar)作为反应气体。 SiH4,SiF4和O2反应形成FSG。 引入Ar来促进气体分解。 所有四种气体都用于沉积大部分FSG膜。 在沉积FSG膜的界面部分期间不使用SiH4。 如果要将FSG沉积在氮化硅的顶部,则FSG膜的界面部分指的是最高部分,如果氮化硅沉积在FSG或底部的顶部。 SiF4与SiF4的共同作用倾向于减少SiF4在大部分沉积过程中的破坏作用。 通过从FSG膜的界面部分的沉积中除去SiH 4,在界面区域中较少的氢被引入到膜中,并且改善了覆盖或下面的氮化硅的粘合性。