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11. 发明申请

US20170005045A1 SEMICONDUCTOR DEVICE AND METHOD 有权
标题翻译：半导体器件和方法
公开(公告)号：US20170005045A1
公开(公告)日：2017-01-05
申请号：US15266809
申请日：2016-09-15
申请人： Matthias Merz , Youri Victorovitch Ponomarev , Mark van Dal
发明人： Matthias Merz , Youri Victorovitch Ponomarev , Mark van Dal
IPC分类号： H01L23/00 , H01L23/528 , G01P15/06 , B81B7/00 , H01L23/525 , H01L21/768 , H01L23/522 , B81C1/00
CPC分类号： H01L23/564 , B81B7/0006 , B81B2201/0235 , B81B2203/0315 , B81B2207/015 , B81C1/00246 , B81C99/005 , B81C2201/013 , B81C2203/0136 , B81C2203/0714 , G01P15/06 , G01P15/0802 , G01P2015/0862 , G01P2015/0877 , H01L21/768 , H01L23/5226 , H01L23/5256 , H01L23/528
摘要： Disclosed is a semiconductor device comprising a stack of patterned metal layers separated by dielectric layers, the stack comprising a first conductive support structure and a second conductive support structure and a cavity in which an inertial mass element comprising at least one metal portion is conductively coupled to the first support structure and the second support structure by respective conductive connection portions, at least one of said conductive connection portions being designed to break upon the inertial mass element being exposed to an acceleration force exceeding a threshold defined by the dimensions of the conductive connection portions. A method of manufacturing such a semiconductor device is also disclosed.
摘要翻译：公开了一种半导体器件，其包括由电介质层分隔的图案化金属层的堆叠，所述堆叠包括第一导电支撑结构和第二导电支撑结构以及空腔，其中包括至少一个金属部分的惯性质量元件导电耦合到所述第一支撑结构和所述第二支撑结构由相应的导电连接部分组成，所述导电连接部分中的至少一个设计成使所述惯性质量元件断裂，所述加速力超过由所述导电连接部分的尺寸限定的阈值。还公开了制造这种半导体器件的方法。

12. 发明授权

US08925371B2 Sensor 有权
标题翻译：传感器
公开(公告)号：US08925371B2
公开(公告)日：2015-01-06
申请号：US13382726
申请日：2010-07-16
申请人： Aurelie Humbert , Youri Victorovitch Ponomarev , Roel Daamen , Matthias Merz
发明人： Aurelie Humbert , Youri Victorovitch Ponomarev , Roel Daamen , Matthias Merz
IPC分类号： G01N7/00 , G01N19/10 , G01N27/22 , G01N33/00
CPC分类号： G01N27/223 , G01N33/004
摘要： A sensor (2) for sensing a first substance and a second substance, the sensor comprising first (3) and second (5) sensor components each comprising a first material (20), the first material being sensitive to both the first substance and the second substance, the sensor further comprising a barrier (18) for preventing the second substance from passing into the second sensor component (5).
摘要翻译：一种用于感测第一物质和第二物质的传感器（2），所述传感器包括第一（3）和第二（5）个传感器部件，每个传感器部件包括第一材料（20），所述第一材料对第一物质和第二物质，传感器还包括用于防止第二物质进入第二传感器部件（5）的阻挡层（18）。

13. 发明授权

US08864968B2 Electrochemical sensor 有权
标题翻译：电化学传感器
公开(公告)号：US08864968B2
公开(公告)日：2014-10-21
申请号：US12858353
申请日：2010-08-17
申请人： Matthias Merz , Youri Victorovitch Ponomarev
发明人： Matthias Merz , Youri Victorovitch Ponomarev
IPC分类号： G01N27/333 , G01N27/416 , G01N27/414
CPC分类号： G01N27/4167 , G01N27/333 , G01N27/414 , Y10T29/4913
摘要： An electrochemical sensor device including a sensor chip having an integrated electrochemical sensor element; and a substrate having a first surface on which the sensor chip is mounted, the substrate comprising a reference electrode structure for the integrated electrochemical sensor element, the reference electrode structure connected to the sensor chip via an electrical connection on the first surface of the substrate.
摘要翻译：一种电化学传感器装置，包括具有集成的电化学传感器元件的传感器芯片; 以及基板，其具有安装有传感器芯片的第一表面，所述基板包括用于所述一体化电化学传感器元件的参考电极结构，所述参考电极结构通过所述基板的第一表面上的电连接连接到所述传感器芯片。

14. 发明申请

US20110012211A1 SEMICONDUCTOR DEVICE AND METHOD 审中-公开
标题翻译：半导体器件和方法
公开(公告)号：US20110012211A1
公开(公告)日：2011-01-20
申请号：US12835768
申请日：2010-07-14
申请人： Matthias Merz , Youri Victorovitch Ponomarev , Marcus Johannes Henricus van Dal
发明人： Matthias Merz , Youri Victorovitch Ponomarev , Marcus Johannes Henricus van Dal
IPC分类号： H01L29/84 , H01L21/02
CPC分类号： H01L23/564 , B81B7/0006 , B81B2201/0235 , B81B2203/0315 , B81B2207/015 , B81C1/00246 , B81C99/005 , B81C2201/013 , B81C2203/0136 , B81C2203/0714 , G01P15/06 , G01P15/0802 , G01P2015/0862 , G01P2015/0877 , H01L21/768 , H01L23/5226 , H01L23/5256 , H01L23/528
摘要： Disclosed is a semiconductor device comprising a stack of patterned metal layers (12) separated by dielectric layers (14), said stack comprising a first conductive support structure (20) and a second conductive support structure (21) and a cavity (42) in which an inertial mass element (22) comprising at least one metal portion is conductively coupled to the first support structure and the second support structure by respective conductive connection portions (24), at least one of said conductive connection portions being designed to break upon the inertial mass element being exposed to an acceleration force exceeding a threshold defined by the dimensions of the conductive connection portions. A method of manufacturing such a semiconductor device is also disclosed.
摘要翻译：公开了一种半导体器件，其包括由电介质层（14）分离的图案化金属层（12）的堆叠，所述堆叠包括第一导电支撑结构（20）和第二导电支撑结构（21）和空腔（42）其中包括至少一个金属部分的惯性质量元件（22）通过相应的导电连接部分（24）导电耦合到第一支撑结构和第二支撑结构，所述导电连接部分中的至少一个设计成在惯性质量元件暴露于超过由导电连接部分的尺寸限定的阈值的加速力。还公开了制造这种半导体器件的方法。

15. 发明申请

US20120260732A1 SENSOR 有权
标题翻译：传感器
公开(公告)号：US20120260732A1
公开(公告)日：2012-10-18
申请号：US13382726
申请日：2010-07-16
申请人： Aurelie Humbert , Youri Victorovitch Ponomarev , Roel Daamen , Matthias Merz
发明人： Aurelie Humbert , Youri Victorovitch Ponomarev , Roel Daamen , Matthias Merz
IPC分类号： G01N27/12 , H01B13/00 , B05D5/12
CPC分类号： G01N27/223 , G01N33/004
摘要： A sensor (2) for sensing a first substance and a second substance, the sensor comprising first (3) and second (5) sensor components each comprising a first material (20), the first material being sensitive to both the first substance and the second substance, the sensor further comprising a barrier (18) for preventing the second substance from passing into the second sensor component (5).
摘要翻译：一种用于感测第一物质和第二物质的传感器（2），所述传感器包括第一（3）和第二（5）个传感器部件，每个传感器部件包括第一材料（20），所述第一材料对第一物质和第二物质，传感器还包括用于防止第二物质进入第二传感器部件（5）的阻挡层（18）。

16. 发明申请

US20120249168A1 LIQUID IMMERSION SENSOR 有权
标题翻译：液体浸入式传感器
公开(公告)号：US20120249168A1
公开(公告)日：2012-10-04
申请号：US13510368
申请日：2010-11-29
申请人： Aurelie Humbert , Matthias Merz , Roel Daamen , Youri Victorovitch Ponomarev
发明人： Aurelie Humbert , Matthias Merz , Roel Daamen , Youri Victorovitch Ponomarev
IPC分类号： G01N27/04
CPC分类号： G01N27/041 , G01N27/048
摘要： Disclosed is a liquid immersion sensor comprising a substrate (10) carrying a conductive sensing element (20) and a corrosive agent (30) for corroding the conductive sensing element, said corrosive agent being immobilized in the vicinity of the conductive sensing element and being soluble in said liquid.
摘要翻译：公开了一种液浸传感器，其包括承载导电感测元件（20）的基底（10）和用于腐蚀导电感测元件的腐蚀剂（30），所述腐蚀剂固定在导电感测元件附近并且是可溶的在所述液体中。

17. 发明申请

US20110208457A1 ELECTROCHEMICAL POTENTIOMETRIC SENSING WITHOUT REFERENCE ELECTRODE 有权
标题翻译：无参考电极的电化学电位感测
公开(公告)号：US20110208457A1
公开(公告)日：2011-08-25
申请号：US13061110
申请日：2009-08-24
申请人： Matthias Merz , Youri Victorovitch Ponomarev , Gilberto Curatola
发明人： Matthias Merz , Youri Victorovitch Ponomarev , Gilberto Curatola
IPC分类号： G06F19/00
CPC分类号： G01N27/4148 , G01N27/4145
摘要： The invention relates to a method of determining a charged particle concentration in an analyte (100), the method comprising steps of: i) determining at least two measurement points of a surface-potential versus interface-temperature curve (c1, c2, c3, c4), wherein the interface temperature is obtained from a temperature difference between a first interface between a first ion-sensitive dielectric (Fsd) and the analyte (100) and a second interface between a second ion-sensitive dielectric (Ssd) and the analyte (100), and wherein the surface-potential is obtained from a potential difference between a first electrode (Fe) and a second electrode (Se) onto which said first ion-sensitive dielectric (Fsd) and said second ion-sensitive dielectric (Ssd) are respectively provided, And ii) calculating the charged particle concentration from locations of the at least two measurement points of said curve (c1, c2, c3, c4). This method, which still is a potentiometric electrochemical measurement, exploits the temperature dependency of a surface-potential of an ion-sensitive dielectric in an analyte. The invention further provides an electrochemical sensor deny for determining a charged particle concentration in an analyte. The invention also provides various sensors which can be used to determine the charged particle concentration, i.e. EGFET's and EIS capacitors.
摘要翻译：本发明涉及一种测定分析物（100）中带电粒子浓度的方法，所述方法包括以下步骤：i）确定表面电位对界面温度曲线（c1，c2，c3，c3）的至少两个测量点， c4），其中所述界面温度是由第一离子敏感电介质（Fsd）和分析物（100）之间的第一界面与第二离子敏感电介质（Ssd）与分析物之间的第二界面（100），并且其中所述表面电位由所述第一离子敏感电介质（Fsd）和所述第二离子敏感电介质（Ssd）上的第一电极（Fe）和第二电极（Se）之间的电位差获得，），和ii）从所述曲线（c1，c2，c3，c4）的至少两个测量点的位置计算带电粒子浓度。这种仍然是电位电化学测量的方法利用分析物中离子敏感电介质的表面电位的温度依赖性。本发明还提供了一种用于确定分析物中带电粒子浓度的电化学传感器。本发明还提供可用于确定带电粒子浓度的各种传感器，即EGFET和EIS电容器。

18. 发明授权

US08963563B2 Capacitive sensor for detecting the presence of a substance 有权
标题翻译：用于检测物质存在的电容式传感器
公开(公告)号：US08963563B2
公开(公告)日：2015-02-24
申请号：US12969884
申请日：2010-12-16
申请人： Aurelie Humbert , Matthias Merz , Youri Victorovitch Ponomarev , Roel Daamen , Marcus Johannes Henricus van Dal
发明人： Aurelie Humbert , Matthias Merz , Youri Victorovitch Ponomarev , Roel Daamen , Marcus Johannes Henricus van Dal
IPC分类号： G01N27/22 , G01R27/26
CPC分类号： G01N27/223 , G01R27/2605
摘要： A capacitive sensor for detecting the presence of a substance includes a plurality of upstanding conductive pillars arranged within a first layer of the sensor, a first electrode connected to a first group of the pillars, a second electrode connected to a second, different group of the pillars, and a dielectric material arranged adjacent the pillars, for altering the capacitance of the sensor in response to the presence of said substance.
摘要翻译：用于检测物质存在的电容传感器包括布置在传感器的第一层内的多个直立的导电柱，连接到第一组柱的第一电极，连接到第二组不同组的第二电极支柱和邻近柱子布置的介电材料，用于响应于所述物质的存在而改变传感器的电容。

19. 发明申请

US20120112294A1 IC MANUFACTURING METHOD, IC AND APPARATUS 有权
标题翻译： IC制造方法，IC和装置
公开(公告)号：US20120112294A1
公开(公告)日：2012-05-10
申请号：US13289063
申请日：2011-11-04
申请人： Marcus Van Dal , Aurelie Humbert , Matthias Merz , Youri Victorovitch Ponomarev
发明人： Marcus Van Dal , Aurelie Humbert , Matthias Merz , Youri Victorovitch Ponomarev
IPC分类号： H01L29/84 , H01L21/02
CPC分类号： B81B7/0012 , B81B2201/0214 , B81B2207/015 , B81C2201/016
摘要： A method of manufacturing an integrated circuit having a substrate comprising a plurality of components and a metallization stack over the components, the metallization stack comprising a first sensing element and a second sensing element adjacent to the first sensing element.
摘要翻译：一种制造集成电路的方法，所述集成电路具有包括多个部件的基板和在所述部件上的金属化堆叠，所述金属化堆叠包括第一感测元件和与所述第一感测元件相邻的第二感测元件。

20. 发明申请

US20110296912A1 INTEGRATED CIRCUIT AND MANUFACTURING METHOD THEREFOR 有权
标题翻译：集成电路及其制造方法
公开(公告)号：US20110296912A1
公开(公告)日：2011-12-08
申请号：US12962460
申请日：2010-12-07
申请人： Matthias Merz , Roel Daamen , Aurelie Humbert , Youri Victorovitch Ponomarev
发明人： Matthias Merz , Roel Daamen , Aurelie Humbert , Youri Victorovitch Ponomarev
IPC分类号： G01N27/12 , H01L21/28
CPC分类号： G01N27/121 , G01M3/045 , G01N27/06
摘要： Disclosed is an integrated circuit comprising an electrode arrangement for detecting the presence of a liquid, said electrode arrangement comprising a first electrode and a second electrode, wherein, prior to exposure of the electrode arrangement to said liquid, a surface of at least one of the first electrode and second electrode is at least partially covered by a compound that is soluble in the liquid; the electrical properties of the electrode arrangement being dependent on the amount of the compound covering said surface. An package and electronic device comprising such an IC and a method of manufacturing such an IC are also disclosed.
摘要翻译：公开了一种集成电路，其包括用于检测液体存在的电极装置，所述电极装置包括第一电极和第二电极，其中在将电极装置暴露于所述液体之前，至少一个第一电极和第二电极至少部分被可溶于液体的化合物覆盖; 电极布置的电性能取决于覆盖所述表面的化合物的量。还公开了包括这种IC的封装和电子器件以及制造这种IC的方法。

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